Silicon has a theoretical capacity about 10 times that of graphite, so it is expected to be one of the next-generation anode materials to further increase the capacity of batteries. However, silicon has a large volume change during charging and discharging, which result in poor cyclability. Although morphological change of silicon has been shown in a lot of previous studies, most of them are ex-situ observations using electron microscopes such as SEM and are two-dimensional observations1). Moreover, many previous studies target liquid battery. It is necessary to understand the expansion and shrinkage mechanism of silicon to improve all-solid-state battery performance using silicon anode. Synchrotron X-ray computed tomography (X-ray CT) is a technique that can measure the internal structure of a battery in three dimensions with micrometer-order spatial resolution in a short time. In addition, operando X-ray CT measurement is possible under charging and discharging in an all-solid-state battery2). In this study, we analyzed that morphological changes of silicon during charging and discharging by operando X-ray CT measurements.We used LiNi1/3Co1/3Mn1/3O2 (NCM), Li6PS5Cl (LPSCl) and acetylene black (AB), which were mortar-mixed in a mass ratio of 1:1:0.1 as the cathode composite material, and Si, LPSCl and AB in a mass ratio of 1:2.78:0.42 as anode composite material. Si|LPSCl|NCM all-solid-state cells were assembled. X-ray CT measurements at SPring-8 BL20XU using 20 keV X-rays while performing constant current charge/discharge measurement at 2.3×10-3 A cm-2. The pixel resolution was 0.5 µm. A silicon particle was extracted from the X-ray CT images obtained from X-ray CT measurements to observe the morphological changes of silicon during charging and discharging reaction. Then, change of the silicon volume and the contact area fraction of silicon particle and LPSCl solid electrolyte were calculated.Volume expansion was observed with lithiation of silicon and volume shrinkage with delithiation of silicon. As the lithiation process, silicon density decreased, and silicon was observed to be darker. As the delithiation process, cracks appeared in the silicon particle as the expanded silicon shrank. In addition, the silicon/solid electrolyte interface changed so that the silicon formed shell voids at the surface of silicon particles. This indicates that the plasticity of the LPSCl solid electrolyte cannot follow the form change of the interface. However, shell voids in the interface were formed for all directions, but some parts remained in contact area between the silicon particle and the solid electrolyte. After the second cycle of lithiation, cracks in the particle and the voids in the interface between the silicon particle and the solid electrolyte that had been formed due to the shrinkage of silicon as the delithiation disappeared by the re-lithiation. However, the re-delithiation caused cracks in the particle in the same area and formed shell voids in the interface again. Moreover, as the second delithiation process, the number of cracks in the particle increased compared with that as the first delithiation. This suggests that the number of cracks in the particle increases as silicon repeated lithiation and delithiation, and so silicon is miniaturized. In addition, a correlation was confirmed between the silicon volume change and the contact area fraction change. After the first cycle, the volume didn’t return to pristine silicon volume and the contact area fraction was reduced compared to pristine silicon. The isolation of the silicon particle from the solid electrolyte interface is suggested to be one of the factors causing the poor cycle performance because of the lithium ion reaction path is limited.1) T. Li, J. Y. Yang, S.G. Lu, H. Wang and H. Y. Ding, Rare Metals, 32, 299-304 (2013).2) Y. Sakka, H. Yamashige, A. Watanabe, A. Takeuchi, M. Uesugi, K. Uesugi and Y. Orikasa, J. Mater. Chem. A, 10, 16602–16609 (2022).