Nanoscale Multilayers Research Articles

Intellectual fitting of hard X-ray resonant reflectance maps obtained for low-contrast oxide multilayers across L absorption edges of Eu and Gd

The present work describes an intellectual computational approach to X-ray resonant reflectometry – a synchrotron-based method aimed at non-destructive characterization of epitaxial nanoscale multilayers with low optical contrast between the sublayer materials. Resonant reflectance from specially designed bilayer structures was measured as a function of grazing angle and photon energy across the L absorption edges of rare earth elements and then modeled with the aid of a specially developed software utilizing OpenCL high speed computations performed on a graphical processing unit. The map fitting was carried out in the blind mode in which the spectral shapes of the optical constants of the sublayers were reconstructed by the fitting routine without initial knowledge of the chemical composition and without using any reference spectra. The model uses stepped Lorentzian line shape for the imaginary part of the scattering length density and the Kramers-Kronig consistent line shape for the corresponding real part. Epitaxially grown Eu2O3 / Gd3Ga5O12 bilayers were used as a test bench system to demonstrate the benefits of the proposed 2D mapping technique over conventional X-ray reflectometry. To increase reliability, the map fitting was carried out simultaneously at the absorption edges of two different chemical elements. The derived shapes and positions of the absorption peaks were used to uniquely identify rare earth elements within the corresponding sublayers and provide information on their oxidation states. The method was experimentally tested on the bilayers having different material order to show that not only the chemical composition but also the layer sequence can be effectively reconstructed in the automatic way from the 2D resonant reflectance maps.

Investigation of the Strain–Stress Field in Nanoscale Multilayer Systems by the Phase Plane Method

This paper presents the results of the study of stress relaxation fields, deformation, and temperature of the system of nanostructured multilayer coatings. In the work, a nonlinear relationship between strain and stress was used to take into account nonlinear effects in the mechanism of nanostructure formation. The paper assumes that a friction surface is provided by the self-organization of shear components: both stress and strain on the one hand, and temperature on the other. The studied objects are described in the adiabatic approximation, taking into account the fact of the evolution of stresses and strains. With the help of phase portraits of the system, the dependence of the deformation processes on the stresses arising in the system without coating and with coating is shown. It is shown that the rate of change of deformation depends on the characteristics of the mechanical impact on the coating and on the amount of stress and deformation. A conclusion is drawn regarding the transition process in the presence of two regions (Hooke and plastic deformation) in the corresponding phase portrait of the strain–stress field of the system. The results of the work can be used to determine the effective parameters of a coating in the analysis of experimental time dependences of stresses.

Influence of Increasing Density of Microstructures on the Self‐Propagating Reaction of Al/Ni Reactive Nanoscale Multilayers

Surface structuring methods are crucial in semiconductor manufacturing, as they enable the creation of intricate structures on the semiconductor surface, influencing the material's electrical, mechanical, and chemical properties. Herein, one such structuring method known as reactive ion etching to create black Si structures on silicon substrates is employed. After thermal oxidation, their influence on the reaction of Al/Ni nanoscale multilayers is studied. It reveals distinct reactive behaviors without corresponding differences in energy release during differential scanning calorimetry measurements. Higher oxidized black Si structure densities result in elevated temperatures and faster reaction propagation, showing fewer defects and reduced layer connections in cross‐sectional analyses. The properties of the reactive multilayers (RML) on high structure density show the same performance as a reaction on flat thermal SiO2, causing delamination when exceeding 23 structures per μm2. Conversely, lower structure density ensures attachment of RML to the substrate due to an increased number of defects, acting as predetermined breaking points for the AlNi alloy. By establishing the adhesion between the reacted multilayer and the substrate, surface structuring could lead to a potential increase in bond strength when using RML for bonding.

