In this work, we introduced a Nd:YGG single mode planar waveguide fabricated by swift heavy ion irradiation. The initial Kr8+ ions beam energy was 2.1 GeV, after passing through the Al foil the beam energy came to 30 MeV. The implantation fluence was 2×1012 ions/cm2. A well region with the refractive index increment in near the surface was obtained after ion irradiation. This index increment was attributed to the ion-induced electronic damage. The characterization of the optical planar waveguide in Nd:YGG crystal was tested by prism coupling and end face coupling method. The micro-luminescence and Raman properties of our ion-irradiation Nd:YGG crystal were investigated. This work has reference value for integrated optical devices on Nd:YGG crystal.