Physical Vapor Deposition Coatings Research Articles

Nodular defects aggravated tribocorrosion failure mechanism in Cr/GLC multilayer coatings for marine applications

Amorphous carbon coatings by various physical vapor deposition (PVD) have been widely attempted for enhancing both anti-wear and corrosion resistance of bulk materials used in harsh marine environments. However, PVD coatings are apt to be worn due to the existence of growth defects mostly like macro-size nodular particles. In this work, we deliberately fabricated the SiO2 nanoparticles with a size of 200 nm as nodular defects in Cr and graphite-like carbon (Cr/GLC) multilayer coatings, and the dependence of tribocorrosion behavior of coating on the nodular defects was focused by the comprehensively tribological and electrochemical tests. The results showed that introducing SiO2 nodular particles could not degrade the mechanical properties of Cr/GLC coating, but significantly accelerated both the abrasive wear in early sliding-stage under dry friction and the corrosive failure in chloride solution. Particularly, once the tribocorrosion tests in 3.5 wt.% NaCl solution were conducted for the Cr/GLC coating with nodular defects, the distinct ploughing damage originated from abrasive wear promoted the localized spallation of coatings, which thereafter enabled the easy water wedging along spallation for the substantial catastrophe of coatings. The present observations could evident the importance to fabricate the defect-free protective coatings required for harsh tribocorrosion applications.

Impact of Nb and Al content in arc evaporation targets on Ti1−x−yAlxNbyN coating properties

Titanium-based physical vapor deposition (PVD) coatings, such as titanium nitride (TiN) and titanium niobium nitride (TiNbN), are common solutions for surface modifications in medical applications. Ex vivo studies of retrieved knee implants indicate the demand for increased scratch and abrasion resistance of PVD coatings in clinical applications. Based on the promising mechanical performance of titanium aluminum nitride (TiAlN) as a coating for tools, the aim of this study was to evaluate the impact of the chemical composition of titanium-based nitride coatings with aluminum (Al) and niobium (Nb). Nine titanium aluminum niobium nitride (Ti1−x−yAlxNbyN) coatings with 0.4 ≤ x < 0.7 and 0 ≤ y ≤ 0.18, as well as commercial TiN and TiNbN, were coated in an industrial scale arc PVD process, following a randomized, multifactorial response surface design. The deposition rate, the scratch resistance, and the hardness were measured following standardized protocols. The microstructure of the coating was analyzed by SEM and XRD. In addition, the surface roughness was determined by laser scanning microscopy. A quadratic regression was performed to determine the impact of the chemical composition on coating properties. Experimental results and regression analyses revealed the significant impact of the chemical composition of Ti1−x−yAlxNbyN on the coating microstructure, mechanics, and morphology. Scratch resistance for initial crack formation and cohesive failure could be increased decisively, compared to TiN.

Investigating the Impact of Physical Vapour Deposition (PVD)-Coated Cutting Tools on Stress Corrosion Cracking Susceptibility in Turning Super Duplex Stainless Steel

This work aimed to ascertain the corresponding influences of several PVD-coated cutting tools on the susceptibility of the machined surface of super duplex stainless steel (SDSS) to stress corrosion cracking. Coatings comprised of AlCrN, AlCrN/TiSiN, and AlTiN were applied to cemented carbide cutting tools using the PVD method; these were then used to turn the outer surface of the SDSS tube section. During the cutting process, the material presents the following combination of features: (i) a tendency for strain hardening, reflected in microstructural modifications and residual stresses of the machined surface and (ii) high temperatures in the cutting region, reducing the tool life. The goal of this work was to evaluate the surface integrity (work hardening and corrosion behaviour) of the SDSS obtained after the machining process (finish turning) with cemented carbide tools coated with three different PVD coatings.

