In order to measure the surface temperature of aerospace hot-end components accurately, AlN thin film temperature measurement technology was explored. In this research, C-axis preferred orientation AlN thin film was deposited on Ni-based superalloy substrates by medium frequency (MF) reaction magnetron sputtering. Effect of temperature on the lattice structure of AlN thin film was studied. X-ray diffraction results show that the diffraction angles (2 θ ) of AlN thin films shift to the left side monotonously with the increase of annealing temperature and annealing time. Based on this phenomenon, the maximum temperature experienced by the film can be deduced according to 2 θ values. A temperature interpretation algorithm equation was established with MATLAB. The algorithm is a binary linear equation, whose dependent variable is 2 θ and the independent variables are annealing temperature and annealing time. Then, temperature interpretation software was developed with Visual Studio 2019. The temperature interpretation range is 700–1200 °C and the relative interpretation error is less than 4.26%.