AlGaN/GaN high-electron-mobility transistor structures grown on 100 mm high-resistivity Si(111) substrates using plasma-assisted molecular beam epitaxy are reported. The two-dimensional electron gas (2DEG) formation in the heterostructures was realized by the growth optimization of two-step low temperature and high temperature AlN layers and GaN buffer layer. High-electron mobility of 1100 cm2/V s with a sheet carrier density of 9×1012 cm−2 was achieved. The presence of 2DEG in the AlGaN/GaN interface was confirmed by temperature dependent Hall measurements and capacitance-voltage carrier profiling. The fabricated 1.5 μm gate length high electron mobility transistor exhibited a maximum drain current density of 530 mA/mm and a peak extrinsic transconductance of 156 mS/mm.
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