In a regular FAIMS system, a carrier gas is used to drive samples through the drift tube. Thus, high consumption of sample and carrier gas can be expected, especially when multi-cycle detection is needed for high precision detection. In this study, a novel re-circulation mode FAIMS was developed. Ion separation capacity and limit of detection (LOD) of this FAIMS system were investigated. The stability of this FAIMS system was also studied by changing the flow rate of the carrier gas. Using this newly designed re-circulation mode FAIMS system, the detection results of o-, p- m- xylenes in pure nitrogen and helium/nitrogen mixtures were compared. The sample and the carrier gas reserve time which ensure the success of multi-cycle detection was examined. The characteristic parameters (α2,α4) and their deviation were also precisely calculated through 18 CV − DV spectra. Results show that 0.6ng o-xylene can be detected in a 25ml closed loop re-circulation arrangement. The effective detection time is 6.2min in this detection process. In fact, the sample and the carrier gas used in this experiment are 70 and 826 times less than a regular open loop FAIMS system respectively. The peak position and the full width at half-maximum (FWHM) of the obtained CV-DV spectra stay almost unchanged during th.entire experiment process. The ion signal peaks can be fitted with a Gauss curve, which means that the stability of the carrier gas flow rate fully meet the requirement for on-site detection. Furthermore, the use of a helium modifier is studied and proved to be an effective method to improve the detection capacity of the FAIMS for VOCs. In conclusion, the gas-saving re-circulation design along with the gas modifiers provide new opportunities for FAIMS systems to be applied on-site high precision chemical detection.