Metalorganic Precursors Research Articles

Nanometer-thick TiO2 channel thin film transistors as radical monitors for plasma enhanced atomic layer deposition

Nanometer-thick-TiO2-channel thin-film transistors (TFTs) are examined as oxidizing-agent monitors for room-temperature atomic layer deposition (RTALD). RTALD is a plasma-based process using plasma-excited humidified argon where OH radicals oxidize the precursor-gas adsorbed surface. In the TFT, the anatase TiO2 channel, with a thickness of 16 nm, is attached to a 300 nm thick gate capacitor of SiO2, while the channel surface is exposed to the ALD ambient. A heavily doped n-type Si substrate attached to the gate SiO2 is used as the gate electrode. The gate width and length are 1000 and 60 μm, respectively. When the TFT is installed in the RTALD chamber, the drain-current waveform is recorded in the course of the metal organic gas adsorption, evacuation of the residual gas, oxidization, and evacuation. In the present study, three kinds of metal organic (MO) precursors, tetrakis(dimethyl)amino titanium, tris(dimethyl)amino silane, and trimethyl aluminum are examined. The drain current exhibits strong responses upon the exposure of the plasma excited humidified argon. This suggests that OH radicals in the plasma might oxidize the adsorbed MO precursors to produce the OH moieties, where the surface polarization of OH moieties might enhance channel conductivity. The experimental results suggest the applicability of the present TFT as a plasma monitor in RTALD.

Creating CoRu Dual Active Sites Codecorated Stable Porous Ceria Support for Enhanced Li-CO2 Batteries Cathodes.

Lithium-carbon dioxide (Li-CO2) battery represents a high-energy density energy storage with excellent real-time CO2 enrichment and conversion, but its practical utilization is hampered by the development of an excellent catalytic cathode. Here, the synergistic catalytic strategy of designing CoRu bimetallic active sites achieves the electrocatalytic conversion of CO2 and the efficient decomposition of the discharge products, which in turn realizes the smooth operation of the Li-CO2 battery. Moreover, obtained support based on metal-organic frameworks precursors facilitates the convenient diffusion and adsorption of CO2, resulting in higher reaction concentration and lower mass transfer resistance. Meanwhile, the optimization of the interfacial electronic structure and the effective transfer of electrons are achieved by virtue of the strong interaction of CoRu at the support interface. As a result, the Li-CO2 cell assembled based on bimetallic CoRu active sites achieved a discharge capacity of 19,111mAhg-1 and a steady-state discharge voltage of 2.58V as well as a cycle life of >175 cycles at a rate of 100mAg-1. Further experiments combined with density-functional theory calculations achieve a deeply view of the connection between cathode and electrochemical performance and pave a way for the subsequent development of advanced Li-CO2 catalytic cathodes.

The surface chemistry of the atomic layer deposition of ruthenium on aluminum and tantalum oxide surfaces

The surface chemistry of Ru atomic layer deposition (ALD) processes based on the use of tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ruthenium(III) (Ru(tmhd)3) and either molecular oxygen or atomic hydrogen on aluminum oxide films was characterized by a combination of surface-sensitive techniques. The thermal decomposition of the Ru metalorganic precursor was determined, by using a combination of reflection-absorption infrared spectroscopy (RAIRS), temperature programmed desorption (TPD), and X-ray photoelectron spectroscopy (XPS), to start below 400 K and to take place in a stepwise fashion over a wide range of temperatures. Gas-phase products from this chemistry include 2,2,6,6-tetramethyl-3,5-heptanedione (the protonated ligand, Htmhd; in a TPD peak at 520 K), isobutene (540 K; indicating the fragmentation of the organic ligands), and other products from isomerization and/or aldol condensation (650 and 730 K). This chemistry is accompanied by the reduction of the Ru3+ ions in two stages, involving the loss of some of their ligands and their direct bonding to the substrate first (between 500 and 600 K) and a full reduction to a metallic state later on (600–700 K). ALD cycles using either molecular oxygen or atomic hydrogen resulted in the slow build-up of Ru on the surface, but the co-deposition of carbon could not be avoided, at least in the initial cycles, while the alumina surface was still exposed. With O2, the Ru atoms alternate between partially-oxidized (after the O2 exposures) and zero-valent (after the Ru(tmhd)3 doses) states, and some Ru loss in the form of the volatile RuO4 oxide was seen after the second half of the ALD cycles; neither the Ru oxidation state alternation nor the elimination of some Ru from the surface were observed when using H·. The deposited Ru was determined, by combining results from angle-resolved XPS (ARXPS) and low-energy ion scattering (LEIS) experiments, to grow as 3D nanoparticles rather than as a layer-by-layer 2D film, presumably because the Ru precursor preferentially adsorbs (and decomposes more cleanly) on the metal surface. A discussion is provided of the implications of these results for the design of ALD processes.