A Comprehensive Review of Cathodic Arc Evaporation Physical Vapour Deposition (CAE-PVD) Coatings for Enhanced Tribological Performance

In the realm of industries focused on tribology, such as the machining industry, among others, the primary objective has been tribological performance enhancement, given its substantial impact on production cost. Amid the variety of tribological enhancement techniques, cathodic arc evaporation physical vapour deposition (CAE-PVD) coatings have emerged as a promising solution offering both tribological performance enhancement and cost-effectiveness. This review article aims to systematically present the subject of CAE-PVD coatings in light of the tribological performance enhancement. It commences with a comprehensive discussion on substrate preparation, emphasizing the significant effect of substrate roughness on the coating properties and the ensuing tribological performance. The literature analysis conducted revealed that optimum tribological performance could be achieved with an average roughness (Ra) of 0.1 µm. Subsequently, the article explores the CAE-PVD process and the coating’s microstructural evolution with emphasis on advances in macroparticles (MPs) formation and reduction. Further discussions are provided on the characterization of the coatings’ microstructural, mechanical, electrochemical and tribological properties. Most importantly, crucial analytical discussions highlighting the impact of deposition parameters namely: arc current, temperature and substrate bias on the coating properties are also provided. The examination of the analyzed literature revealed that the optimum tribological performance can be attained with a 70 to 100 A arc current, a substrate bias ranging from −100 to −200 V and a deposition temperature exceeding 300 °C. The article further explores advancements in coating doping, monolayer and multilayer coating architectures of CAE-PVD coatings. Finally, invaluable recommendations for future exploration by prospective researchers to further enrich the field of study are also provided.

Atomic Radius Mismatch: A Key Parameter for Design and Synthesis of High‐Entropy Physical Vapor Deposition Coatings—Review

High‐entropy metal sublattice coatings (HESCs) prepared by physical vapor deposition (PVD) have received attention due to their diverse range of properties and applications. One of the most critical requirements for their synthesis is the prediction and control of their widespread properties, and several efforts have been undertaken using various thermodynamical parameters. The majority of these predictions concentrate on high‐entropy alloys (HEAs) while high‐entropy ceramics receive little attention. One of the most important parameters to control the structure and properties of HEAs is their atomic radius mismatch (δr), which is applied to crystalline, amorphous, and composite (amorphous matrix, crystalline matrix, and multilayer) HESCs. Based on the relationships between δr and structure, mixing enthalpy (ΔHmix), electronegativity difference (Δχ), ion bonding percentage (IBPHE), mechanical properties (including hardness, H, and Young's modulus, E), and wear performance descriptors (H/E and H3/E2 ratios), a δr‐based map to aid the design and selection of elements for HESCs is provided.

A Comparison Study on the Microstructure, Mechanical Features, and Tribological Characteristics of TiN Coatings on Ti6Al4V Using Different Deposition Techniques

Titanium alloys are considered lightweight alloys and are widely applied across various industries. However, their low hardness, poor wear resistance, and limited oxidation resistance restrict their prospects for wider application. In this paper, nitride coatings were prepared using three preparation processes, namely laser surface nitriding (LSN), physical vapor deposition (PVD), and plasma ion implantation (PII). Their microstructure, microhardness, tribological behavior, and high-temperature oxidation characteristics were compared. The experimental results revealed that nitrided coatings were successfully prepared using the three methods. However, a comparison of these data shows that the LSN coating exhibited superior comprehensive performance. It achieved the maximum thickness within the shortest preparation time: the thickness was about 280 μm and the deposition rate of the LSN method was 2250 and 90,000 times higher than those of the PVD and PII methods. Nitrides have high hardness, but the carrying capacity could be attributed to the thickness of the coatings: the PVD coating could withstand a force of 500 g, while the PII coating only withstood a force of less than 25 g. In addition, as hardness is the most important factor for excellent wear resistance, the average volumetric wear rate of the LSN and PVD coatings was about 9 × 10−6 mm3/m·N, and their relative wear resistance was 49.2 times that of Ti6Al4V. Meanwhile, the excellent bond between the LSN coating and the substrate was evidenced by a high-temperature oxidation test during a rapid heating–cooling cycle.

The combination of electrodeposited chromium (III) and PVD as an industrial viable solution for the replacement of electrodeposited chromium (VI)

