The SiC mirror has excellent structural rigidity and thermal stability, making it widely applicable in high-power optical systems. This manuscript aims to establish a coupled analysis model of thermal-optical performance for a lightweight SiC reflector under high-power laser irradiation. First, based on the Fourier principle, the transient temperature rise of the mirror is analyzed using the finite element method, considering boundary conditions such as heat source and convective radiation. A transient thermal response model for the mirror is established. Then, the reflective surface deformation is solved based on the mirror temperature field. By processing the data of node deformation, the decrease in the mirror surface shape accuracy (RMS) value is obtained. Finally, the experimental platform is built to measure the transient temperature rise and wavefront aberration change of the mirror after high-power laser excitation. Based on the deviation between the calculated data of the analysis model and the measured data, thermodynamic parameters in the analysis model are adjusted according to the principle of minimum residual. The research findings of this manuscript can be utilized for accurately predicting the temperature rise and optical degradation of SiC mirrors under high-power laser irradiation and provide a theoretical basis for the subsequent design of actively compensating methods for thermal-induced distortions.
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