BN is the currently required segregant for perpendicular FePt media. We found that BN can be diffused from the MgTiOBN intermediate layer during a high temperature process. The FePtCAg film sputtered on MgTiOBN layers illustrates higher perpendicular magnetocrystalline anisotropy (Ku) (1.43 × 107 erg/cm3) and coercivity (normal to film surface) (17 kOe) at 350 K compared to BN/FePtCAg/MgTiON film. From the microstructure, the FePtCAg film shows the granular structure on the MgTiOBN intermediate layer, but parts of the irregular FePt grains are agglomerated and partially separated in the matrix, with grains size being, on average, 26.7 nm. Cross-sectional imaging showed that the FePt grains have a truncated pyramid shape with a lower wetting angle, which is influenced by the surface energy of MgTiOBN. BN segregation at FePt grains or boundaries is still not clear. Using the electron energy loss spectrum (EELS), we found that part of the BN atoms were clearly observed in the FePt lattice and iron-boride oxide was indexed in the x-ray photoelectron spectroscopy (XPS) spectra. To determine the effects of BN segregant (from capping layer or intermediate layer) on the magnetic switching behavior of FePtCAg film, the intrinsic-(ΔHint = 6.17 kOe, 6.54 kOe) and extrinsic- (ΔHext = 0.80 kOe, 0.39 kOe) switching field distribution (SFD) were measured by plotting saturated major- and unsaturated minor- hysteresis loops to evaluate the crystal orientation and microstructure (grains volume and distribution) for BN/FePtCAg/MgTiON and FePtCAg/MgTiOBN films, respectively. The main contribution of intrinsic SFD is the c-axis misalignment for the BN/FePt/MgTiON sample; however, the dispersed magnetic anisotropy has a higher input to intrinsic SFD for FePtCAg/MgTiOBN/CrRu film.