Electrical characteristics of low-inductance capillary-type discharge have been determined by numerical model calculations, which ensure high efficiency of energy supply to a plasma column with an aspect ratio of 1: 100. The EUV argon laser based on this discharge provides a gain of g+ > 1 cm–1 on the operating transition and ensures single-pass spontaneous lasing with g+l > 25 (where l is the active medium length).
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