The mechanisms of conductivity in metal–insulator–semiconductor (MIS) structures based on [GeOx](z)[SiO2](1-z) films (0.25 ≤ z ≤ 1) fabricated by co-evaporation of germanium oxide and silicon oxide powders in vacuum and deposition on a p+-type silicon substrate are studied. Indium tin oxide deposited by magnetron method is used as the top electrode. According to IR spectroscopy, Ge–O, Si–O, and Ge–O–Si bonds are detected in the films, while no features related to the presence of germanium clusters are found in the Raman spectra. The current–voltage characteristics (I–V curves) are measured at different temperatures and analyzed by applying the eight most common models of charge transport in MIS structures. It is found that the experimental I–V curves are most accurately approximated in the space charge limited current model, and the parameters of the charge traps are determined within this model.
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