Hydrogen-Induced Microstructure Changes in Zr/Nb Nanoscale Multilayer Structures

Zr/Nb nanoscale multilayer coatings (NMCs) were studied after hydrogenation in a gaseous environment at 400 °C. The hydrogen distribution and content were determined by pressure and hydrogenation time. Increasing the pressure from 0.2 to 2 MPa resulted in different hydrogen distribution within the Zr/Nb NMCs, while the concentration remained constant at 0.0150 ± 0.0015 wt. %. The hydrogen concentration increased from 0.0165 ± 0.001 to 0.0370 ± 0.0015 wt. % when the hydrogenation time was extended from 1 to 7 h. The δ-ZrH hydride phase was formed in the Zr layers with Zr crystals reorienting towards the [100] direction. The Nb(110) diffraction reflex shifted towards smaller angles and the interplanar distance in the niobium layers increased, indicating significant lateral compressive stresses. Despite an increase in pressure, the nanohardness and Young’s modulus of the Zr/Nb NMCs remained stable. Increasing the hydrogen concentration to 0.0370 ± 0.0015 wt. % resulted in a 40% increase in nanohardness. At this concentration, the relative values of the Doppler broadening variable energy positron annihilation spectroscopy (S/S0) increased above the initial level, indicating an increase in excess free volume due to hydrogen-induced defects and changes. However, the predominant positron capture center remained intact. The Zr/Nb NMCs with hydrogen content ranging from 0.0150 ± 0.0015 to 0.0180 ± 0.001 wt. % exhibited a decrease in the free volume probed by positrons, as demonstrated by the Doppler broadening variable energy positron annihilation spectroscopy. This was evidenced by opposite changes in S and W (S↓W↑). The microstructural changes are attributed to defect annihilation during hydrogen accumulation near interfaces with the formation of hydrogen–vacancy clusters and hydrides.

Composite Materials with Nanoscale Multilayer Architecture Based on Cathodic-Arc Evaporated WN/NbN Coatings.

Hard nitride coatings are commonly employed to protect components subjected to friction, whereby such coatings should possess excellent tribomechanical properties in order to endure high stresses and temperatures. In this study, WN/NbN coatings are synthesized by using the cathodic-arc evaporation (CA-PVD) technique at various negative bias voltages in the 50-200 V range. The phase composition, microstructural features, and tribomechanical properties of the multilayers are comprehensively studied. Fabricated coatings have a complex structure of three nanocrystalline phases: β-W2N, δ-NbN, and ε-NbN. They demonstrate a tendency for (111)-oriented grains to overgrow (200)-oriented grains with increasing coating thickness. All of the data show that a decrease in the fraction of ε-NbN phase and formation of the (111)-textured grains positively impact mechanical properties and wear behavior. Investigation of the room-temperature tribological properties reveals that with an increase in bias voltage from -50 to -200 V, the wear mechanisms change as follows: oxidative → fatigue and oxidative → adhesive and oxidative. Furthermore, WN/NbN coatings demonstrate a high hardness of 33.6-36.6 GPa and a low specific wear rate of (1.9-4.1) × 10-6 mm3/Nm. These results indicate that synthesized multilayers hold promise for tribological applications as wear-resistant coatings.

Influence of multilayer nanoarchitecture on phase transformations in the Ti-Cr-Zr system

Nanocrystalline thin films find extensive applications due to their high mechanical strength and wear resistance. However, the challenge is to prevent unwanted grain growth during operation, especially at high temperatures, due to the increased grain boundary volume, which elevates the system's overall energy. Addressing this issue necessitates identifying optimal heat treatment conditions and selecting appropriate chemistry to stabilize grain boundaries. This study investigates the grain growth and phase evolution within Ti-Cr-Zr magnetron sputtered nano multilayers with 5 and 10 nm individual layer thickness, subjected to vacuum heat treatment at 1100 °C for 5 and 10 min. Characterization involved X-ray Photoelectron Spectroscopy (XPS), X-Ray Diffraction (XRD), and Transmission Electron Microscopy (TEM). During deposition, evidence of diffusion was observed as the multilayers formed Cr4TiZr, TiCr2, and Cr2Zr, phases. The Ti-Cr-Zr nanoscale system multilayers with 10 nm individual layer thickness also exhibited the emergence of Ti0.3Zr0.7 phase. During heat treatment grain growth occurred, after 10 min an average grain size of 173.7 nm and 119.1 nm was noted for the Ti-Cr-Zr nanoscale system multilayer with 5 nm and 10 nm individual layer thickness, respectively. The different growth rates are attributed to their distinct interfacial volumes, influencing the reaction velocity due to the variations in nano-layer thickness. No new phases were formed after heat treatment for the case of 10 nm individual layer thickness coating. However, 5 nm individual layer coatings showed the emergence of Ti0.3Zr0.7 phase, not present after deposition. In conclusion, this research achieved the desired nano grain stabilization of the Ti-Cr-Zr system nanoscale multilayers after heat treatment at 1100 °C for 10 min. This process led to the complete decomposition of the multilayer structure, resulting in the formation of grains smaller than 200 nm, marking a significant step toward the effective control of grain growth in nanocrystalline materials.

