The optical absorbance spectra of the intersubband transition in 3 MeV proton irradiated In0.3Ga0.7As∕GaAs multiple quantum dot samples, cut from the same wafer, were investigated as a function of irradiation dose. The intensity of the intersubband transition is observed to decrease as the irradiation dose is increased. The behavior of the intersubband transition in irradiated In0.3Ga0.7As∕GaAs multiple quantum dot samples is compared to those of intersubband transitions in irradiated GaAs∕AlGaAs and InGaAs∕InAlAs multiple quantum well samples. The intersubband transition absorbance spectrum was completely depleted in a multiple quantum dot sample irradiated with 5×1014cm−2. Post-irradiation thermal annealing was performed on the latter sample where thermal annealing recovery of the depleted intersubband transition was not observed. Instead, a broadband with a peak at 5μm is observed after annealing the sample at 500 °C for 15 min. The absence of the broadband in an unirradiated sample that was subject to the same annealing conditions suggests that this band may be related to irradiation-induced defects.
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