Chromium electrodeposition from hexavalent Cr (VI) aqueous solutions for Cr thin films and coatings has been vastly used for distinct purposes, due to the attractive appearance and outstanding mechanical, wear and corrosion properties of the resulting coatings. Regardless, its toxicity led to the implementation of European legislation to rescript its use, such as the European Norms Regulation on the Registration, Evaluation, Authorisation, and Restriction of Chemicals (REACH) and Restriction of Certain Hazardous Substances (RoHS). Thus, a replacement for Cr VI must be found, however, it would be important that the resulting films keep their characteristics. In the literature chromium electrodeposition from trivalent chromium (Cr III) aqueous solutions has been proposed and tested, however, its mechanical and optical properties are not comparable with the ones of Cr VI-based coatings and an alternative method is then required as Cr III alone does not deliver the necessary requirements. In this work, a combination of Cr III electrodeposition (ECD) in conjugation with a physical vapour deposition (PVD) multilayered coating of Cr, N, and C is explored to provide a coating capable of fulfilling the industry requirements. Subjecting the developed samples to a Neutral Salt Spray Test (ISO 9227:2027), shows that both the Cr III and Cr III + PVD coatings have similar results regarding corrosion resistance. Moreover, impedance electrochemical spectroscopy demonstrates the coating porosity as the critical point opening the door to further improvements. Aesthetically, applying the PVD layers allows for replicating the former shiny and black chromed look and expands to more different and appealing colours. Hence, this innovative alternative, based on the use of trivalent chromium by electro-deposition followed by PVD coatings, has proven potential to substitute the hexavalent chromium ECD process, while being a viable and sustainable alternative and expanding its use through different colours.

Investigation of the Influence of Triboactive CrAlMoN Coating on the Joint Wear of Grease-Lubricated Roller Chains

Physical vapor deposition (PVD) coatings are vital for enhancing wear resistance. However this technology faces challenges when coating inaccessible surfaces due to its line-of-sight characteristic. A potential remedy is utilizing triboactive CrAlMoN coatings. These form a tribofilm in the contact zone when applied to one contact partner along with a suitable lubricant. This tribofilm can subsequently safeguard inaccessible yet tribologically stressed surfaces. One of the main applications for this method is roller chain drives, whose longevity depends on the joint wear and the resulting chain elongation. Large-scale pin coatings have proven effective in curbing wear and prolonging chain life. However, the inaccessibility of bushes complicates standard PVD coating procedures. Triboactive coatings offer the possibility of forming transfer layers on the bushes, thereby enhancing friction reduction and wear protection. Experimental material studies for chain drives can be cost-intensive due to complexity and numerous components. This article demonstrates that CrAlN and CrAlMoN coatings in combination with greases with the additives phosphorus and sulfur can reduce friction and wear in chain joints. Furthermore, it is shown that a reasonable selection of tribometer testing can significantly reduce costs. Comparing the results of tests on a pin-on-disk tribometer and component tests show that model tests cannot completely replace component tests. But the combination offers an efficient way to optimize test matrices. Triboactive coatings like CrAlMoN hold promise for addressing the challenge of inaccessible surfaces. Reasonable tribometer test selection can help mitigate the costs of experimental studies, making these coatings a more practical solution.

Tribological Behavior of Physical Vapor Deposition Coating for Punch and Dies: An Overview

Punches and dies are cutting tools used to make holes on metallic surfaces using the punch which passes through the work into a die. Todays tool/die machinists and buyers need to know more than simply the qualities of the raw metal that forms the tooling blank because of the rapid evolution of PVD coating technology. When it comes to tooling design, raw material, heat treatment, coating qualities, material being machined, cycle time requirements and permitted machine downtime, they must comprehend the full system. Surface modifications for punch/dies are typically required to improve their mechanical and corrosion, properties. Therefore PVD coatings of punch/die material using TiN, TiCN, CrN, TiAlN and nanocomposite coatings has improved the tribological properties, reduce total cost of tools and down time. This paper focuses on comprehensive review on PVD processes on punch/die materials, properties of die materials such as wear, hardness and surface finishes etc. In addition to that coating materials, its properties and characterization techniques were addressed.

Effect of CrAIN coating properties on impact fatigue of tool steel

The tools in forming processes are subjected to cyclic impact loads. Physical vapor deposition (PVD) coatings can potentially improve the service life of such tools, given the effect of coating properties on impact fatigue of coated substrate is well-understood. Previous investigations on the cyclic impact loading of PVD coated tool steels mainly correlate the plastic deformation of the substrate to the resulting coating cracks. Hereby, the effect of underlying elastic-plastic coating deformation mechanism in combination with coating properties needs further clarification. Therefore, the current work aims to investigate the combined effect of thickness, morphology, elastic-plastic deformation and residual stress state of the coating on the impact fatigue behavior of coated tool steel substrates. For this purpose, (Cr90Al10)N and (Cr66Al34)N coatings, each with a thickness of s = ∼ 1.7 μm and s = ∼3.5 μm, were deposited on HS6–5-2C substrates. In addition to coating characterization, the residual stresses were measured by focused ion beam-digital image correlation (FIB-DIC) ring-core method. The elastic-plastic deformation of the coatings was studied by nanoindentation. The coated samples were subjected to cyclic impact loading with an initial hertzian contact pressure pH = ∼ 9.7 GPa and frequency f = 50 Hz for N = 0.1, 0.5 and 1 million impacts. The impact imprints were analyzed using high resolution electron microscopy to study the coating deformation mechanism in combination with fatigue cracks initiation. Columnar inclination and shear gliding along the column boundaries resulted in the initiation of fatigue cracks in the coating around the boundary region of impact imprint. The chemical composition, morphology, residual stress state and elastic-plastic deformation behavior of the coating cumulatively affected the impact fatigue as thick coatings showed reduced resistance against initiation of fatigue cracks. The investigation contributes to adjusting the PVD coating thickness and resulting coating properties for higher tool service life in applications involving cyclic impact loading.