Synthesis of high-quality nano-H-ZSM-5 single crystals zeolite from montmorillonite and MTO catalytic studies

Clay is a rich aluminosilicate resource with unique advantages as a raw material for zeolites production. However, synthesizing nanosized single-crystalline zeolites through a simple approach using clay remains a significant challenge. In this paper, acid-washed montmorillonite (MSR) was used to prepare nano-H-ZSM-5 single crystals with high crystallinity, uniform grain size and permeable straight pores under the induction of a small amount of organic template tetrapropylammonium hydroxide (TPAOH). Through temperature-staged treatment, the nucleation and growth process of zeolite were decoupled, ultimately achieving precise control over the size of the nano-single crystals. Mechanistic study showed that the low-temperature aging process produces smaller structural units which probably derived from the geopolymer topology of the clay, providing more active sites for zeolite nucleation, leading to the rapid crystallization during the high-temperature process. The porous structure promotes material diffusion, inhibits aromatic cycling and reduces carbon formation in the pores. The large specific surface area and nanoscale multilayer pore structure delay carbon accumulation and increase carbon holding capacity. These properties make nano-ZSM-5 single crystals an excellent choice for high olefin selectivity and long catalytic life in the methanol-to-olefin reaction. This synthetic route provides a general strategy for preparing nanosized zeolite single crystals from clay.

On the use of nanometer-scale multilayers to determine interdiffusion coefficients: Comprehensive characterization of interdiffusion at low temperature in the Ni–Cr system

Nanoscale multilayers offer a convenient way to determine interdiffusion coefficients at low temperatures. However, knowledge regarding the impact of the microstructure on measurements is limited. In the present study, we measure the interdiffusion coefficient in the face-centered cubic (fcc) solid solution of the Ni–Cr system at 440 °C using multilayers composed of alternating layers of pure Ni and Ni78Cr22 (at.%), with a nominal wavelength of 4.5 nm. Three techniques were used to characterize the evolution of the multilayers with annealing time: atom probe tomography (APT), energy-dispersive X-ray spectroscopy (STEM-EDX) and X-ray reflectivity (XRR). Each technique allowed to determine an interdiffusion coefficient. The results evidence that the interdiffusion coefficient is dependent from the technique used to measure it. The primary cause is a very complex microstructure resulting from the elaboration method used to obtain the fine concentration modulation. The analysis of atom probe tomography volumes reveals a high density of columnar grain boundaries (GB) with extended chemical widths. The segregation at GB was measured and a model was derived, allowing to dissociate the contribution of lattice interdiffusion between layers from that of diffusion along and perpendicularly to GBs. The present results could serve as guides for future diffusion investigations involving multilayers.

Nano-notch modulated fracture behaviors in nanoscale thin films

This study presents an efficient methodology to assess fracture behavior in nanoscale multilayers. After fabricating a nano-cantilever specimen of Cu/Si/SiN, a notch with the tip radius of 3 ∼ 15 nm was introduced into the SiN layer. By changing the position of notch tip, the delamination of Cu/SiN or Cu/Si interfaces, and the fracture of SiN layer were obtained by in situ TEM bending experiments, respectively. The fracture strength of interfaces and SiN layer was determined using an exponential cohesive zone model (CZM) and the crack propagation from the notch tip was analyzed by phase field simulation. Finally, a fracture phase diagram related to the typical position parameters of nano-notch is proposed to predicted the fracture behaviors including the delamination of different interfaces and the fracture of monolayer in nanoscale multilayers. This study provides significant insights into the fracture behavior occurred at nanoscale and a simple but efficient methodology to evaluate the fracture strength of any part in nanoscale multilayers.

Effect of Proton Irradiation on Zr/Nb Nanoscale Multilayer Structure and Properties

The effect of proton irradiation on the structure, phase composition, defect state and nanohardness of Zr/Nb nanoscale multilayer coatings was investigated. Preservation of the Zr/Nb layered structure with 50 and 100 nm thick layers, was observed after irradiation with protons at 1720 keV energy and 3.4 × 1015, 8.6 × 1015 and 3.4 × 1016 ions/cm2 fluences, and the interfaces remained incoherent. In the Zr/Nb nanoscale multilayer coatings with individual layer thicknesses of 10 and 25 nm, there were insignificant fluctuations in interplanar distance, which were influenced by changes in irradiation fluence, and the interfaces were partially destroyed and became semicoherent. Changing irradiation fluence in the investigated ranges led to a decrease in the nanohardness of the Zr/Nb nanoscale multilayer coatings with individual layer thicknesses of 10–50 nm. Variable-energy positron Doppler broadening analysis revealed that these changes are primarily caused by peculiarities of the localization and accumulation of the embedded ions and do not cause a significant increase in the S-parameters of Zr/Nb nanoscale multilayer coatings with a layer thickness less than 100 nm.

