Metal oxide nanofiber array materials are a type of material with outstanding performance and application potential. Recently, an efficient dealloying method using Ti–Cu/Cu multilayer film as a precursor was proposed to prepare titanium oxide nanofiber array structure. However, the growth mechanism and formation process of such an oxide nanofiber array grown on multilayer-film is not clear. In this work, we use Ti-Cu/Cu multilayer film as the precursor, NaOH solution as the dealloying corrosion solution, and free dealloying at room temperature. On the basis of successfully obtaining TiO2 nanofiber array films, the morphology formation and evolution process of the nanoarray were carefully monitored, and the atomic percentage changes of Ti, Cu and O elements in the dealloying precursor films were tested, as well as the formation and crystalline phase evolution trends of TiO2. Based on the experimental data, we tried to draw a schematic diagram of the formation process of this TiO2 nanofiber array, and proposed that the growth mechanism of the TiO2 nanofiber array is the precipitation growth process both with Ostwald Ripening and Oriented Attachment mechanisms. Then, the photocurrent response characteristics of the obtained nanofiber array structure samples were analyzed, and it was found that the nanofiber array structure had a certain effect on the photocurrent response performance. The completion of the present work is expected to provide a theoretical reference for the preparation and application of other metal oxide nanofiber array by dealloying method.
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