Abstract Samarium (Sm)-doped titanium dioxide (TiO₂) thin films were synthesized using the spray pyrolysis technique at 400°C, with Sm doping concentrations of 0, 2, 4, and 6 Wt.% to enhance structural, optical, morphological, and gas-sensing properties. The films, deposited on ultrasonically cleaned glass substrates, were characterized using X-ray diffraction , scanning electron microscopy, atomic force microscopy (AFM), and UV-Vis spectroscopy. Structural analysis revealed improved crystallinity and uniform surface morphology with Sm doping, while AFM indicated increased surface roughness, promoting gas adsorption. UV-Vis analysis showed a reduced energy bandgap, enhancing visible light absorption and gas-sensing performance. Gas sensing evaluations demonstrated high sensitivity to formaldehyde, with notable selectivity over ethanol, toluene, and xylene at room conditions. The 6 Wt.% Sm-doped TiO₂ film exhibited the highest response (17.4), with a detection limit of 5 ppm, and fast response (23 s) and recovery (27 s) times. These properties underline the potential of Sm-doped TiO₂ films for efficient room-temperature gas sensors. Their enhanced sensitivity, selectivity, and stability suggest promising applications in environmental monitoring and air quality management, particularly for formaldehyde detection and volatile organic compound discrimination.
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