An effort has been made to comprehensively study the structural modification of the molybdenum trioxide (MoO3) thin film with 100 MeV, Ni7+. The MoO3 nanoparticles were synthesized by hydrothermal method and thin film of MoO3 was fabricated by spin coating technique. MoO3 thin film was subjected to irradiation with 100 MeV, Ni7+ beam with various fluences of 5 × 1012, 1 × 1013, and 3 × 1013 ions cm−2. The structural changes induced by ion beam irradiation were characterized using XRD diffraction, Raman, Fourier Transforms Infrared Spectroscopy (FTIR) UV–visible spectroscopy, and Atomic Force Microscopy (AFM). The synthesized thin film showed an orthorhombic phase and the average crystallite size was 63.8 nm of the pristine sample. it is observed that the crystallinity decreases after irradiation. The Raman study confirmed the XRD findings and also showed that after exposure, intensity of the Raman peaks decreased and the width of the spectra expanded due to a decrement in the crystallinity. The bandgap of the thin films decreased after irradiation as the ion fluence increased up to 3 × 1013 ions cm−2. The findings showed that the ion beam irradiation was directly accountable for the amorphization and lattice defect development in the MoO3 thin films.
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