Structural Properties of He-Irradiated Zr/Nb Multilayer Investigated by Grazing Incidence X-ray Diffraction

Zr/Nb nanoscale multilayers are regarded as one of the important candidate materials used in next-generation reactors. Understanding structural evolution induced by ion bombardment is crucial for the evaluation of lifetime performance. Magnetron sputter-deposited Zr/Nb multilayers with a periodicity of 7 nm were subjected to 300 keV He ion irradiation with three different fluences at room temperature. The depth-resolved strain and damage profiles in the Zr/Nb multilayers were investigated by grazing incidence X-ray diffraction. The tensile strain was found in the deposited Zr/Nb films. After He ion irradiation, the intensity of diffraction peaks increased. The change in diffraction peaks depends on He fluence and incident angle. Irradiation-induced pre-existing defect annealing was observed and the ability to recover the microstructure was more significant in the Zr films compared to the Nb films. Furthermore, the efficiency of defect annealing depends on the concentration of pre-existing defects and He fluence. When the He fluence exceeds the one for pre-existing defect annealing, residual defects will be formed, such as 1/3<12¯10> and 1/3<11¯00> dislocation loops in the Zr films and 1/2<111> dislocation loops in the Nb films. Finally, introducing deposited defects and interfaces can improve the radiation resistance of Zr/Nb nanoscale multilayers. These findings can be extended to other multilayers in order to develop candidate materials for fusion and fission systems with high radiation resistance.

The Microstructure of Zr/Nb Nanoscale Multilayer Coatings Irradiated with Helium Ions

The effect of helium ion irradiation on the microstructure and properties of composites based on Zr/Nb nanoscale multilayer coatings (NMCs) was studied. X-ray diffraction (XRD), transmission electron microscopy (TEM), and variable-energy Doppler broadening spectroscopy (DBS) were used for the in-depth analysis of defects in the irradiated NMCs. After irradiation of the Zr/Nb NMCs with helium ions at a 1017 ion/cm2 dose, the layered structure was generally retained, but the internal stresses in the layers were increased, which caused wave-like distortion in the ion deposition zone. The Zr/Nb NMCs with an individual layer thickness of 25 nm were characterized by the smallest microstress changes, but single blisters were formed in the near-surface region. The microstructure of the Zr/Nb NMCs with a layer thickness of 100 nm exhibited relatively smaller changes upon helium ion irradiation. The prevailing positron-trapping center was the reduced-electron-density area at the interfaces before and after irradiation of the Zr/Nb NMCs regardless of the layer thickness. However, the layer thickness affected the DBS parameter profiles depending on the positron energy, which was probably due to the different localization of implanted ions within the layers or at the interfaces.

Real-time monitoring of plasma synthesis of functional materials by high power impulse magnetron sputtering and other PVD processes: towards a physics-constrained digital twin

Plasma synthesis of thin films by physical vapour deposition (PVD) enables the creation of materials that drive significant innovations in modern life. High value manufacturing demand for tighter quality control and better resource utilisation can be met by a digital twin capable of modelling the deposition process in real time. Optical emission spectroscopy (OES) was combined with process parameters to monitor all stages of both high power impulse magnetron sputtering and conventional magnetron sputtering processes to provide a robust method of determining process repeatability and a reliable means of process control for quality assurance purposes. Strategies and physics-based models for the in-situ real-time monitoring of coating thickness, composition, crystallographic and morphological development for a CrAlYN/CrN nanoscale multilayer film were developed. Equivalents to the ion-to-neutral ratio and metal-to-nitrogen ratios at the substrates were derived from readily available parameters including the optical emission intensities of Cr I, N2 (C–B) and Ar I lines in combination with the plasma diffusivity coefficient obtained from the ratio of substrate and cathode current densities. These optically-derived equivalent parameters identified the deposition flux conditions which trigger the switch of dominant crystallographic texture from (111) to (220) observed in XRD pole figures and the development of coating morphology from faceted to dense for a range of magnetron magnetic field configurations. OES-based strategies were developed to monitor the progress of chamber evacuation, substrate cleaning and preventative chamber wall cleaning to support process optimisation and equipment utilisation. The work paves the way to implementation of machine learning protocols for monitoring and control of these and other processing activities, including coatings development and the use of alternative deposition techniques. The work provides essential elements for the creation of a digital twin of the PVD process to both monitor and predict process outcomes such as film thickness, texture and morphology in real time.

