The impact of humidity on the efficiency of gas sensors has become highlighted in the realm of gas detection. Due to the complex relationship between humidity and gas sensor performance, the development of gas sensors has recently focused on minimizing humidity-related interference. This research aims to address humidity-related challenges in zinc oxide (ZnO) gas sensors designed to detect triethylamine. The ZnO nanostructures (NSs) were synthesized using thermal decomposition methods at varying temperatures (380 °C, 480 °C, and 580 °C) and annealing times (3 h, 7 h, 12 h, and 21 h). X-ray diffraction (XRD) confirmed the formation of a wurtzite hexagonal close-packed structure in ZnO NSs. Scanning electron microscopy (SEM) images provided insights into the morphologies of ZnO NSs at different annealing temperatures, while energy dispersive spectroscopy (EDS) demonstrated the elemental distribution. Subsequently, gold (Au) nanoparticles were uniformly sputtered onto ZnO sensors with thickness variations (0.1 nm, 0.6 nm, 1 nm, 5 nm, and 10 nm). XPS was employed to analyse the elemental composition and oxygen vacancies of the synthesized sensing materials. The effectiveness of 0.6 nm-thick Au nanoparticles in mitigating humidity effects was observed in ZnO sensors synthesized at 380 °C. The results indicated that ZnO sensors coated with 0.6 nm-thick Au nanoparticles exhibited highly stable responses to ethanol and triethylamine at different humidity levels from 50 % to 90 %. Notably, these sensors demonstrated promising selectivity towards triethylamine (with a response of 17.57) compared to various gas targets at room temperature. The sensor exhibited rapid response and recovery times of 9.8 s and 4.4 s, respectively, toward triethylamine with excellent stability in variable humid environments. The sensor maintained a consistent response over 24 days, demonstrating good stability at high humidity.
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