ABSTRACT Land subsidence can be observed with time-series of Interferometric Synthetic Aperture Radar (InSAR) data. However, existing approaches only reveal subsidence signals that are multi-scale mixed, which is not conducive to the systematic analysis of subsidence of different mechanisms. A deformation signal decomposition (DSD) method based on spectral analysis is used to decompose the deformation extracted by time-series InSAR into three classes of deformation signals. They refer to large-scale deformation related to geological settings, medium-scale deformation caused more by group excavation, and small-scale deformation along linear infrastructures. TerraSAR-X datasets for Shanghai spanning April 2013 to September 2020, and Sentinel-1A datasets spanning January 2016 to September 2020 are used in this study. The results were cross-verified between the TerraSAR-X and Sentinel-1A datasets, and validated against levelling measurements. Subsidence signals caused by different mechanisms were automatically decomposed, which facilitates a systematic analysis for targeted diagnosis of land subsidence signals. A detailed analysis was conducted jointly at three scales of surface displacement, geological conditions, major construction activities, and subsidence mechanisms. It indicated that construction activities were the leading cause of land subsidence, and suggests that local authorities that wish to mitigate surface subsidence may benefit from primarily considering this process.