Modelocked Integrated External-cavity Surface Emitting Laser Research Articles

Gigahertz semiconductor laser at a center wavelength of 2 µm in single and dual-comb operation.

Dual-comb lasers are a new class of ultrafast lasers that enable fast, accurate and sensitive measurements without any mechanical delay lines. Here, we demonstrate a 2-µm laser called MIXSEL (Modelocked Integrated eXternal-cavity Surface Emitting Laser), based on an optically pumped passively modelocked semiconductor thin disk laser. Using III-V semiconductor molecular beam epitaxy, we achieve a center wavelength in the shortwave infrared (SWIR) range by integrating InGaSb quantum well gain and saturable absorber layers onto a highly reflective mirror. The cavity setup consists of a linear straight configuration with the semiconductor MIXSEL chip at one end and an output coupler a few centimeters away, resulting in an optical comb spacing between 1 and 10 GHz. This gigahertz pulse repetition rate is ideal for ambient pressure gas spectroscopy and dual-comb measurements without requiring additional stabilization. In single-comb operation, we generate 1.5-ps pulses with an average output power of 28 mW, a pulse repetition rate of 4 GHz at a center wavelength of 2.035 µm. For dual-comb operation, we spatially multiplex the cavity using an inverted bisprism operated in transmission, achieving an adjustable pulse repetition rate difference estimated up to 4.4 MHz. The resulting heterodyne beat reveals a low-noise down-converted microwave frequency comb, facilitating coherent averaging.

Dual-comb ranging with frequency combs from single cavity free-running laser oscillators.

Laser ranging (LIDAR) with dual optical frequency combs enables high-resolution distance measurements over long ranges with fast update rates. However, the high complexity of stabilized dual optical frequency comb systems makes it challenging to use this technique in industrial applications. To address this issue, here we demonstrate laser ranging directly from the output of both a free-running dual-comb diode-pumped semiconductor and solid-state laser oscillator. Dual-comb operation from a single cavity is achieved via polarization duplexing with intracavity birefringent crystals. We perform ranging experiments with two implementations of this scheme: a modelocked integrated external cavity surface-emitting laser (MIXSEL) and a Yb:CaF2 solid-state laser. For these proof of principle demonstrations, we measure the distance to a moving mirror mounted on a home-made shaker. The MIXSEL laser has a repetition rate of 2.736 GHz and a repetition rate difference of 52 kHz, and yields a measurement resolution of 1.36 µm. The Yb:CaF2 laser has a repetition rate of 137 MHz and a repetition rate difference of 952 Hz, and yields a measurement resolution of 0.55 µm. In both cases the resolution is inferred by a parallel measurement with a HeNe interferometer. These results represent the first laser ranging with free-running dual-comb solid-state oscillators. With further optimization, resolution well below 1 µm and range well above 1 km are expected with this technique.

Temperature resistant fast InxGa1-xAs / GaAs quantum dot saturable absorber for the epitaxial integration into semiconductor surface emitting lasers.

Quantum-dot-based semiconductor saturable absorber mirrors (SESAMs) with fast response times were developed by molecular beam epitaxy (MBE). Using quantum dots (QDs) in the absorber region of the SESAMs instead of quantum wells, enables additional degrees of freedom in the design, the control of saturation parameters and the recovery dynamics. However, if one wants to integrate such a SESAM element into semiconductor surface emitting lasers such as a mode-locked integrated external-cavity surface-emitting laser (MIXSEL), the saturable absorber layers have to withstand a longer high-temperature growth procedure for the epitaxial formation of distributed Bragg reflectors (DBR). Typically defect related SESAMs will be annealed at those growth temperatures and lose their high-speed performance. Here we present a systematic study on the growth parameters and post-growth annealing of SESAMs based on high-quality InxGa1-xAs/GaAs quantum dots (QDs) grown by MBE at growth temperatures of 450 °C or higher. The good quality enables the QDs to survive the long DBR overgrowth at 600 °C with only minimal shifts in the designed operation wavelength of 1030 nm required for growth of MIXSEL devices. The introduction of recombination centers with p-type modulation doping and additional post-growth annealing improves the absorption of the high-quality QDs. Hence, low saturation fluences < 10 µJ/cm2 and a reduction of the τ1/e recovery time to values < 2 ps can be achieved.

