Abstract Diffraction of high-monochromaticity (δλ/λ⩽10 −6 ) , short-wavelength (λ=0.003 nm ) gamma radiations was used to study the defect structure changes arising during different treatments of silicon single crystals and p−n structures. Absolute values of the integrated reflectivity for a few orders of reflection as well as rocking curves were derived by ω-step scanning in transmission geometry. The theoretical foundations relevant to the interpretation of the experimental data and characterization of the samples are given. The main advantages of γ-ray diffraction, in particular high sensitivity to lattice distortions, have been demonstrated in a study of the defect structure changes taking place during crystal growth, neutron transmutation doping and device structure formation. The investigations showed high efficiency of the heat treatment in chlorine-containing atmosphere as a means of decreasing the structural defect concentration in single crystals and p−n structures. The role of non-equilibrium intrinsic point defects in defect formation during thermochemical treatments is discussed.