Combining materials with a self-lubricating character is a promising approach for an environmentally friendly lubrication. Therefore, Cu was incorporated in HiPIMS synthesized non-stoichiometric MoSx thin films. By increasing the Cu concentration up from 3.09 ± 0.09at.-% to 31.93 ± 0.12at.-% by an increased target power, the structure and the tribological properties were evaluated depending on the chemical composition. The results show, that an increased Cu content in the films in combination with the target setup during the deposition process leads to a preferred (002) basal-plane crystallite orientation and a densification of the microstructure in comparison to MoSx. Due to these structural properties, the dry friction behavior is improved under humid conditions. In combination with the transferfilm formed on the surface of the 100Cr6 counterpart, the lowest coefficient of friction of μ=0.092 ± 0.003 is seen at a target power of 1.5kW. Additionally, Cu tends to agglomerate the generated wear particles, which contributes to a high amount of tribomaterial with a MoSx character in the tribo track and thus a low wear. At a target power of 2.5kW the lowest wear coefficients with k=(0.64 ± 0.22) x 10−5mm2/Nm for the coated sample and k=(0.17 ± 0.02) x10 −5 mm2/Nm for the 100Cr6 counterpart were achieved. Therefore, the modification of MoSx films with Cu is promising to reduce the sensitivity of the friction on the environment and improve the tribological properties.