To address the challenges related to significant pressure loss and weakened combustion performance of energetic materials when ignited on Micro-Electro-Mechanical Systems (MEMS), periodate-based MICs (Metastable Intermolecular Composites) have emerged as promising candidates due to their high energy density and combustion pressure. However, the integration of periodate-based MICs onto MEMS has not been effectively achieved thus far. Herein, we propose a simple, environmentally friendly, and cost-effective approach to fabricate a MEMS-compatible Al/Cu2HIO6/PVDF (polyvinylidene difluoride) energetic composite film. Our method involves utilizing a Cu(OH)2 array as a template and employing an in-situ and spin-coating process. The resulting Al/Cu2HIO6/PVDF film was characterized using various techniques including SEM, TEM, XRD, and XPS. These analyses reveal a tightly packed nano array morphology with a porous structure. DSC-TG analysis was conducted to investigate the thermal reaction of the Al/Cu2HIO6/PVDF composite film. The results demonstrate that the thermal reaction involved a complex multi-step process, with higher heat release (1121 J g-1), a faster reaction rate, and a lower initial reaction temperature (294.5 °C) compared to the Al/CuO/PVDF composite film. the reaction process of Al/Cu2HIO6/PVDF film was also been proposed by analyzing the products at different temperatures. combustion diagnostic tests were carried out to evaluate the combustion performance of the Al/Cu2HIO6/PVDF composite film. The results indicate that as CuO transformed into Cu2HIO6, the film exhibits a reduced ignition delay (8 ms) and combustion duration (50 ms), higher combustion temperature (3710 K), and stronger flame intensity (8630 a.u.).