We have developed a new planar flux sensing coil using multilayer printed wiring board fabrication technique. The coil is useful for high frequency magnetic flux sensing because the coil is sensitive to the magnetic field and insensitive to the electric field. A 1 MHz–3.5 GHz broad bandwidth thin-film permeance meter is developed by using parallel plates with short plate and shielded loop pickup coil combination. We investigated the upper frequency limit of permeance measurement is given by the minimum value of standing wave position at the center of pickup coil.