Mass-limited Targets Research Articles

Attosecond and nano-Coulomb electron bunches via the Zero Vector Potential mechanism

The commissioning of multi-petawatt class laser facilities around the world is gathering pace. One of the primary motivations for these investments is the acceleration of high-quality, low-emittance electron bunches. Here we explore the interaction of a high-intensity femtosecond laser pulse with a mass-limited dense target to produce MeV attosecond electron bunches in transmission and confirm with three-dimensional simulation that such bunches have low emittance and nano-Coulomb charge. We then perform a large parameter scan from non-relativistic laser intensities to the laser-QED regime and from the critical plasma density to beyond solid density to demonstrate that the electron bunch energies and the laser pulse energy absorption into the plasma can be quantitatively described via the Zero Vector Potential mechanism. These results have wide-ranging implications for future particle accelerator science and associated technologies.

A laser-produced plasma source based on thin-film Gd targets for next-generation extreme ultraviolet lithography

We have studied laser-produced plasma based on mass-limited thin-film Gd targets for beyond the current extreme ultraviolet (EUV) light source of 13.5 nm wavelength based on tin. The influences of the laser intensity on the emission spectra centered around 6.7 nm from thin-film Gd targets were first investigated. It is found that the conversion efficiency of the produced plasma is saturated when the laser intensity goes beyond 2 × 1011 W cm−2. We have systematically compared the emission spectra of the laser-produced plasma with the changes in the thicknesses of the thin-film Gd targets. It is proved that a minimum-mass target with a thickness of 400 nm is sufficient to provide the maximum conversion efficiency, which also implies that this thickness is the ablation depth for the targets. These findings should be helpful in the exploration of next-generation EUV sources, as the thin-film Gd targets will reduce the debris during the plasma generation process compared with the bulk targets.

Generation of single attosecond relativistic electron bunch from intense laser interaction with a nanosphere

Ultrahigh-intensity laser-plasma physics provides unique light and particle beams as well as novel physical phenomena. A recently available regime is based on the interaction between a relativistic intensity few-cycle laser pulse and a sub-wavelength-sized mass-limited plasma target. Here, we investigate the generation of electron bunches under these extreme conditions by means of particle-in-cell simulations. In a first step, up to all electrons are expelled from the nanodroplet and gain relativistic energy from time-dependent local field enhancement at the surface. After this ejection, the electrons are further accelerated as they copropagate with the laser pulse. As a result, a few, or under specific conditions isolated, pC-class relativistic attosecond electron bunches are generated with laser pulse parameters feasible at state-of-the-art laser facilities. This is particularly interesting for some applications, such as generation of attosecond x-ray pulses via Thomson backscattering.

Mass-limited plasmas heated by laser-driven fast electrons as a powerful source of neutron and hard x-ray radiation

To create a plasma with extreme thermodynamic parameters, we propose to heat with a laser-accelerated fast electron beam a target of a size less than the mean free path of the heating particles. The effect of capture of fast electrons generated in an electrically neutral target due to the action of a self-consistent electrostatic field at its boundaries allows us to volumetrically heat a target over multiple flights of fast electrons through it. Using such a heating mode enables control of the target mass to be significantly less than the mass stopping range of the heating particles. Heating a mass-limited target by laser-driven relativistic electrons can produce a plasma with a temperature of ∼10’s keV and a density close to its initial solid-state density. Such plasma objects are expected to serve as powerful sources of neutron and hard x-ray radiation.

Relativistic mid-wavelength infrared pulses generated in intense-laser mass-limited target interactions

Infrared spectroscopy, ultra-fast x-ray high harmonic generation, and time-resolved imaging of molecular structures benefit from the availability of intense mid-infrared wavelength pulses. Here we present a new approach to generating these, in which an intense short laser pulse is incident upon a near-critical density, spherical, mass-limited carbon target. After the laser pulse interaction, the carbon ions produced form a central force field. Plasma electrons accelerated by the laser return to the positively charged carbon target under the action of this field. The energy of these electrons is reduced and is lower than their energy in the laser field. These low-energy refluxing electrons start to oscillate with a rotating figure-of-eight motion around the positively charged carbon target and emit relativistically intense mid-infrared pulses with the wavelength in the range 1 to 4 μm.

Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source

This article presents the calculation results on the conversion efficiency (CE) of 1.064 μm laser-produced plasmas (LPPs) extreme-ultraviolet (EUV) tin (Sn) light sources with the Gaussian and a triangular-flat-topped like laser pulse temporal shapes. The computational model includes a collisional-radiative model and 1D hydrodynamics code that predicts reported experimental and theoretical results on the CE of 1.064 μm and 10.6 μm LPP EUV sources with the planar and mass-limited spherical Sn targets. The calculations for the case of a spherical target reveal that an optimum triangular-flat-topped like laser pulse generates a higher CE compared to the Gaussian pulse, especially, for the longer laser pulse duration than ≈ 30 ns. The study demonstrated that a rising intensity rate of the laser pulse has a vital role to optimize the CE as well as to prolong the in-band (13.5 ± 0.135 nm) spectral emission of a small Sn spherical target. The model predicts a ≈ 30 ns rising time duration for a linearly increasing intensity of triangular-flat-topped 1.064 μm laser pulse is necessary to obtain a maximum CE with a typical ≈ 40 μm diameter liquid Sn droplet.

Proton acceleration due to laser plasma interactions from mass-limited spherical targets

The proton acceleration processes involved in the interaction of an ultrashort circularly polarized laser with a near-critical density spherical target are investigated in this paper using three dimensional particles in cell simulations. Both the target size and the target density are varied to understand their influence on the accelerated beam of protons. The target is efficiently heated by relativistic transparency, and a complicated interplay is observed between the participating interaction processes. The electron heating and recirculations help in the formation of shocks which exert a further push to the protons accelerated by the electrostatic sheath formed due to the ponderomotive force. A maximum peak proton energy of about 40 MeV is observed, which is the result of the cumulative effects of various acceleration mechanisms. Electron jets are observed in the forward laser direction for the larger target size, which suppresses the energy of the proton beams.

Laser- and cryogenic probe-assisted NMR enables hypersensitive analysis of biomolecules at submicromolar concentration

Solution-state NMR typically requires 100 μM to 1 mM samples. This limitation prevents applications to mass-limited and aggregation-prone target molecules. Photochemically induced dynamic nuclear polarization was adapted to data collection on low-concentration samples by radiofrequency gating, enabling rapid 1D NMR spectral acquisition on aromatic amino acids and proteins bearing aromatic residues at nanomolar concentration, i.e., a full order of magnitude below other hyperpolarization techniques in liquids. Both backbone H1-C13 and side-chain resonances were enhanced, enabling secondary and tertiary structure analysis of proteins with remarkable spectral editing, via the 13C PREPRINT pulse sequence. Laser-enhanced 2D NMR spectra of 5 μM proteins at 600 MHz display 30-fold better S/N than conventional 2D data collected at 900 MHz. Sensitivity enhancements achieved with this technology, denoted as low-concentration photo-CIDNP (LC-photo-CIDNP), depend only weakly on laser intensity, highlighting the opportunity of safer and more cost-effective hypersensitive NMR applications employing low-power laser sources.

Femtosecond laser-induced damage threshold in snow micro-structured targets

Enhanced acceleration of protons to high energy by relatively modest high power ultra-short laser pulses, interacting with snow micro-structured targets was recently proposed. A notably increased proton energy was attributed to a combination of several mechanisms such as localized enhancement of the laser field intensity near the tip of $1~\unicode[STIX]{x03BC}\text{m}$ size whisker and increase in the hot electron concentration near the tip. Moreover, the use of mass-limited target prevents undesirable spread of absorbed laser energy out of the interaction zone. With increasing laser intensity a Coulomb explosion of the positively charged whisker will occur. All these mechanisms are functions of the local density profile and strongly depend on the laser pre-pulse structure. To clarify the effect of the pre-pulse on the state of the snow micro-structured target at the time of interaction with the main pulse, we measured the optical damage threshold (ODT) of the snow targets. ODT of $0.4~\text{J}/\text{cm}^{2}$ was measured by irradiating snow micro-structured targets with 50 fs duration pulses of Ti:Sapphire laser.

Role of target thickness in proton acceleration from near-critical mass-limited plasmas

The role played by the target thickness in generating high energetic protons by a circularly polarized laser from near-critical mass-limited targets (MLT) has been investigated with the help of three-dimensional (3D) particle-in-cell (PIC) simulations. The radiation pressure accelerates protons from the front side of the target. Due to hole boring, the target front side gets deformed resulting in a change in the effective angle of incidence which causes vacuum heating and hence generates hot electrons. These hot electrons travel through the target at an angle with the laser axis and hence get more diverged along transverse directions for large target thickness. The hot electrons form sheath fields on the target rear side which accelerates protons via target normal sheath acceleration (TNSA). It is observed that the collimation of radiation pressure accelerated protons gets degraded on reaching the target rear side due to TNSA. The effect of transverse hot electron recirculations gets suppressed and the energetic protons get highly collimated on decreasing target thickness as the radiation pressure acceleration (RPA) starts dominating the acceleration process.