Correlating Deposition Parameters with Structure and Properties of Nanoscale Multilayer (TiSi)N/CrN Coatings

Multilayer (TiSi)N/CrN coatings were fabricated through vacuum-arc deposition by applying the arc currents of (100 ÷ 110) A on TiSi cathode and (80 ÷ 90) A on Cr cathode, negative bias potential connected to the substrate holder of –(100 ÷ 200) V and reactive gas pressure of (0.03 ÷ 0.6) Pa. Applying a negative bias voltage on substrates enhanced the ion bombardment effect, which affected the chemical compositions, phase state, mechanical and tribological properties of (TiSi)N/CrN coatings. Obtained results indicated that (TiSi)N/CrN coatings with Si content ranging from 0.53 to 1.02 at. % exhibited a high hardness level of (22.1 ÷ 31.1) GPa accompanied with a high Young’s modulus of (209 ÷ 305) GPa, H/E* level of (0.080 ÷ 0.100), H3/E*2 level of (0.15 ÷ 0.33) GPa, and the friction coefficient of 0.35. Values of critical loads at dynamic indentation, changes in friction coefficient and level of acoustic emission signal evidence the high adhesive strength of (TiSi)N/CrN coatings, which allows recommending them to increase cutting tool performance.

Deformation evolution of Cu/Ta nanoscale multilayer during nanoindentation by a molecular dynamics study

Molecular dynamics simulation of nanoindentation is performed to study the plastic deformation evolution of Cu/Ta and Ta/Cu nanoscale multilayers with effects of layer thickness and interface orientation relationship. The results reveal that the plastic deformation mechanism is determined by both the intrinsic property of monolayer and the interface characteristic, and the mechanical property has an important dependence on Ta deformation. The interface could strongly interact with and adsorb lattice dislocations, acting as the primary emission source of dislocations due to high stress concentration. The Cu/Ta interface exhibits a strong blocking effect obstructing dislocation traversing interface, while the Ta/Cu interface could transmit deformation stress to activate Cu layer deformation. The effect of interface orientation indicates that the propagation of crystal defects depends on slip system of monolayer, and the dislocation evolution in Ta layer shows a two-step mechanism: the V-shaped structure formation, and its cusp and root segments triggering the subsequently extended dislocations. Contrarily, the high-energy OT orientation interface causes random defect structures. The indentation hardness reveals two critical thicknesses (70 and 160 Å for Ta/Cu multilayer, 40 and 160 Å for Cu/Ta multilayer), which strongly depend on the size of indenter and indentation depth at nanoscale. This work provides an important understanding of the resistance of nanostructured materials to mechanical deformation for designing wear-resistant coatings and structural nanocomposites.

Unraveling Thermodynamic and Kinetic Contributions to the Stability of Doped Nanocrystalline Alloys using Nanometallic Multilayers.

Targeted doping of grain boundaries is widely pursued as a pathway for combating thermal instabilities in nanocrystalline metals. However, certain dopants predicted to produce grain-boundary-segregated nanocrystalline configurations instead form small nanoprecipitates at elevated temperatures that act to kinetically inhibit grain growth. Here, thermodynamic modeling is implemented to select the Mo-Au system for exploring the interplay between thermodynamic and kinetic contributions to nanostructure stability. Using nanoscale multilayers and in situ transmission electron microscopy thermal aging, evolving segregation states and the corresponding phase transitions are mapped with temperature. The microstructure is shown to evolve through a transformation at lower homologous temperatures (<600°C) where solute atoms cluster and segregate to the grain boundaries, consistent with predictions from thermodynamic models. An increase in temperature to 800°C is accompanied by coarsening of the grain structure via grain boundary migration but with multiple pinning events uncovered between migrating segments of the grain boundary and local solute clustering. Direct comparison between the thermodynamic predictions and experimental observations of microstructure evolution thus demonstrates a transition from thermodynamically preferred to kinetically inhibited nanocrystalline stability and provides a general framework for decoupling contributions to complex stability transitions while simultaneously targeting a dominant thermal stability regime.

Distribution of Hydrogen and Defects in the Zr/Nb Nanoscale Multilayer Coatings after Proton Irradiation.