(Dielectric Science & Technology Thomas Callinan Award) Rare-Earth Luminescence in Silicon-Based Thin Film Structures

For Si-based materials to be used in solid-state lighting and silicon photonics schemes it is necessary to have precise control of the optical emission from these materials. This can be accomplished using rare earth dopants such as Ce, Tb, and Eu to obtain blue, green, and red emissions, respectively. In this talk, we first will provide a review of our work in this field and then focus on Eu-doped films, which are particularly attractive for silicon photonic applications due to their intense emission in the visible spectral region [1]. We will also discuss the benefits of introducing a novel hybrid radio frequency (RF) magnetron sputtering source in the electron cyclotron resonance (ECR) plasma enhanced chemical vapour deposition (PECVD) reactor chamber [2], using the example of Tb-doped SiON films [3]. This approach contrasts with traditional doping methods which use metal-organic precursors or ion implantation to introduce rare-earth dopant species into the host matrix.[1] F. Azmi et al., “Tunable Emission from Eu:SiOxNy Thin Films Prepared by Integrated Magnetron Sputtering and Plasma Enhanced Chemical Vapor Deposition”, J. Vac. Sci. Technol. A 40, 043402 (2022); DOI: 10.1116/6.0001761[2] J.W. Miller et al., “Integrated ECR-PECVD and Magnetron Sputtering System for Rare-Earth-Doped Si-Based Materials”, Surface and Coatings Technology 336, 99 (2018); DOI: 10.1016/j.surfcoat.2017.08.051[3] Z. Khatami et al., "A comprehensive calibration of integrated magnetron sputtering and plasma enhanced chemical vapor deposition for rare-earth doped thin films", J. Mater. Res. (2023); DOI: 10.1557/s43578-023-01207-2

(Invited) Low Temperature Atomic Layer Deposition Processes for Large-Area Synthesis of 2D Transition Metal Dichalcogenides

2D materials have been the focus of intense research in the last decade due to their unique physical properties. This presentation will highlight our recent progress on the large-area synthesis of two-dimensional transition metal chalcogenides for nanoelectronics using advanced atomic layer deposition cycle schemes. First, how we can use advanced cycle schemes to deposit wafer-scale polycrystalline MoS2 thin films at very low temperatures down to 100 °C. We have identified the critical role of hydrogen during the plasma step in controlling the composition and properties of molybdenum sulfide films. By increasing the H2/H2S ratio or adding an extra hydrogen plasma step to our ALD process, we are able to deposit pure polycrystalline MoS2 films at temperatures as low as 100 °C. To the best of our knowledge, this represents the lowest temperature for crystalline MoS2 films prepared by any chemical gas-phase method.[1]The most dominant methods for preparing MoS2 via ALD is to alternately expose a substrate to a metalorganic precursor and a hydrogen sulfide (H2S) or a plasma containing H2S. H2S is a corrosive, toxic, and flammable gas that is heavier than air, which makes it hazardous and expensive to store, install, and transport. Alternative sulfur precursors in the solid or liquid phase would be beneficial in terms of cost and safety and would require the installation of no additional hardware for most ALD reactors. In the second half of this contribution, the widely researched ALD process using bis(tert-butylimido)bis(dimethylamino)molybdenum(IV) ((tBuN)2(NMe2)2Mo) and H2S plasma is compared to a novel ALD process using (tBuN)2(NMe2)2Mo, hydrogen plasma, and di-tert-butyl disulfide (TBDS), which is an inexpensive, liquid-phase sulfur precursor.[1] M. Mattinen et al., Chem. Mater. (2022), 34, 5104

