Oxygen-doped germanium samples have been subjected to a prolonged precipitation treatment in the 560–620 °C temperature range. Broad infrared absorption bands with maxima at 865 and 884 cm −1 which develop proportionally with the loss of interstitial oxygen are observed and are attributed to germanium oxide precipitates. Secondary peaks appear at 675 and 958 cm −1. The broad absorption bands are analyzed using a procedure which was previously applied to SiO x precipitates in silicon. Similarly as in silicon, the absorption in germanium may be fitted assuming the presence of polyhedral and platelet GeO x precipitates, with relative occurrence depending on the details of the thermal treatment.
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