The internal energy distributions of reaction products are important information in clarifying the mechanism of chemical reactions. There are few reports of the nascent vibrational energy distribution of CS(X1Σ+) generated in the S(1D) + CS2 reaction. As long as S(1D) is produced by photodissociation of CS2, CS(X1Σ+), as a product of the chemical reaction and as a photoproduct of CS2 is indistinguishable. In this study, S(1D) was generated by the photolysis of OCS at 248 nm, where CS2 hardly dissociates, and CS(X1Σ+) was generated only by the S(1D) + CS2 reaction. The vibrational levels v″ = 0-6 of CS(X1Σ+) were detected with laser-induced fluorescence (LIF) via the A1Π-X1Σ+ transition. The identical time profiles of the LIF intensities showed that all the vibrational levels were produced by the S(1D) + CS2 reaction. The relative nascent vibrational populations of CS(X1Σ+) determined from the area intensities of the excitation spectra are 1.00 ± 0.11/0.58 ± 0.06/0.31 ± 0.03/0.078 ± 0.009/0.013 ± 0.001/<0.002/<0.002 (the values for v″ = 5 and 6 are the upper limits) for v″ = 0/1/2/3/4/5/6. The distribution agrees well with the statistical (prior) distribution.