The present work provides an experimental investigation of a novel surface dielectric barrier discharge plasma actuator consisting of a 0.3 mm-thick alkali-free quartz substrate as dielectric barrier material and titanium-tungsten electrodes. The device is manufactured using ultraviolet lithography and CMOS processes, and experiments are conducted under sinusoidal plasma actuation in a vacuum chamber with pressure ranging from 20 kPa to 0.01 Pa. Intensified high-speed visualizations of the plasma discharge and electrical signals (current/voltage/power) define the diagnostic toolbox. Results highlight that at 20 kPa the plasma discharge is driven by the formation of micro sparks on the inner edge of the exposed electrode, propagating downstream in larger current structures. At 1 kPa, the plasma discharge becomes more glow-type with negative current regimes longer than the positive ones, while the voltage signals preserve their sinusoidal shape. In such a plasma regime, the discharge extends over the entire region covered by the electrodes, suggesting the use of larger grounded electrodes to further enlarge the actuation region. Furthermore, the momentum action of the plasma discharge is not anymore unidirectional as it acts on the whole device plane. At pressure between 50 Pa and 2.5 Pa, the plasma discharge is unstable exhibiting a fast modification of the plasma discharge. Below 2.5 Pa, it becomes a volumetric full glow-type, extending its action mainly upstream with a higher plasma density on the exposed electrode. The establishment of the new plasma regime at a pressure below 2.5 Pa affects the electrical dissipated power and asymmetry of voltage and current signals.
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