Oxidation and wear behavior of CrAlMoN with varied Mo-content for cutting Ti6Al4V

The cutting of difficult to machine materials such as titanium alloys is challenging for the machining industry. In case of the titanium alloy Ti6Al4V, the properties of the material cause high temperatures, mechanical loads as well as high frequency vibrations at the cutting edge, leading to premature tool failure. The use of uncoated carbide tools is very common for machining of Ti based alloys. However, temperature active, self-lubricating physical vapor deposition (PVD) coatings like CrAlMoN showed promising results to reduce friction and wear during turning of Ti6Al4V. In the present study, self-lubricating (Cr34Al41Mo25)N, (Cr29Al36Mo35)N and (Cr25Al31Mo44)N coatings were investigated on cemented carbide tools. These were deposited by a hybrid process combining direct current Magnetron Sputtering and High Power Pulsed Magnetron Sputtering. Coating morphology, thickness, chemical composition, indentation hardness and modulus at ϑ = 20 °C, ϑ = 200 °C, ϑ = 400 °C and ϑ = 600 °C as well as the oxidation behavior were analyzed. Moreover, wear development after cutting tests using a CNC-lathe was investigated. Independent of Mo-content, all coating variants possessed a dense morphology and a smooth surface topography, as well as a coating adhesion class of HF1 to the cemented carbide substrate in Rockwell indentation tests according to DIN 4856. With an increasing amount of Mo, heat treatment temperature and time, more self-lubricating molybdenum oxides such as MoO3 and Mo4O11 were detected by Raman spectroscopy. Therefore, the coating with the highest amount of Mo possessed the highest amount of molybdenum oxides. After cutting tests, molybdenum oxides were also found on the tool flank face by Raman spectroscopy. The level of flank wear land width decreased with increasing amount of Mo.

PVD for Decorative Applications: A Review.

Physical Vapor Deposition (PVD) is a widely utilized process in various industrial applications, serving as a protective and hard coating. However, its presence in fields like fashion has only recently emerged, as electroplating processes had previously dominated this reality. The future looks toward the replacement of the most hazardous and toxic electrochemical processes, especially those involving Cr(VI) and cyanide galvanic baths, which have been restricted by the European Union. Unfortunately, a complete substitution with PVD coatings is not feasible. Currently, the combination of both techniques is employed to achieve new aesthetic features, including a broader color range and diverse textures, rendering de facto PVD of primary interest for the decorative field and the fashion industry. This review aims to outline the guidelines for decorative industries regarding PVD processes and emphasize the recent advancements, quality control procedures, and limitations.

Comprehensive Analysis of Different Coating Materials on the POM Substrate.

This study presents a comprehensive analysis of different coating materials on the POM substrate. Specifically, it investigated physical vapour deposition (PVD) coatings of aluminium (Al), chromium (Cr), and chromium nitride (CrN) of three various thicknesses. The deposition of Al was accomplished through a three-step process, particularly plasma activation, metallisation of Al by magnetron sputtering, and plasma polymerisation. The deposition of Cr was attained using the magnetron sputtering technique in a single step. For the deposition of CrN, a two-step process was employed. The first step involved the metallisation of Cr using magnetron sputtering, while the second step involved the vapour deposition of CrN, obtained through the reactive metallisation of Cr and nitrogen using magnetron sputtering. The focus of the research was to conduct comprehensive indentation tests to obtain the surface hardness of the analysed multilayer coatings, SEM analyses to examine surface morphology, and thorough adhesion analyses between the POM substrate and the appropriate PVD coating.

