MoO<sub>3</sub> nanopowders having an average size of 150 nm as anode materials for lithium ion batteries were synthesized by one-pot spray pyrolysis process. During the spray pyrolysis process, concentration difference in a droplet occurred due to the high flow rate of the carrier gas, which induced hollow intermediate powders. The intermediate hollow powders are composed of MoO<sub>x</sub> and C, and subsequently they are decomposed into MoO<sub>3</sub> nanopowders without C under oxidation atmosphere. When MoO<sub>3</sub> nanopowders were used as anode materials, the cell showed reversible discharge capacity of 390 mA h g-<sup>1</sup> at a current density of 1.0 A g<sup>-1</sup> even after 1,000 cycles. The overwhelming cycle stability of the cell is attributed to the MoO<sub>3</sub> nanopowders with 150 nm that act as an effective anode material by shortening the diffusion length of Li ions to the electrode and increasing the contact surface with the electrolyte during cycles.