Miniature Fiber Optic Pressure Sensor Research Articles

A1190 - Development of an automated irrigation system synchronized with an ultra miniature fiber optic pressure sensor for regulating intrapelvic pressure during ureteroscopy: An ex vivo preclinical study

A1190 - Development of an automated irrigation system synchronized with an ultra miniature fiber optic pressure sensor for regulating intrapelvic pressure during ureteroscopy: An ex vivo preclinical study

Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

Corrugated diaphragms (CDs) have been widely used in many fields because of their higher pressure sensitivity and wider linear range compared to flat diaphragms (FDs) in the same circumstances. Especially in the application of miniature fiber-optic pressure sensors, the introduction of the corrugated structure gives the sensor high sensitivity, large dynamic range, good linearity, small hysteresis, good stability, and so on. Research on CD-based miniature fiber-optic pressure sensors has gradually attracted more attention in recent years. In this paper, the principles of operation of a miniature fiber-optic pressure sensor are briefly introduced, then the mechanical properties of FD and CD, as well as their influences on the performance of the sensor, are analyzed in detail. The application status of CDs in miniature fiber-optic pressure sensors is reviewed, and our conclusions and the prospects for the application of CDs in miniature fiber-optic pressure sensors are given finally.

Miniature fiber pressure sensor based on fiber etching

A miniature fiber optic pressure sensor based on Fabry–Perot interference fabricated on the tip of a single mode (SM) fiber is presented. The sensor measures only 125μm in diameter. A Fabry–Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only cleaving, wet chemical etching and fusion splicing. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. Experimental results show the sensor has a good linearity. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost.

Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements

We developed a miniature fiber optic pressure sensor system and utilized it for in vitro intradiscal pressure measurements for rodents. One of the unique features of this work is the design and fabrication of a sensor element with a multilayer polymer-metal diaphragm. This diaphragm consists of a base polyimide layer (150 nm thick), a metal reflective layer (1 microm thick), and another polyimide layer for protection and isolation (150 nm thick). The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 microm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration and in vitro rodent intradiscal pressure measurements, the sensor element exhibits a linear response to the applied pressure over the range of 0-70 kPa, with a sensitivity of 0.0206 microm/kPa and a resolution of 0.17 kPa. To our best knowledge, this work is the first successful demonstration of rodent intradiscal pressure measurements.

Miniature temperature-insensitive Fabry-Pe/spl acute/rot fiber-optic pressure sensor

We present a miniature fiber-optic pressure sensor with a diameter of only 125 mum. The sensor works as an extrinsic Fabry-Peacuterot interferometer and the cavity length can be controlled with a resolution of about several nanometers. Also the sensor sensitivity can be easily adjusted by controlling the sensor gauge length. A passive temperature compensation scheme was used to reduce most of the sensor's temperature dependence. Since the sensor is composed entirely of fused silica, it is reliable, biocompatible, corrosion resistant, and immune to electromagnetic interference and has high-temperature capability

Miniature fiber-optic pressure sensor

This letter presents a miniature fiber-optic pressure sensor fabricated directly on the tip of a fiber. The sensor measures only 125 /spl mu/m in diameter. A Fabry-Pe/spl acute/rot cavity and a thin silica diaphragm are fabricated by simple techniques involving only fusion splicing, cleaving, and wet chemical etching. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The sensor has been tested for static pressure response, showing excellent repeatability and no hysteresis. Its all-fused-silica structure lends it great potential for high-temperature pressure measurements. Pressure testing results at 530/spl deg/C are given. The sensor may also find uses in medical applications.