A hybrid solar and RF energy harvester is proposed for applications in self-powered wireless sensor nodes. A planar slot antenna array backed by substrate integrated waveguide (SIW) cavity is produced for RF energy harvesting. A designed rectifier connected to the antenna array converts the received RF energy into DC energy. Solar cells are placed on the rest of the antenna array except slots, fully utilizing the array's surface. The solar cell coverage ratio reaches 87%. The measurement results indicate that under solar simulator illumination, the solar energy harvester has a short-circuit current of 15.7 A, an open-circuit voltage of 0.542 V, and a maximum output power of 5.81 W. Under the RF power density of 85.5 μW/cm2, the RF energy harvester reaches its peak power conversion efficiency (PCE) of 69%. All simulated and measured results are in good agreement, verifying the capabilities of the designed hybrid harvester.
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