Boosting ORR/OER bifunctional electrocatalysis by promoting electronic redistribution of Fe-N-C on CoFe-FeNC for ultra-long rechargeable Zn-air batteries

Fe-N-C materials are among the most promising platinum group metals-free catalysts for air cathode of Zn-air batteries (ZABs). However, they are still limited by sluggish reaction kinetics. Herein, we synthesize a novel and effective mesoporous carbon embedded with CoFe nanoclusters, coated with graphitic carbon layers (denoted as CoFe-FeNC). CoFe-FeNC is derived from the pyrolysis of metal-organic complex precursors with grafted iron porphyrin. The CoFe-FeNC catalyst exhibits a half-wave potential (E1/2) of 0.876 V for the oxygen reduction reaction (ORR) and a potential of 1.526 V at 10 mA cm−2 (Ej=10) for the oxygen evolution reaction (OER) in alkaline solutions. Theoretical calculations reveal that the presence of CoFe clusters regulates the electronic structure, optimizing adsorption and desorption during the catalytic reaction. Moreover, flow-ZABs utilizing CoFe-FeNC as the cathode material demonstrate a high specific capacity of 767.5 mAh gZn−1 and an ultra-long lifespan exceeding 1200 h. Additionally, flexible quasi-solid-state rechargeable ZABs incorporating CoFe-FeNC electrocatalysts as the cathode demonstrate well cycling and mechanical flexibility.

A novel approach to the synthesis of superionic LaF3-based multicomponent nanofluorides via trifluoroacetate precursor decomposition

In this study, an approach for the facile and versatile synthesis of multicomponent superionic nanofluorides is proposed. The results of synthesis optimization of the tysonite-type LaF3 and La0.95Sr0.05F2.95 (sp. gr. P3‾c1) nanopowders with a particle size up to 100 nm by the trifluoroacetate precursors thermal decomposition under various conditions (dynamic vacuum and ambient atmosphere) are presented. The produced samples are characterized by X-ray diffraction, electron microscopy, and differential scanning calorimetry. Decarbonization annealing of the initial nanopowders in air at 773 K is urgent for the effective elimination of amorphous carbon formed as a result of the metal-organic precursors decomposition. The nanoceramics were pressed to a theoretical density of 75–80 % and their ion-conducting properties were measured using impedance spectroscopy. The conductivity of decarbonized La0.95Sr0.05F2.95 composition, obtained in a dynamic vacuum, is 1 × 10−3 S/cm at 500 K, which exceeds the performance of undoped LaF3 ceramics by approximately 60 times. The conductive properties of nanoceramics, produced from decarbonized vacuum-synthesized powders, are 5 times higher (1 × 10−3 Sm/cm) compared to mechanochemically fabricated ones. Air-synthesized (773 K) La0.95Sr0.05F2.95 ceramics are conducted significantly worse, although no traces of pyrohydrolysis were detected. Thus, the precursors thermal decomposition method opens up great prospects for the advanced production of ion-conducting nanomaterials based on multicomponent fluoride compounds for solid electrolyte design.

Restrained interfacial resistance Co5.47N@C derived from metal-organic frameworks for advanced Li-CO2 batteries cathodes

Lithium–carbon dioxide (Li–CO2) batteries are novel high energy density energy storage devices that can simultaneously enrich and convert CO2, but their widespread implementation is hindered by the continuous accumulation of lithium carbonate at the cathode. Herein, we developed non-precious metal cobalt-based nitride matrix composite Co[Formula: see text]N@C based on metal-organic frameworks precursor for the catalytic cathode of advanced Li–CO2 batteries. The highly stable Co[Formula: see text]N achieves favorable adsorption and catalysis of CO2 molecules by virtue of the excellent electronic structure on the surface, while the nanoscale high dispersion also effectively promotes interfacial electron transfer. As expected, the assembled Li–CO2 battery exhibits excellent electrochemical performance in the discharge capacity of 10,000 mAh g[Formula: see text] and a cycling capability of about 400 h. Further density functional theory (DFT) calculations explored the relationship between electronic structure and electrochemical activity. This work promotes the development of catalytic materials for Li–CO2 batteries cathode.