Towards lube-free aluminum high pressure die casting using duplex AlCrN physical vapor deposition coatings

Aluminum high pressure castings (HPDC) were successfully produced on two simple but slightly different H13 steel dies that had been coated with AlCrN physical vapor deposition (PVD) coatings and without the use of conventionally-sprayed die lubricants. Over 200 lube-free (no lubricant) castings were produced in both of the dies. Temperature simulations of the dies matched well with thermal camera measurements taken during the trials, and helped explain the positions where small amounts of soldering and aluminum marks developed. Aluminum build-up on the die surfaces was observed as an intermittent phenomenon and did not lead to soldering. Due to the high gate velocities used in these trials, a large fraction of the AlCrN coating was washed out or cracked. No chemical reaction or intermetallic formation was observed on the analyzed surfaces, suggesting that build-up of aluminum on the die surface occurred by mechanical keying rather than by chemical soldering. A mechanistic model was developed to understand the correlation between surface roughness, wetting angle and HPDC pressure, in an attempt to explain why lube-free aluminum HPDC was possible for these simple die geometries, and to shed light on why it is more challenging for more complex die geometries. This study has demonstrated that lube-free aluminum die casting is possible by coating simple geometry dies with duplex AlCrN PVD coatings and suggests that lube-free castings might extend die life.

A review on preparation process and tribological performance of coatings for internal combustion engine piston ring

Reducing the energy consumption and exhaust emission, and improving the combustion efficiency of internal combustion engine are important for solving the problems of climate change and environmental pollution. The piston ring-liner system is one of the most serious friction pairs in internal combustion engine, accounting for 26% of the total friction loss. Depositing strengthened coatings on the surface of piston rings is an effective method to reduce the friction coefficient and wear rate. This paper reviews the research progress of several representative technologies for preparing coatings, such as electroplating, physical vapor deposition (PVD), thermal spraying and chemical vapor deposition (CVD), and so on. Various coatings, such as Cr-Al2O3 coating prepared by representative electroplating process, CrN and DLC coatings prepared by physical vapor deposition, and Mo-based and C-based coatings prepared by thermal spraying process, are briefly discussed. Furthermore, the positive and negative aspects of commonly used piston ring coatings are compared, and their development trends are summarized.

Contribution of galvanic coupling with TiN, TiAlN, and CrN to the corrosion of steel in neutral and acidic chloride solutions

AbstractThe inherent defective morphology of the physical vapor deposition (PVD) hard coatings limits their corrosion protective ability. We examined the impact of nitride‐based PVD coatings, including TiN, TiAlN, and CrN deposited on inert substrates by cathodic arc PVD method (CA‐PVD), on the galvanic corrosion of carbon steel. Their contribution was evaluated by zero‐resistance ammeter (ZRA) and electrochemical impedance spectroscopy (EIS) in 3.5 wt.% NaCl at pH 2 and 6, with and without aeration. The results indicated the prominent role of the coating type and the coupling environment on the generated galvanic currents. Immersion tests for the TiN‐, TiAlN‐, and CrN‐coated steel cross‐sections visually verified these results. The galvanic current contribution was distinct in environments where oxygen reduction is the dominant cathodic reaction. However, the layers' contribution to galvanic corrosion was minimal in deaerated acidic solutions, which is attributed to the high bonding strength of adsorbed intermediates to the coating surfaces.

Influence of the etching process on the coating performance in dry tribological contacts

Physical vapor deposition (PVD) coatings are utilized for wear protection of gears. The use of PVD coatings in unlubricated contacts is also the subject of several research efforts. A promising approach to reduce wear in dry tribological contacts is the combination of MoS2 and WS2 embedded in CrAlN. One possible way to deposit these coatings is the application of High Power Pulse Magnetron Sputtering (HPPMS) process combined with direct current Magnetron Sputtering (dcMS). A challenge by depositing these coatings with an HPPMS/dcMS process is a sufficient adhesion between the coating and the substrate. The present study focuses on the influence of the etching process on the performance of CrAlN + Mo:W:Sg coatings in dry tribological contacts. Before coating deposition, the substrates were pretreated inside the vacuum chamber by different etching processes. During booster etching, which increases the Ar ionization, the substrate bias UB was varied between UB = −150 and UB = −250 V with steps of ΔUB = −50 V. Furthermore, an HPPMS metal ion etching process was used after booster etching at UB = −150 V for these processes. For HPPMS metal ion etching, the number of HPPMS cathodes was varied between one and two. With respect to the etching process, the morphology, surface roughness, compound adhesion by means of the scratch test as well as the coefficient of friction, and the wear volume of the subsequently deposited coatings were investigated. When increasing the substrate bias UB during booster etching, a reduced compound adhesion was found. Moreover, an increased wear volume was observed after pin-on-disk (PoD) tests. For metal ion etching with one activated HPPMS cathode, the wear volume after the PoD test was decreased compared to the pure booster etching processes. When increasing the number of HPPMS cathodes during metal ion etching, the compound adhesion decreased slightly. The wear volume after PoD tests, in contrast, increased. When only using one HPPMS cathode, the lowest wear volume of all investigated coatings was achieved. The present investigations show the potential of tailoring the etching process in order to increase the performance of PVD coatings. A customized HPPMS metal ion etching process can be used to improve the properties of well-established hard PVD coatings.

