Thick CdZnTe epitaxial film is a promising alternative for X-ray detectors, especially in the case of large-area imaging application. One of the key issues in growing thick heteroepitaxial film with high crystallinity is to reduce the mismatch dislocations that appear at the interface between CdZnTe epilayer and the substrate. In this paper, we prepared CdZnTe films without and with ZnTe buffer layers on GaSb (001) substrates by the closed space sublimation. All preparation conditions for ZnTe buffer layers, CdZnTe epilayers on ZnTe buffers and GaSb substrates, as well as the pretreatment of GaSb surface have been optimized through tremendous experiments. The results of electron backscatter diffraction and transmission electron microscope observation prove that ZnTe buffer layers suppress (1‾1‾1)M twins extending from GaSb. The deposition temperature for inserting ZnTe buffer about 495 K is optimized for getting smooth ZnTe surface, on which high crystalline quality CdZnTe epilayer with a narrower full-width at half-maximum (85 arcsec) of double crystal X-ray rocking curve for (004) reflection and lower intensity ratio IDcomplex/I(D0, h) of low-temperature photoluminescence spectroscopy were produced.