Area-Selective Atomic Layer Deposition of Ru Using Carbonyl-Based Precursor and Oxygen Co-Reactant: Understanding Defect Formation Mechanisms.

Area selective deposition (ASD) is a promising IC fabrication technique to address misalignment issues arising in a top-down litho-etch patterning approach. ASD can enable resist tone inversion and bottom-up metallization, such as via prefill. It is achieved by promoting selective growth in the growth area (GA) while passivating the non-growth area (NGA). Nevertheless, preventing undesired particles and defect growth on the NGA is still a hurdle. This work shows the selectivity of Ru films by passivating the Si oxide NGA with self-assembled monolayers (SAMs) and small molecule inhibitors (SMIs). Ru films are deposited on the TiN GA using a metal-organic precursor tricarbonyl (trimethylenemethane) ruthenium (Ru TMM(CO)3) and O2 as a co-reactant by atomic layer deposition (ALD). This produces smooth Ru films (<0.1 nm RMS roughness) with a growth per cycle (GPC) of 1.6 Å/cycle. Minimizing the oxygen co-reactant dose is necessary to improve the ASD process selectivity due to the limited stability of the organic molecule and high reactivity of the ALD precursor, still allowing a Ru GPC of 0.95 Å/cycle. This work sheds light on Ru defect generation mechanisms on passivated areas from the detailed analysis of particle growth, coverage, and density as a function of ALD cycles. Finally, an optimized ASD of Ru is demonstrated on TiN/SiO2 3D patterned structures using dimethyl amino trimethyl silane (DMA-TMS) as SMI.

Co/Ce-MOF-Derived Oxygen Electrode Bifunctional Catalyst for Rechargeable Zinc-Air Batteries.

Improving the practicality of rechargeable zinc-air batteries relies heavily on the development of oxygen electrode catalysts that are low-cost, durable, and highly efficient in performing dual functions. In the present study, a catalyst with atomic Ce and Co distribution on a nitrogen-doped carbon substrate was prepared by doping the rare earth elements Ce and Co into a metal-organic framework precursor. Rare earth element Ce, known for its unique structure and excellent oxygen affinity, was utilized to regulate the catalytic activity. The catalyst prepared in this study demonstrated an exceptional electrocatalytic performance. At a current density of 10 mA cm-2, the catalyst exhibited an overpotential of 340 mV for the oxygen evolution reaction (OER), which was lower than that of commercial IrO2 (370 mV), while achieving a half-wave potential of 0.79 V for the process of oxygen reduction reaction (ORR), exhibiting a similar level of effectiveness as commercially accessible Pt/C catalysts (0.8 V). The catalyst's porous structure, interconnected three-dimensional carbon network, and large specific surface area are the factors contributing to the significant improvement in catalytic performance. Furthermore, in comparison to commercial Pt/C+IrO2, the catalyst exhibited good cycling stability and high efficiency in rechargeable zinc-air batteries.

Microwave-Assisted Hydrothermal Synthesis of Hydroxyapatite Flakes as Substrates for Titanium Dioxide Film Deposition

This article describes the synthesis of hydroxyapatite (HAp) flakes through a microwave-assisted hydrothermal method. These flakes suggest possible applications as a substrate for depositing titanium dioxide (TiO2) films using chemical vapor deposition with metal–organic precursors (MOCVD). The results reveal the formation of crystalline hydroxyapatite characterized by a uniform morphology. Additionally, we demonstrated the successful deposition of TiO2 coatings on the hydroxyapatite flakes, resulting in a distinctive faceted prism morphology. Our findings affirm the effective synthesis of the HAp/TiO2 composite material. To further explore the material’s practical applications, we recommend assessing the photocatalytic activity of these composite membranes in future research.

