In this study, we propose a new method for determination of calcium (Ca) isotopes using inductive coupled plasma-tandem mass spectrometry (ICP-MS/MS). The most abundant isotope of Ca, 40Ca, has a spectrum identical with that of argon (Ar), which is often used as the carrier gas in ICP-MS analysis. The detection capability for 40Ca is thus significantly reduced in the presence of 40Ar. To avoid interference from 40Ar during the 40Ca measurements, ozone (O3) was used as the reaction gas in the ICP-MS/MS analysis. The reaction of Ca+ with O3 in the collision cell preferentially produced CaO3+. In contrast, the reaction between Ar+ and O3 produced ArO+, which further reacted with the oxidized O3 to produce Ar+. Because Ar+ does not produced ArO3+ as the main product of the reaction with O3, the measurement of Ca+ as CaO3 via O3-induced oxidation resulted in considerably less interference from Ar+. The detailed mechanism of CaO3+ formation was investigated via quantum chemistry calculations by using density functional theory. The interaction between Ca+ and O3 yielded CaO3+, which immediately dissociated into either Ca+ and O3 or CaO+ and O2 because the pressure in the collision cell was approximately 1 Pa in the MS/MS experiments. Consequently, CaO3+ was formed by the consecutive reaction of Ca+ with O3, with CaO+ and CaO2+ as intermediates. The present method achieved the detection of less abundant Ca isotopes in certified reference materials such as 43Ca, 44Ca, 46Ca, and 48Ca, thereby allowing the determination of Ca isotopes with high sensitivity.