The goal of this study is to investigate the dosimetric properties of a Semiflex three-dimensional (3D) chamber in an unflatten beam and compare its data from a small to a large field flattening filter-free (FFF) beam with different radiation detectors. The sensitivity, linearity, reproducibility, dose rate dependency, and energy dependence of a Semiflex 3D detector in flattening filter and filter-free beam were fully investigated. The minimum radiation observed field widths for all detectors were calculated using lateral electronic charged particle equilibrium to investigate dosimetric characteristics such as percentage depth doses (PDDs), profiles, and output factors (OPFs) for Semiflex 3D detector under 6FFF Beam. The Semiflex 3D measured data were compared to that of other detectors employed in this study. The ion chamber has a dosage linearity deviation of +1.2% for <10 MU, a dose-rate dependency deviation of +0.5%, and significantly poorer sensitivity due to its small volume. There is a difference in field sizes between manufacturer specs and derived field sizes. The measured PDD, profiles, and OPFs of the Semiflex 3D chamber were within 1% of each other for all square field sizes set under linac for the 6FFF beam. It was discovered to be an appropriate detector for relative dose measurements for 6 FFF beams with higher dose rates for field sizes more than or equal to 3 cm × 3 cm.
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