MOF-derived porous carbon microspheres Ni@C-acid as solid-phase microextraction coating for extraction of polycyclic aromatic hydrocarbons from tea infusions

The improvement of the stability and adsorption properties of materials on targets in sample pre-treatment has long been an objective. Extensive efforts have been made to achieve this goal. In this work, metal-organic framework Ni-MOF precursors were first synthesized by solvothermal method using polyvinylpyrrolidone (PVP) as an ideal templating agent, stabiliser and nanoparticle dispersant. After carbonization and acid washing, the nanoporous carbon microspheres material (Ni@C-acid) was obtained. Compared with the material without acid treatment (Ni@C), the specific surface area, pore volume, adsorption performance of Ni@C-acid were increased. Thanks to its excellent characteristics (high stability, abundant benzene rings), Ni@C-acid was used as fiber coatings in headspace solid-phase microextraction (HS-SPME) technology for extraction and preconcentration of polycyclic aromatic hydrocarbons (PAHs) prior to gas chromatography-flame ionization detector (GC-FID) analysis. The experimental parameters of extraction temperature, extraction time, agitation speed, desorption temperature, desorption time and sodium chloride (NaCl) concentration were studied. Under optimal experimental conditions, the wide linear range (0.01-30 ng mL−1), the good correlation coefficient (0.9916-0.9984), the low detection limit (0.003-0.011 ng mL−1), and the high enrichment factor (5273-13793) were obtained. The established method was successfully used for the detection of trace PAHs in actual tea infusions samples and satisfied recoveries ranging from 80.94-118.62 % were achieved. The present work provides a simple method for the preparation of highly stable and adsorbable porous carbon microsphere materials with potential applications in the extraction of environmental pollutants.

Co/C Nanocomposites with Tunable Condensed States Induced by Conformation-Mediated Strategy for Electromagnetic Wave Absorption.

The strategic regulation of condensed state structures in multicomponent nanomaterials has emerged as an effective approach for achieving controllable electromagnetic (EM) properties. Herein, a novel conformation-mediated strategy is proposed to manipulate the condensed states of Co and C, as well as their interaction. The conformation of polyvinylpyrrolidone molecules is adjusted using a gradient methanol/water ratio, whereby the coordination dynamic equilibrium effectively governs the deposition of metal-organic framework precursors. This process ultimately influences the combined impact of derived Co and C in the resulting Co/C nanocomposites post-pyrolysis. The experimental results show that the condensed state structure of Co/C nanocomposites transitions from agglomerate state → to biphasic compact state → to loose packing state. Benefiting from the tunable collaboration between interfacial polarization and defects polarization, and the appropriate electrical conductivity, the diphasic compact state of Co/C nanocomposites achieves an effective absorbing bandwidth of 7.12GHz (2.1mm) and minimum reflection loss of -32.8dB. This study highlights the significance of condensed state manipulation in comprehensively regulating the EM wave absorption characteristics of carbon-based magnetic metal nanocomposites, encompassing factors such as conductivity loss, magnetic loss, defect polarization, and interface polarization.

Iron Triad-Based Bimetallic M–N–C Nanomaterials as Highly Active Bifunctional Oxygen Electrocatalysts

Iron Triad-Based Bimetallic M–N–C Nanomaterials as Highly Active Bifunctional Oxygen Electrocatalysts

Phase-Centric MOCVD Enabled Synthetic Approaches for Wafer-Scale 2D Tin Selenides.

