We explore the electronic transport properties of hydrogenated epitaxial WO3 films. Ionized hydrogen not only generates an electron carrier but also acts as an impurity center, providing a useful approach to investigate a macroscopic quantum transport phenomenon of weak localization. Temperature dependent-resistivity and anomalous magnetoresistance results are analyzed based on Mott's variable range hopping and weak localization. From the model studies, the phase coherence length is estimated to have a temperature dependence of T −1.6 and is determined to vary from ∼22 nm at 80 K to ∼180 nm at 20 K. The length at 20 K is of a similar order of magnitude of film thickness, which requires a dimensional crossover between three-dimensional and two-dimensional localization.