Calibration of high-accuracy spectrometers using stabilized 11-GHz femtosecond semiconductor laser.

We demonstrate for the first time the calibration of the wavelength scale of high-performance spectrometers using a fully stabilized optical frequency comb from an ultrafast optically pumped semiconductor disk laser (SDL) as a traceable reference. The SDL is a modelocked integrated external-cavity surface-emitting laser (MIXSEL) with the gain and saturable absorber layers fully integrated into one wafer chip, which forms one end mirror of the simple straight cavity with a pulse repetition rate of 11 GHz. This MIXSEL comb is actively stabilized and opens new possibilities for easier and more accurate frequency calibrations of standard laboratory instruments.

Sub-150-fs pulses from an optically pumped broadband modelocked integrated external-cavity surface emitting laser.

With a modelocked integrated external-cavity surface emitting laser (MIXSEL) we achieved a pulse duration of 144 fs. The MIXSEL belongs to the family of optically pumped semiconductor disk lasers. The MIXSEL operates at a center wavelength of 1033 nm with a 13-nm full width at half maximum optical bandwidth, at a pulse repetition rate of 2.73 GHz, and at an average output power of 30 mW. This new record result was obtained with an optimized multipair dielectric top-coating, a large bandgap AlAsxP1-x material for strain compensation, a nonperiodic InGaAs quantum well gain structure, and an improved thermal management.

Dual-comb modelocked laser.

In this paper we present the first semiconductor disk laser (SDL) emitting simultaneously two collinearly overlapping cross-polarized gigahertz modelocked pulse trains with different pulse repetition rates. Using only a simple photo detector and a microwave spectrum analyzer directly down-converts the frequency comb difference from the optical to the microwave frequency domain. With this setup, the relative carrier-envelope-offset (CEO) frequency can be accessed directly without an f-to2f interferometer. A very compact design is obtained using the modelocked integrated external-cavity surface emitting laser (MIXSEL) which is part of the family of optically pumped SDLs and similar to a vertical external cavity surface emitting laser (VECSEL) but with both gain and saturable absorber integrated into the same semiconductor wafer (i.e. MIXSEL chip). We then simply added an additional intracavity birefringent crystal inside the linear straight cavity between the output coupler and the MIXSEL chip which splits the cavity beam into two collinear but spatially separated cross-polarized beams on the MIXSEL chip. This results in two modelocked collinear and fully overlapping cross-polarized output beams with adjustable pulse repetition frequencies with excellent noise performance. We stabilized both pulse repetition rates of the dual comb MIXSEL.

Pulse repetition rate scaling from 5 to 100 GHz with a high-power semiconductor disk laser

The high-power semiconductor laser studied here is a modelocked integrated external-cavity surface emitting laser (MIXSEL), which combines the gain of vertical-external-cavity surface-emitting lasers (VECSELs) with the saturable absorber of a semiconductor saturable absorber mirror (SESAM) in a single semiconductor layer stack. The MIXSEL concept allows for stable and self-starting fundamental passive modelocking in a simple straight cavity and the average power scaling is based on the semiconductor disk laser concept. Previously record-high average output power from an optically pumped MIXSEL was demonstrated, however the long pulse duration of 17 ps prevented higher pulse repetition rates and many interesting applications such as supercontinuum generation and broadband frequency comb generation. With a novel MIXSEL structure, the first femtosecond operation was then demonstrated just recently. Here we show that such a MIXSEL can also support pulse repetition rate scaling from ≈5 GHz to >100 GHz with excellent beam quality and high average output power, by mechanically changing the cavity length of the linear straight cavity and the output coupler. Up to a pulse repetition rate of 15 GHz we obtained average output power >1 W and pulse durations <4 ps. Furthermore we have been able to demonstrate the highest pulse repetition rate from any fundamentally modelocked semiconductor disk laser with 101.2 GHz at an average output power of 127 mW and a pulse duration of 570 fs.

