Different methods (optical, laser, and electron microscopy) used to compare of the structural features of the near-surface layers of single-crystal lithium niobate plates with a predetermined distribution of impurities along its length and lithium niobate from Crystal Technology (USA). Investigation of optical characteristics (refractive index and depth of planar waveguide) was performed using the method of mode spectroscopy, and also the obtained characteristics were compared with the parameters sample of Crystal Technology. It is shown that the characteristics of planar proton-exchange waveguides are very similar in their values to each other. However, the state of the near-surface layers of the investigated single-crystal lithium niobate plates with a predetermined distribution of impurities along its length is significantly different from the quality of the plates produced by Crystal Technology. The investigated samples of lithium niobate with a predetermined distribution of impurities along its length contain many scratches and points defects on the surface, as well as defective near-surface layer with a depth of 15 μm, which is significantly worse than sample produced by Crystal Technology. It is impossible to use such lithium niobate plates in the manufacture of integral optics elements (channel waveguides, electrodes). Multiple surface defects will significantly reduce the quality of structures, up to their complete rejection.