This study explores the impact of 60 MeV N5+ ion irradiation on few layer WSe2 systems. The structural analysis exhibit an anomalous variation in crystallite size with increasing grain growth after irradiation. Raman spectroscopy study reveals increased disorder, enhanced intensities of prominent modes, and an eight-fold rise in AFM-measured roughness from 27.2 nm to 212.6 nm. HR-TEM shows voids in nanosheets post-irradiation. In addition, DFT calculations on monolayer with vacancy clusters shows modification of WSe2 bandgap from 1.48 eV to 0.37 eV. Interrelated structural, morphological and electronic structure calculations would provide useful insights upon controlled radiation exposure.
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