Coating method and number of membrane layer are crucial factors on membrane performance. Through a vacuum impregnation method allows a sol solution uniformly fill into membrane support and it is required only less solution. The aim of this study is to apply vacuum impregnation method through vacuum calcination and air calcination during fabrication of silica membranes and to investigate the effect of layer variations on silica membranes performance to apply for brackish water. The sol solution was made from TEOS as silane precursor, ethanol and dual catalysts (citric acid + ammonia). Alumina membrane support was coated by vacuum impregnation method and calcined the membrane under air and vacuum condition. From the FTIR result, it indicates that silica membranes calcined in air and vacuum calcination have Si-O-Si and Si-OH. The vacuum impregnation obtained smoother surface membranes. The silica membrane calcined via vacuum calcination performs excellent water fluxes and salt rejection of 22.01 kg.m− 2.h−1 and 98.98 %. If compare to silica membranes calcined in air, the water flux (19.11 kg.m− 2.h−1) and salt rejection (98.75 %). It also found the two layers silica membrane is better than three layers for the membrane performance result.