Amplitude Noise and Timing Jitter Characterization of a High-Power Mode-Locked Integrated External-Cavity Surface Emitting Laser

We present a timing jitter and amplitude noise characterization of a high-power mode-locked integrated external-cavity surface emitting laser (MIXSEL). In the MIXSEL, the semiconductor saturable absorber of a SESAM is integrated into the structure of a VECSEL to start and stabilize passive mode-locking. In comparison to previous noise characterization of SESAM-mode-locked VECSELs, this first noise characterization of a MIXSEL is performed at a much higher average output power. In a free-running operation, the laser generates 14.3-ps pulses at an average output power of 645 mW at a 2-GHz pulse repetition rate and an RMS amplitude noise of 0.15% [1 Hz, 10 MHz]. We measured an RMS timing jitter of 129 fs [100 Hz, 10 MHz], which represents the lowest value for a free-running passively mode-locked semiconductor disk laser to date. Additionally, we stabilized the pulse repetition rate with a piezo actuator to control the cavity length. With the laser generating 16.7-ps pulses at an average output power of 701 mW, the repetition frequency was phase-locked to a low-noise electronic reference using a feedback loop. In actively stabilized operation, the RMS timing jitter was reduced to less than 70 fs [1 Hz, 100 MHz]. In the 100-Hz to 10-MHz bandwidth, we report the lowest timing jitter measured from a passively mode-locked semiconductor disk laser to date with a value of 31 fs. These results show that the MIXSEL technology provides compact ultrafast laser sources combining high-power and low-noise performance similar to diode-pumped solid-state lasers, which enable world-record optical communication rates and low-noise frequency combs.

Femtosecond pulses from a modelocked integrated external-cavity surface emitting laser (MIXSEL)

Novel surface-emitting optically pumped semiconductor lasers have demonstrated >1 W modelocked and >100 W continuous wave (cw) average output power. The modelocked integrated external-cavity surface emitting laser (MIXSEL) combines the gain of vertical-external-cavity surface-emitting lasers (VECSELs) with the saturable absorber of a semiconductor saturable absorber mirror (SESAM) in one single semiconductor structure. This unique concept allows for stable and self-starting passive modelocking in a simple straight cavity. With quantum-dot based absorbers, record-high average output power was demonstrated previously, however the pulse duration was limited to 17 ps so far. Here, we present the first femtosecond MIXSEL emitting pulses with a duration as short as 620 fs at 4.8 GHz repetition rate and 101 mW average output power. The novel MIXSEL structure relies on a single low temperature grown quantum-well saturable absorber with a low saturation fluence and fast recovery dynamics. A detailed characterization of the key modelocking parameters of the absorber and the challenges for absorber integration into the MIXSEL structure are discussed.

High-power integrated ultrafast semiconductor disk laser: multi-Watt 10 GHz pulse generation

Presented is an optically pumped modelocked integrated external-cavity surface emitting laser (MIXSEL) with a pulse repetition rate of 10 GHz, generating picosecond pulses at 2.4 W average output power at a centre wavelength of 963 nm. The MIXSEL structure integrates both the absorber and the gain layers within the same wafer. The saturable absorber is a single layer of self-assembled InAs quantum dots (QD) and the gain is obtained with seven InGaAs quantum wells. It is shown that the picosecond pulse duration is limited by the slow recovery time of the integrated QD saturable absorber.

Mixed pulses

Researchers from Eidgenössische Technische Hochschule Zürich (ETH Zürich) in Switzerland have achieved a record high average power for modelocked integrated external-cavity surface emitting laser (MIXSEL) oscillators. After absorber optimisation, structure design and thermal improvements, their laser, presented in this issue of Electronics Letters, produced 2.4 W at 10 GHz in 17 ps pulses. The MIXSEL chip is also simple with only two components, and has the potential for full wafer scale integration of the laser cavity.

