To tune high-frequency properties, NiFe films are fabricated on triangular wave-like surface of Al2O3 substrate by magnetron sputtering. Faceting, the transformation of a planar surface into two or more surfaces, can be observed on m-plane Al2O3 substrate via annealing process and further format the continuous periodic triangular wave-like structure. The wavelength and oscillation can be adjusted by annealing temperature and time. The magnetic anisotropy field (Hk) of the magnetic film is increased to 320 Oe and the resonance frequency (fr) also has a big improvement to 5.4 GHz. These changes are mainly attributed to the dipolar interaction between surface magnetic charges in the studied system. We prove that high-frequency properties of the soft magnetic film can be controlled by designing a nanoscale periodic triangular wave-like morphology on film surface.