The characteristic wavelength of silicon in neutron-irradiated and non-irradiated ceramics was precisely measured to detect any change in materials induced by neutron irradiation. The wavelength of characteristic silicon Kβ X-rays emitted from materials was measured by electron probe microanalysis, using a WDX-equipped scanning electron microscope. The crystal used to disperse silicon X-rays was PET (pentaerythritol). Specimens were non-irradiated metallic silicon, vitreous silica, quartz, β-silicon carbide and β-silicon nitride. Neutron-irradiated vitreous silica and quartz were also used. Measurements were conducted successively during while monitoring the temperature of PET. A chemical shift of peaks from that of metallic silicon was observed for unirradiated materials, for longer wavelength in case of β-silicon carbide, β-silicon nitride, quartz and vitreous silica in this order. The chemical shift of vitreous silica due to neutron irradiation was reduced but that of quartz increased to those of the unirradiated specimens.
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