Abstract Young's modulus of polysilicon is a vital mechanical parameter highly dependent on sample preparation and growth techniques. In-situ measurement of this property is essential for effective process control monitoring in MEMS fabrication. In this work, an innovative electrostatic actuated method without pull-in instability for in-situ test is proposed. Based on the behavior simulated through finite element analysis, physics-guided neural networks which integrate the advantage of both data science models and physics-guided ones are utilized to extract the Young’s modulus and assess the probability of pull-in instability. Moreover, the performance of structure is evaluated and optimized through Pareto analysis based on genetic algorithm. It is found that the mapping relationship between systematic parameters, excitation, and response of the structure can be modeled by physics-guided neural network accurately, and the optimization of design facilities the convenience of measurement. Moreover, error of this method is within 5% under most circumstances, and the measured Young’s modulus through this method is close to that by nanoindentation test. This work explores potential applications of machine learning in MEMS design, testing, and optimization.
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