Multilayer-coated Blazed Gratings Research Articles

Theoretical analysis and optimization of highly efficient multilayer-coated blazed gratings with high fix-focus constant for the tender X-ray region.

The problem of X-ray diffraction from multilayer-coated blazed diffraction gratings is analyzed. Invalidity of the conventional condition of maximal diffraction efficiency observed in previous experiments is explained theoretically. This is attributed to two factors: contribution of anti-blaze facets to diffraction efficiency and effect of strongly asymmetric diffraction. We demonstrate that a proper choice of the multilayer d-spacing allows to design grating with the diffraction efficiency close to the maximal possible one throughout the tender X-ray range (E∼1-5 keV). An optimization procedure is suggested for the first time to choose the optimal grating parameters and the operation diffraction order to obtain a high fix-focus constant and high diffraction efficiency simultaneously in a wide spectral range.

High-efficiency X-ray multilayer-coated blazed gratings with shifted boundaries.

A new design for a high-efficiency multilayer-coated blazed X-ray grating with horizontal-shifted (non-conformal) boundary profiles is proposed. The investigation of the grating design is carried out using an integrated approach based on rigorous numerical calculations of light diffraction by gratings with realistic boundary profiles obtained from simulations of multilayer grating growth. By varying the incidence angle of the deposition flux, one can set the direction and magnitude of the boundary profile shifts over a wide range of values. It is shown that the diffraction efficiency of the blazed gratings with shifted boundary profiles may be substantially higher than the efficiency of gratings with conformal boundaries, which are, moreover, much more difficult to produce. High-efficiency gratings with shifted boundaries can be obtained when the deposition is mainly on the blaze facet with a high inclination of the deposition flux, as opposed to widely used near-normal deposition methods. The maximum absolute efficiency of a W/B4C 2500 mm-1 grating with a blaze angle of 1.76° and an anti-blaze angle of 20°, working at a blaze wavelength of 1.3 nm and having shifted realistic boundary profiles, obtained using our integrated approach is 23.3%, while that of a grating with the ideal (triangular) boundary profile and the same shifts is 25.3%, and that of an ideal conformal profile is only 22.2%. The maximum absolute efficiency of 40.2% of a 2500 mm Cr/C grating with a blaze angle of 1.05° and a realistic anti-blaze angle of 10°, working at a blaze wavelength of 0.83 nm and having ideal shifted boundaries, is higher than the maximum efficiency of the similar grating having ideal conformal boundaries with a non-realistic anti-blaze angle of 80°.

Optimized highly efficient multilayer-coated blazed gratings for the tender X-ray region.

The optimized design of multilayer-coated blazed gratings (MLBG) for high-flux tender X-ray monochromators was systematically studied by numerical simulations. The resulting correlation between the multilayer d-spacing and grating blaze angle significantly deviated from the one predicted by conventional equations. Three high line density gratings with different blaze angles were fabricated and coated by the same Cr/C multilayer. The MLBG with an optimal blaze angle of 1.0° showed a record efficiency reaching 60% at 3.1 keV and 4.1 keV. The measured efficiencies of all three gratings were consistent with calculated results proving the validity of the numerical simulation and indicating a more rigorous way to design the optimal MLBG structure.

Blazed diffraction gratings produced by ion bombardment of pre-patterned solid surfaces

We propose a method of producing high quality blazed gratings and carry out simulations of it. By combining the near perfect periodicity produced by conventional lithographic methods with the tendency of ion sputtering to produce terraced topographies, this fabrication procedure could produce highly ordered, faceted surfaces on amorphous materials. Our approach differs from previous uses of ion bombardment to fabricate blazed gratings, and has the unique advantage that it could be used as the initial step in the fabrication of high efficiency multilayer-coated blazed gratings. Our numerical investigations of the relevant equations of motion demonstrate that our method produces efficient blazed gratings for a broad range of parameter values. We also develop concrete predictions regarding the optimal implementation of our proposed procedure, and show that high quality blazed gratings can emerge even if additional linear or nonlinear terms are present in the equation of motion.

Multilayer-coated blazed grating with variable line spacing and a variable blaze angle.

The blazing ability of multilayer-coated blazed gratings (MBGs) was systematically investigated via numerical calculation of the diffraction efficiency with a rigorous electromagnetic simulation code. It was found that the blazing condition is not exact and allows significant deviation from the ideal situation for ultra-dense MBGs. A mismatch of the interfaces of the multilayer (ML) stacks of adjacent grooves results in a modified effective blaze angle, which gives the opportunity to control and tune precisely the blaze angle via a proper choice of ML d-spacing. Also this allows a new kind of x-ray gratings that have a variable line spacing (VLS) as well as a variable blaze angle. Precise adjustment of a local blaze angle of a VLS MBG can be achieved with a laterally graded ML, providing very high diffraction efficiency for the whole area of the grating.

Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating.

Imperfections in the multilayer stack deposited on a saw-tooth substrate are the main factor limiting the diffraction efficiency of extreme ultraviolet and soft x-ray multilayer-coated blazed gratings (MBGs). Since the multilayer perturbations occur in the vicinity of antiblazed facets of the substrates, reduction of the groove density of MBGs is expected to enlarge the area of unperturbed multilayer and result in higher diffraction efficiency. At the same time the grating should be optimized for higher-order operation in order to keep high dispersion and spectral resolution. In this work we show the validity of this approach and demonstrate significant enhancement of diffraction efficiency of MBGs using higher-order diffraction. A new record for diffraction efficiency of 52% in the second diffraction order was achieved for an optimized MBG with groove density of 2525 lines/mm at the wavelength of 13.4nm.

Control of surface mobility for conformal deposition of Mo–Si multilayers on saw-tooth substrates

Multilayer-coated blazed gratings (MBG) are the most promising solution for ultra-high resolution soft X-ray spectroscopy, since they can have very high groove density and provide high-order operation and very high diffraction efficiency. The performance of MBGs however depends critically on the conformal deposition of the multilayer (ML) stack on a saw-tooth substrate and the minimization of roughness. We present an analysis of the roughening and smoothing processes during growth of Mo/Si multilayers deposited over a range of pressures of Ar sputtering gas on flat and saw-tooth substrates. A Linear Continuum Model (LCM) of the film growth was used to understand the interplay between smoothing and roughening of the ML films and to predict the optimum conditions for deposition. The MBG coated under the optimal deposition conditions demonstrated high diffraction efficiency in the EUV and soft X-ray wavelength ranges

Development of near atomically perfect diffraction gratings for EUV and soft x-rays with very high efficiency and resolving power

Multilayer-coated Blazed Gratings (MBG) can offer high diffraction efficiency in a very high diffraction order and are therefore of great interest for high-resolution EUV and soft x-ray spectroscopy techniques such as Resonance Inelastic X-ray Scattering. However, realization of the MBG concept requires nano-scale precision in fabrication of a saw-tooth substrate with atomically smooth facets, and reproduction of the blazed groove profile in the course of conformal growth of a multilayer coating. We report on recent progress achieved in the development, fabrication, and characterization of ultra-dense MBGs for EUV and soft x-rays. As a result of thorough optimization of all steps of the fabrication process, an absolute diffraction efficiency as high as 44% and 12.7% was achieved for a 5250 l/mm grating in the EUV and soft x-ray regions respectively. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range with revolutionary applications in synchrotron science.

Ultra-high efficiency multilayer blazed gratings through deposition kinetic control

Diffraction efficiency of multilayer-coated blazed gratings (MBG) strongly depends on the perfection of the sawtooth-shaped layers in the overall composite structure. Growth of multilayers on sawtooth substrates should be carefully optimized to reduce groove profile distortion and, at the same time, to avoid significant roughening of multilayer interfaces. In this work, we report on a way to optimize growth of sputter-deposited Mo/Si multilayers on sawtooth substrates through variation of the sputtering gas pressure. We believe a new record for diffraction efficiency of 44% was achieved for an optimized MBG with groove density of 5250 lines/mm at the wavelength of 13.1 nm.

Fabrication and characterization of ultra-high resolution multilayer-coated blazed gratings

Multilayer coated blazed gratings with high groove density are the most promising candidate for ultra-high resolution soft x-ray spectroscopy. They combine the ability of blazed gratings to concentrate almost all diffraction energy in a desired high diffraction order with high reflectance soft x-ray multilayers. However in order to realize this potential, the grating fabrication process should provide a near perfect groove profile with an extremely smooth surface of the blazed facets. Here we report on successful fabrication and testing of ultra-dense saw-tooth substrates with 5,000 and 10,000 lines/mm.

Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region

Two Mo/Si multilayer-coated blazed gratings have been fabricated for operation at soft-x-ray wavelengths above the Si L edge, λ ≥ 12.4 nm, at (near) normal incidence. The sawtooth profile of the grating structure was mechanically ruled into a 200-nm Au film that was deposited onto a plane glass substrate. To smooth the rough Au surface and to prevent interdiffusion of the Au film with the upper Mo/Si multilayer, a carbon film was evaporated onto the Au grating surface of one of the gratings before the deposition of the multilayer coating. We matched the multilayer grating, working on blaze in the third diffraction order, in which an absolute diffraction efficiency of 3.4% at a wavelength of 14 nm was measured, whereas only 1.1% was achieved for a similar grating (without a carbon interlayer). These efficiencies are higher than those obtained for other ruled blazed gratings reported in the literature. As a result of the multilayer and grating periodicity, the wavelength of diffraction can be tuned bya rotation of the grating, which is important for application in a soft-x-ray monochromator.