Femtosecond high-power quantum dot vertical external cavity surface emitting laser

We report on the first femtosecond vertical external cavity surface emitting laser (VECSEL) exceeding 1 W of average output power. The VECSEL is optically pumped, based on self-assembled InAs quantum dot (QD) gain layers, cooled efficiently using a thin disk geometry and passively modelocked with a fast quantum dot semiconductor saturable absorber mirror (SESAM). We developed a novel gain structure with a flat group delay dispersion (GDD) of ± 10 fs2 over a range of 30 nm around the designed operation wavelength of 960 nm. This amount of GDD is several orders of magnitude lower compared to standard designs. Furthermore, we used an optimized positioning scheme of 63 QD gain layers to broaden and flatten the spectral gain. For stable and self-starting pulse formation, we have employed a QD-SESAM with a fast absorption recovery time of around 500 fs. We have achieved 1 W of average output power with 784-fs pulse duration at a repetition rate of 5.4 GHz. The QD-SESAM and the QD-VECSEL are operated with similar cavity mode areas, which is beneficial for higher repetition rates and the integration of both elements into a modelocked integrated external-cavity surface emitting laser (MIXSEL).

High-power MIXSEL: an integrated ultrafast semiconductor laser with 64 W average power

High-power ultrafast lasers are important for numerous industrial and scientific applications. Current multi-watt systems, however, are based on relatively complex laser concepts, for example using additional intracavity elements for pulse formation. Moving towards a higher level of integration would reduce complexity, packaging, and manufacturing cost, which are important requirements for mass production. Semiconductor lasers are well established for such applications, and optically-pumped vertical external cavity surface emitting lasers (VECSELs) are most promising for higher power applications, generating the highest power in fundamental transverse mode (>20 W) to date. Ultrashort pulses have been demonstrated using passive modelocking with a semiconductor saturable absorber mirror (SESAM), achieving for example 2.1-W average power, sub-100-fs pulse duration, and 50-GHz pulse repetition rate. Previously the integration of both the gain and absorber elements into a single wafer was demonstrated with the MIXSEL (modelocked integrated external-cavity surface emitting laser) but with limited average output power (<200 mW). We have demonstrated the power scaling concept of the MIXSEL using optimized quantum dot saturable absorbers in an antiresonant structure design combined with an improved thermal management by wafer removal and mounting of the 8-µm thick MIXSEL structure directly onto a CVD-diamond heat spreader. The simple straight cavity with only two components has generated 28-ps pulses at 2.5-GHz repetition rate and an average output power of 6.4 W, which is higher than for any other modelocked semiconductor laser.

Low saturation fluence antiresonant quantum dot SESAMs for MIXSEL integration

Quantum dot (QD) semiconductor saturable absorber mirrors (SESAMs) offer a larger design freedom than standard quantum well (QW) SESAMs. QD density, QD growth conditions, number of QD-layers, and post-growth annealing were optimized to independently reduce the saturation fluence and adjust the modulation depth for an antiresonant SESAM that supported for the first time passive modelocking of a vertical external-cavity surface emitting laser (VECSEL) with the same spot size on gain and absorber. The same spot size is a requirement for the modelocked integrated external-cavity surface emitting laser (MIXSEL) concept which enables wafer-scale fabrication of the ultrafast semiconductor laser. The antiresonant SESAM design has low dispersion, is less susceptible to growth errors, and is therefore very promising for short pulse generation and MIXSEL integration.

Modelocked integrated external-cavity surface emitting laser

A modelocked integrated external-cavity surface emitting laser (MIXSEL) is a novel type of ultrafast semiconductor laser that integrates a saturable absorber directly into a vertical external cavity surface-emitting laser. The saturable absorber requirements and integration challenges to obtain self-starting and stable pulse formation are discussed. One single quantum dot absorber layer was optimised for this application. Since the first feasibility demonstration of an optically pumped MIXSEL, the authors have further improved the average output power to 185 mW with 32 ps pulses at around 3 GHz pulse repetition rate at a centre wavelength of ≃957 nm. The authors analyse and discuss the challenges for further power scaling and pulse shortening. The MIXSEL concept appears suitable for cost-efficient wafer-scale mass production when the external cavity is defined by a transparent wafer into which the curved output coupler can be etched. The semiconductor MIXSEL structure would then be glued to such a transparent wafer. The potential for electrically pumped MIXSELs will make this laser technology even more attractive.