Ultrathin films of germanium (Ge) have been electrodeposited onto surface-enhanced raman spectroscopy (SERS)-active, polycrystalline gold (Au) nanoparticle film electrodes from aqueous solutions containing dissolved GeO2. An overlayer SERS strategy was employed to use the SERS-activity of the underlying Au electrode to enhance the Raman signatures separately for the Ge phonon mode and vibrational modes of surface groups. Electrochemical and spectroscopic data are presented that demonstrate monolayer-level detection of the electrodeposited material and the preparation of crystalline Ge films exhibiting quantum-confinement effects. Potential-dependent Raman spectra are shown that identify electrodeposition conditions where Ge films can be deposited with either long- or short-range crystalline order. Raman spectra collected with electrodeposited Ge films immersed in solutions containing CN-(aq) did not indicate a significant presence of pinholes that exposed the underlying Au(s) substrate. Raman spectra were also collected that identified a potential-dependence for Ge hydride formation at the interface of these films. Separate spectra were collected for the oxidative dissolution of Ge in solution and the complete dry oxidation of Ge to GeOx in air. These data sets cumulatively represent the first demonstration of the overlayer SERS strategy to follow surface chemical processes at crystalline, nanostructured, Ge materials in situ and in real time.