In this study, we investigated the ozone inactivation efficiency of Bacillus atrophaeus spores attached to various tile surfaces. Eight different types of tiles were employed, considering factors such as porosity (ceramic, porcelain), color (white, black), and glossiness (matte, glossy). Inactivation was performed by exposing the spore-loaded tiles to ozone gas for a specified duration. The inactivation efficiencies of ozone gas on different tile surfaces were compared by analyzing the colony-forming units of desorbed Bacillus atrophaeus cultured in a growth medium. Results revealed a reduction in colony counts with increasing ozone exposure time, indicating a proportional enhancement in inactivation effectiveness on ozone exposure time. After exposure to ozone gas for 30 min or longer, more than 90% of spores on each tile were inactivated. Regarding porosity, ceramic tiles exhibited slightly superior inactivation effects compared to porcelain tiles. Additionally, in terms of glossiness, glossy tiles demonstrated better inactivation effects than matte tiles. However, no significant differences were observed in inactivation effects based on the color of the tiles.