High-precision oxygen content measurement is crucial for statistical analysis of combustion chemical reaction. Deep learning based soft sensor is a new class of intelligent tools for monitoring combustion oxygen content. But in the actual production, data for sensors are often insufficient. A new soft sensing model is proposed to display the excellent performance of denoising diffusion probabilistic model (DDPM) in data generation. Firstly, a UNet based soft sensor is designed by integrating self-attention mechanism into the convolution layers. Then, a denoising loss function is designed to link the feature extraction process of soft sensor model with the reverse denoising process of DDPM, and the noise prediction neural network of DDPM is used to improve the feature extractability of the soft sensor model. Finally, the proposed model is compared with common models. The effectiveness and superiority of the proposed soft sensing model for oxygen content prediction, especially in the case with a small sample size, are both confirmed by the results.
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