Laser ion acceleration from mass-limited targets with preplasma

The interaction of high intensity laser radiation with mass-limited target exhibits significant enhancement of the ion acceleration when the target is surrounded by an underdense plasma corona, as seen in numerical simulations. The self-generated quasistatic magnetic field squeezes the corona causing the intensification of a subsequent Coulomb explosion of the target. The electric field intensification at the target edges and plasma resonance effects results in the generation of characteristic density holes and further contributes to the ion acceleration.

Extending the path for efficient extreme ultraviolet sources for advanced nanolithography

Developing efficient light sources for extreme ultraviolet (EUV) lithography is one of the most important problems of high volume manufacturing (HVM) of the next generation computer chips. Critical components of this technology are continued to face challenges in the demanding performance for HVM. Current investigations of EUV and beyond EUV (BEUV) community are focused on the dual-pulse laser produced plasma (LPP) using droplets of mass-limited targets. Two main objectives as well as challenges in the optimization of these light sources are related to enhancement of the conversion efficiency (CE) of the source and increase components lifetime of the collector optical system. These require significant experimental and computer simulation efforts. These requirements call for fine detail analysis of various plasma physics processes involved in laser target interactions and their effects on source optimization. We continued to enhance our comprehensive HEIGHTS simulation package and upgrade our CMUXE laboratories to study and optimize the efficiency of LPP sources. Integrated modeling and experimental research were done to both benchmark simulation results and to make projections and realistic predictions of the development path for powerful EUVL devices for HVM requirements. We continued the detail analysis of dual-pulse laser systems using various laser wavelengths and delay times between the two pulses. We showed that the efficiency of EUV sources can be improved utilizing the higher harmonics of Nd:YAG laser for the prepulse and the first harmonics for the main pulse, while still having lower efficiency than the combination involving CO2 laser in the range of parameters studied in this case. The differences in optimization process as well as in the source characteristics for two combinations of laser wavelengths were analyzed based on details of atomic and hydrodynamics processes during the evolving plasma plumes.

Effect of electromagnetic pulse transverse inhomogeneity on ion acceleration by radiation pressure

During ion acceleration by radiation pressure, a transverse inhomogeneity of an electromagnetic pulse leads to an off-axis displacement of the irradiated target, limiting the achievable ion energy. This effect is analytically described within the framework of a thin foil target model and with particle-in-cell simulations showing that the maximum energy of the accelerated ions decreases as the displacement from the axis of the target's initial position increases. The results obtained can be applied to the optimization of ion acceleration by the laser radiation pressure with mass-limited targets.

Betatron-like resonance in ultra-intense laser mass-limited foil interaction

With the help of three-dimensional particle-in-cell simulations, we study the electron dynamics in radiation pressure acceleration of a mass-limited foil target. When a mass-limited foil is irradiated by a circularly polarized laser pulse, the wing parts of the laser overtake the foil from the foil boundaries. In the laser propagation direction, electrons are significantly accelerated by the laser radiation pressure. In the laser polarization direction, electrons are subjected to a strong radial space-charge force and oscillate in the overtaking laser field. Under their combined actions, electrons execute a betatron-like oscillation and a spatially helix electron bunch is thus formed. A simple analytical model is proposed for interpreting the high electron energies and large oscillating amplitudes. It is shown that, when the electron oscillation frequency coincides with the laser frequency as witnessed by the electron, betatron-like resonance occurs, resulting in hundreds of MeV electron generation.

Bright Betatronlike X Rays from Radiation Pressure Acceleration of a Mass-Limited Foil Target

By using multidimensional particle-in-cell simulations, we study the electromagnetic emission from radiation pressure acceleration of ultrathin mass-limited foils. When a circularly polarized laser pulse irradiates the foil, the laser radiation pressure pushes the foil forward as a whole. The outer wings of the pulse continue to propagate and act as a natural undulator. Electrons move together with ions longitudinally but oscillate around the latter transversely, forming a self-organized helical electron bunch. When the electron oscillation frequency coincides with the laser frequency as witnessed by the electron, betatronlike resonance occurs. The emitted x rays by the resonant electrons have high brightness, short durations, and broad band ranges which may have diverse applications.