Comparison to Micro Wear Mechanism of PVD Chromium Coatings and Electroplated Hard Chromium

Electroplated hard chromium (EPHC) has been widely used in industry due to its excellent mechanical properties, but the development of this technology is limited by environmental risks. The physical vapor deposition (PVD) process has shown promise as an alternative to EPHC for producing chromium-based coatings. In this research, we investigate the microstructure and wear resistance of pure chromium coatings using two PVD techniques, namely, magnetron sputtering ion plating (MSIP) and micro-arc ion plating (MAIP), which are compared to EPHC. To assess wear resistance, we evaluated factors such as hardness, coating base bonding force, wear rate and friction coefficient via friction and wear experiments. The results show that, in terms of microstructure, while the EPHC coating does not exhibit a strong preferred growth orientation, the PVD coatings exhibit an obvious preferred growth orientation along the (110) direction. The average grain size of the EPHC coating is the smallest, and the PVD chromium coatings show a higher hardness than the EPHC coating. The results of pin-on-disk tests show that there is little difference in friction coefficients between EPHC and MAIP chromium plating; however, the MAIP chromium coating showed an excellent specific wear rate (as low as 1.477 × 10-13 m3/Nm). The wear condition of the MAIP chromium coating is more stable than that of the EPHC coating, indicating its potential as a replacement for EPHC.

Noise Evaluation of Coated Polymer Gears.

A comprehensive experimental investigation of the noise evaluation of coated spur polymer gears made of POM was performed in this study. The three Physical Vapour Deposition (PVD) coatings investigated were aluminium (Al), chromium (Cr), and chromium nitrite (CrN). The gears were tested on an in-house-developed testing machine under a torque of 20 Nm and at a rotational speed of 1000 rpm. The noise measurements were performed with the tested gear pair on the testing device with a sound-proof acoustic foam used for the acoustic sound-proof insulation. The sound signal was analysed in time, frequency, and time-frequency domains and typical phenomena were identified in the signal. Experimental results showed that the noise level was higher for polymer gears with different coatings if compared to the polymer gears without coatings. With sound analysis in the time-frequency domain, precise degradation of the coatings could be noticed. In future studies, it would be appropriate to use a new method for signal analysis, e.g., high-order statistics and hybrid technique.

Direct Processing of PVD Hard Coatings via Focused Ion Beam Milling for Microinjection Molding

Hard coatings can be applied onto microstructured molds to influence wear, form filling and demolding behaviors in microinjection molding. As an alternative to this conventional manufacturing procedure, "direct processing" of physical-vapor-deposited (PVD) hard coatings was investigated in this study, by fabricating submicron features directly into the coatings for a subsequent replication via molding. Different diamondlike carbon (DLC) and chromium nitride (CrN) PVD coatings were investigated regarding their suitability for focused ion beam (FIB) milling and microinjection molding using microscope imaging and areal roughness measurements. Each coating type was deposited onto high-gloss polished mold inserts. A specific test pattern containing different submicron features was then FIB-milled into the coatings using varied FIB parameters. The milling results were found to be influenced by the coating morphology and grain microstructure. Using injection-compression molding, the submicron structures were molded onto polycarbonate (PC) and cyclic olefin polymer (COP). The molding results revealed contrasting molding performances for the studied coatings and polymers. For CrN and PC, a sufficient replication fidelity based on AFM measurements was achieved. In contrast, only an insufficient molding result could be obtained for the DLC. No abrasive wear or coating delamination could be found after molding.