The low- Tc phase YBa 2Cu 3O x ( x∼6.6, Tc∼60 K) which was sintered into a dense tablet was subjected to gaseous ClF 3, in order to investigate the mechanism of fluorohalogenation of a sintered YBa 2Cu 3O x . It was found that the fluorochlorinated high- Tc phase YBa 2Cu 3O x F y Cl z ( x∼6.6, y∼0.5, z∼0.1) was formed at the outer part of sample tablet, and that the high- Tc phase with high oxygen and low halogen contents ( x∼6.8, y∼0.1, z∼0.01) was also formed at the inner part of it, despite of no oxygen in the reaction atmosphere. Rietveld analysis of neutron powder diffraction data of the fluorochlorinated high- Tc phase YBa 2Cu 3O x F y Cl z (YBa 2Cu 3O 6.10F 0.75Cl 0.49, T onset=94.5 K) revealed that fluorine preferentially occupied the oxygen defect site and/or the vacant site along the Cu–O chain. On the other hand, chlorine occupied as Cl the site at (0, 0, 1/2) which was the center of the yttrium site surrounded with oxygen because Cl − was too large to occupy the oxygen defect site and/or the vacant site along the Cu–O chain. The ClF 3-treated sample was considered to consist of at least two phases of the orthorhombic YBa 2Cu 3O 6.35F 0.65Cl 0.49 ( Pmmm) and the tetragonal YBa 2Cu 3O 6.29F 1.17Cl 0.49 ( P4/ mmm). The chemical formula estimated by the Rietveld refinement was YBa 2Cu 3O 6.33F 0.80Cl 0.49 which was very close to the analyzed composition, YBa 2Cu 3O 6.35F 0.75Cl 0.49 in which chlorine was assumed to be zero-valence.