Following an initial nucleation stage at the flake level, atomically thin film growth of a van der Waals material is promoted by ultrafast lateral growth and prohibited vertical growth. To produce these highly anisotropic films, synthetic or post-synthetic modifications are required, or even a combination of both, to ensure large-area, pure-phase, and low-temperature deposition. A set of synthetic strategies is hereby presented to selectively produce wafer-scale tin selenides, SnSex (both x=1 and 2), in the 2D forms. The 2D-SnSe2 films with tuneable thicknesses are directly grown via metal-organic chemical vapor deposition (MOCVD) at 200°C, and they exhibit outstanding crystallinities and phase homogeneities and consistent film thickness across the entire wafer. This is enabled by excellent control of the volatile metal-organic precursors and decoupled dual-temperature regimes for high-temperature ligand cracking and low-temperature growth. In contrast, SnSe, which intrinsically inhibited from 2D growth, is indirectly prepared by a thermally driven phase transition of an as-grown 2D-SnSe2 film with all the benefits of the MOCVD technique. It is accompanied by the electronic n-type to p-type crossover at the wafer scale. These tailor-made synthetic routes will accelerate the low-thermal-budget production of multiphase 2D materials in a reliable and scalable fashion.

Predicting Organometallic Intermediates in the Surface-Assisted Ullmann Coupling of Chrysene Isomers.

On-surface polymerization of functional organic molecules has been recently recognized as a promising route to persistent low-dimensional structures with tailorable properties. In this contribution, using the coarse-grained Monte Carlo simulation method, we study the initial stage of the Ullmann coupling of doubly halogenated chrysene isomers adsorbed on a catalytically active (111) crystalline surface. To that end, we focus on the formation of labile metal-organic precursor structures preceding the covalent bonding of chrysene monomers. Four monomeric chrysene units with differently distributed halogen substituents were probed in the simulations, and the resulting precursor structures were compared and quantified. Moreover, the effect of (pro)chirality of chrysene tectons on the structure formation was elucidated by running separate simulations in enantiopure and racemic systems. The calculations showed that suitable manipulation of the halogen substitution pattern allows for the creation of diverse precursor architectures, ranging from straight and winded chains to cyclic oligomers with enantiopure, racemic, and nonracemic composition. The obtained findings can be helpful in developing synthetic strategies for covalent polymers with predefined architecture and functionality.

Area-Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding.

Chemical vapor deposition (CVD) is an established method for producing high-purity thin films, but it typically necessitates the pre- and post-processing using a mask to produce structures. This study presents a novel maskless patterning technique that enables area-selective CVD of gold. A focused electron beam is used to decompose the metal-organic precursor Au(acac)Me2 locally, thereby creating an autocatalytically active seed layer for subsequent CVD with the same precursor. The procedure can be included in the same CVD process without the need for clean room lithographic processing. Moreover, it operates at low temperatures of 80°C, over 200K lower than standard CVD temperatures for this precursor, reducing thermal load on the specimen. Given that electron beam seeding operates on any even moderately conductive surface, the process does not constrain device design. This is demonstrated by the example of vertical nanostructures with high aspect ratios of ≈40:1 and more. Written using a focused electron beam and the same precursor, these nanopillars exhibit catalytically active nuclei on their surface. Furthermore, by using the onset of the autocatalytic CVD growth, for the first time the local temperature increase caused by the writing of nanostructures with an electron beam can be preciselydetermined.

Low-cost and highly stable Ni@NC materials synthesized from metal-organic framework precursors for selectively catalytic hydrogenation of p-nitrophenol under mild conditions

The catalytic hydrogenation of aromatic nitro compounds under mild conditions to generate amino compounds is a great challenge in terms of conversion, selectivity and stability. In this paper, two classes of nitrogen-doped carbon coated nickel nanoparticles, coined Ni@NC-P and displaced Ni@NC-T were prepared by high-temperature pyrolysis of MOFs using inexpensive terephthalic acid and high-priced trimesic acid as carbon source, respectively. One from the former class, namely the Ni@NC-P-500 catalyst, exhibits the best catalytic performance, which is superior to Ni@NC-T-500 Samples. For the selective hydrogenation of p-nitrophenol under mild conditions (60 °C, 2 h), the Ni@NC-P-500 catalyst shows >99.9 % conversion of p-nitrophenol and >99.9 % selectivity for p-aminophenol and can be recycled five times without obvious decrease of conversion and selectivity, thanks to its larger specific surface area (382.02 m2·g−1), smaller nickel particle size (8.2 nm), higher nitrogen content (especially pyridine nitrogen), higher electron-rich nickel content and less hydrophilic properties than that of the Ni@NC-T-500. The excellent stability and recyclability of the catalysts are mainly attributed to their core–shell structure, i.e., zero-valent nickel nanoparticles encapsulated within a nitrogen-doped carbon layer with an appropriate microporous structure, whereas zero-valent nickel nanoparticles have the ability to activate dihydrogen and block dioxygen.

