The effect of surface deformation on selective oxidation is studied on a Ni-30Cr alloy prepared by grinding (SiC paper) vs. polishing (diamond suspensions), and oxidized in air at 340−600 °C. Imaging and subsurface composition profiling by transmission electron microscopy are combined to investigate the relationships between microstructure, diffusion and oxidation. The depth of deformed material is found to be critical to selective oxidation. Atypical Cr depletion profiles reflect an abrupt change in diffusion properties between the severely deformed subsurface and the bulk. The relative contributions of grain boundary, dislocation and bulk diffusion to the Cr flux are examined based on short-circuit diffusion theory.