Laser-driven collimated tens-GeV monoenergetic protons from mass-limited target plus preformed channel

Proton acceleration by ultra-intense laser pulse irradiating a target with cross-section smaller than the laser spot size and connected to a parabolic density channel is investigated. The target splits the laser into two parallel propagating parts, which snowplow the back-side plasma electrons along their paths, creating two adjacent parallel wakes and an intense return current in the gap between them. The radiation-pressure pre-accelerated target protons trapped in the wake fields now undergo acceleration as well as collimation by the quasistatic wake electrostatic and magnetic fields. Particle-in-cell simulations show that stable long-distance acceleration can be realized, and a 30 fs monoenergetic ion beam of >10 GeV peak energy and <2° divergence can be produced by a circularly polarized laser pulse at an intensity of about 1022 W/cm2.

Enhancing extreme ultraviolet photons emission in laser produced plasmas for advanced lithography

Current challenges in the development of efficient laser produced plasma sources for the next generation extreme ultraviolet lithography (EUVL) are increasing EUV power and maximizing lifetime and therefore, reducing cost of devices. Mass-limited targets such as small tin droplets are considered among the best choices for cleaner operation of the optical system because of lower mass of atomic debris produced by the laser beam. The small diameter of droplets, however, decreases the conversion efficiency (CE) of EUV photons emission, especially in the case of CO2 laser, where laser wavelength has high reflectivity from the tin surface. We investigated ways of improving CE in mass-limited targets. We considered in our modeling various possible target phases and lasers configurations: from solid/liquid droplets subjected to laser beam energy with different intensities and laser wavelength to dual-beam lasers, i.e., a pre-pulse followed by a main pulse with adjusted delay time in between. We studied the dependence of vapor expansion rate, which can be produced as a result of droplet heating by pre-pulse laser energy, on target configuration, size, and laser beam parameters. As a consequence, we studied the influence of these conditions and parameters on the CE and debris mass accumulation. For better understanding and more accurate modeling of all physical processes occurred during various phases of laser beam/target interactions, plasma plume formation and evolution, EUV photons emission and collection, we have implemented in our heights package state-of-the art models and methods, verified, and benchmarked against laboratory experiments in our CMUXE center as well as various worldwide experimental results.

Development of laser-produced plasma sources for extreme ultraviolet lithography

The current status of laser-produced plasma source develop- ment for extreme ultraviolet lithography is reviewed. The advantages of using Sn as a fuel for 13.5 nm are discussed as is the rationale for using Nd:YAG prepulses followed by CO2 irradiation of mass-limited Sn droplet targets. To date CEs of around 6% have been obtained in the laboratory while much lower values closer to 2% have been achieved in high repetition rate industrial sources suitable for use in high-volume manufacturing (HVM). The discrepancy appears largely to arise from the mismatch between the effective target lifetime and pulse duration as well as incomplete vaporization or fragmentation of the droplets. Improvements in laser technology and droplet delivery systems should see a marked improvement in the near future, so that CEs of 5% to 6% should eventually be realized in industrial sources. To keep pace with Moore's law, development work has begun on sources operating at 6.x nm, the wavelength selected for lithography beyond 13.5 nm. It is shown that Gd plasmas with an electron temperature close to 110 eV will provide the solution at this wavelength and the strongest lines ocurring in a Gd plasma are identified. © 2012 Society of Photo-Optical Instru-

A Model for Extreme Ultraviolet Radiation Conversion Efficiency From Laser Produced Mass-Limited Tin-Based Droplet Target Plasmas

Simple arguments are used to construct a model to explain the extreme ultraviolet radiation conversion efficiency (EUV-CE) of a tin-based droplet target laser produced plasmas by calculating the laser absorption efficiency, radiation efficiency, and spectral efficiency. The dependence of drive laser pulse duration and laser intensity on EUV-CE is investigated. The results show that at some appropriate laser intensity, where the sum energy of the thermal conduction, out-off band radiation and plasma plume kinetic losses is at a minimum, the EUV-CE should reach a maximum. The EUV-CE predicted by the present simple model is also compared with the available experimental and simulation data and a fair agreement between them is found.

Compact cryogenic source of periodic hydrogen and argon droplet beams for relativistic laser-plasma generation

We present a cryogenic source of periodic streams of micrometer-sized hydrogen and argon droplets as ideal mass-limited target systems for fundamental intense laser-driven plasma applications. The highly compact design combined with a high temporal and spatial droplet stability makes our injector ideally suited for experiments using state-of-the-art high-power lasers in which a precise synchronization between the laser pulses and the droplets is mandatory. We show this by irradiating argon droplets with multi-terawatt pulses.