Suppressing substrate oxidation during plasma-enhanced atomic layer deposition on semiconductor surfaces

Plasma-enhanced atomic layer deposition (PE-ALD) is widely employed in microelectronics, energy, and sensing applications. Typically, PE-ALD processes for metal oxides utilize remote inductively coupled plasmas operated at powers of &amp;gt;200 W, ensuring a sufficient flux of oxygen radicals to the growth surface. However, this approach often leads to significant oxidation of chemically sensitive substrates, including most technological semiconductors. Here, we demonstrate that plasma powers as low as 5 W can effectively suppress substrate oxidation while maintaining the structural, optical, and electronic quality of the films. Specifically, we investigate the growth of titanium oxide (TiOx) using two commonly used metalorganic precursors, titanium isopropoxide and tetrakis(dimethylamino)titanium. Films deposited with 5 and 300 W oxygen plasma power are nearly indiscernible from one another, exhibiting significantly lower defect concentrations than those obtained from thermal ALD with H2O. The low plasma power process preserves desired physical characteristics of PE-ALD films, including large optical constants (n &amp;gt; 2.45 at 589 nm), negligible defect-induced sub-bandgap optical absorption (α &amp;lt; 102 cm−1), and high electrical resistivity (&amp;gt;105 Ω cm). Similar behavior, including suppressed interface oxidation and low defect content, is observed on both Si and InP substrates. As an example application of this approach, the assessment of InP/TiOx photocathodes and Si/TiOx photoanodes reveals a significant improvement in the photocurrent onset potential in both cases, enabled by suppressed substrate oxidation during low power PE-ALD. Overall, low power PE-ALD represents a generally applicable strategy for producing high quality metal oxide thin films while minimizing detrimental substrate reactions.

Coupling ultrafine TiO2 within pyridinic-N enriched porous carbon towards high-rate and long-life sodium ion capacitors

Coupling TiO2 within N-doped porous carbon (NPC) is essential for enhancing its Na+ storage performance. However, the role of different N configurations in NPC in improving the electrochemical performance of TiO2 is currently unknown.In this study, melamine is deliberately incorporated as a pore-forming agent in the self-assembly process of metal organic framework precursors (NH2-MIL-125(Ti)). This intentional inclusion of melamine leads to the one-pot and in-situ formation of highly active edge-N, which is vital for the development of TiO2/NPC with exceptional reactivity. Electrochemical performance characterization and density functional theory (DFT) calculation indicate that the interaction between TiO2 and pyridinic-N enriched NPC can effectively narrow the bandgap of TiO2/NPC, thereby significantly improving electron/ion transfer. Additionally, the abundant mesoporous channels, high N content and oxygen vacancies also contribute to the fast reaction kinetics of TiO2/NPC. As a result, the optimized TiO2/NPC-M, with high proportion of pyridinic-N (44.1 %) and abundant mesoporous channels (97.8 %), delivers high specific capacity of 282.1 mA h−1 at 0.05 A g−1, superior rate capability of 177.3 mA h−1 at 10 A g−1, and prominent capacity retention of 89.3 % over 5000 cycles even under ultrahigh 10 A g−1. Furthermore, the TiO2/NPC-M//AC sodium ion capacitors (SIC) device achieves a high energy density of 136.7 Wh kg−1 at 200 W kg−1. This research not only offers fresh perspectives on the production of high-performance TiO2-based anodes, but also paves the way for customizing other active materials for energy storage and beyond.