Radiation damage is one of the significant factors limiting the operating time of many structural materials working under extreme conditions. One of the promising directions in the development of materials that are resistant to radiation damage and have improved physical and mechanical properties is the creation of nanoscale multilayer coatings (NMCs). The paper is devoted to the experimental comprehension of changes in the defect structure and mechanical properties of nanoscale multilayer coatings (NMCs) with alternating layers of Zr and Nb under irradiation. Series of Zr/Nb NMCs with different thicknesses of individual layers were fabricated by magnetron sputtering and subjected to H+ irradiation. The evolution of structure and phase states, as well as the defect state under proton irradiation, was studied using the methods of high-resolution transmission electron microscopy (HRTEM), X-ray diffraction analysis (XRD), glow discharge optical emission spectroscopy (GDOES), and positron annihilation spectroscopy (PAS). The layer-by-layer analysis of structural defects was carried out by Doppler broadening spectroscopy (DBS) using a variable-energy positron beam. To estimate the binding energy and the energy paths for the hydrogen diffusion in Zr/Nb NMCs, calculations from the first principles were used. When the thickness of individual layers is less than 25 nm, irradiation causes destruction of the interfaces, but there is no significant increase in the defect level, the S parameter (open volume defects amount) before and after irradiation is practically unchanged. After irradiation of NMC Zr/Nb with a thickness of layers 50 and 100 nm, the initial microstructure is retained, and the S parameter is significantly reduced. The GDOES data reveal the irregular H accumulation at the interface caused by significant differences in H diffusion barriers in the bulk of Zr and Nb multilayers as well as near the interface’s region.

Evaluation of Novel Combined Plasma Nitriding / Physical Vapor-Deposited Cr/Crn Nanoscale Multilayer Coatings for the Application of Bipolar Plates in Proton Exchange Membrane Fuel Cells

Evaluation of Novel Combined Plasma Nitriding / Physical Vapor-Deposited Cr/Crn Nanoscale Multilayer Coatings for the Application of Bipolar Plates in Proton Exchange Membrane Fuel Cells

Design of nano-scale multilayered nitride hard coatings deposited by arc ion plating process: Microstructural and mechanical characterization

The objective of the present study was to investigate some transition metal nitride to determine the relationship between microstructural evolution and mechanical properties such as hardness and adhesion strength of the hard coating. Results showed that it was possible to form nano-scale multilayers of Ti(CuNiZr)N/AlCr(SiW)N with chemical fluctuation of Ti-rich and Al-rich nitrides. It was believed that these nano-scale multilayers with chemical fluctuation could form during table rotation of the arc ion plating process, causing difference in mean free path of chemical elements from the target. Microstructural investigation confirmed that the multilayer consisted of three layers with nanostructured periodic stripe patterns on the multilayer coating based on detailed individual layers analysis. Furthermore, Ti(CuNiZr)N/AlCr(SiW)N multilayer showed mechanical properties, including hardness of 36.0 ± 3 GPa and adhesion strength represented by the critical load of 93 ± 5 N with the highest H/E and H3/E2 ratios.

TiN/NbN Nanoscale Multilayer Coatings Deposited by High Power Impulse Magnetron Sputtering to Protect Medical-Grade CoCrMo Alloys

This study describes the performance of nanoscale multilayer TiN/NbN coatings deposited on CoCrMo medical-grade alloys by utilising novel mixed high power impulse magnetron sputtering (HIPIMS) and direct current unbalanced magnetron sputtering (UBM) technique in an industrial size vacuum coater. Scanning electron microscopy analysis showed that these coatings were extremely dense without any intercolumnar voids. The coating exhibited high hardness of 28 GPa, as well as low friction and wear coefficient of 0.7 and 1.4 × 10−14 m3·N−1·m−1, respectively, as compared to the bare material. Scratch tests revealed superior coating to substrate adhesion due to the HIPIMS etching prior to coating deposition. Energy-dispersive X-ray analysis of the wear debris generated during the impact test together with focused ion beam cross-section analysis in different locations of the impact crater revealed the coating failure mechanism and further confirmed the excellent coating to substrate bonding strength. Potentiodynamic polarisation tests in NaCl and Hank’s solutions revealed the clear passivation behaviour, several orders of magnitude lower corrosion currents, and high pitting potentials of the coating, which guarantee excellent protection to the base alloy in such aggressive environments. Inductively coupled plasma mass spectrometry analysis of Hank’s solution containing corrosion debris of the coated sample revealed that the leaching of harmful metal ions from the base material was reduced to below the detection limit of the technique, thus demonstrating the high barrier properties of the coating.