Laser-induced Periodic Surface Structures Orientation Research Articles

Femtosecond Laser-Induced Periodic Surface Structures in Titanium-Doped Diamond-like Nanocomposite Films: Effects of the Beam Polarization Rotation.

We study the properties of laser-induced periodic surface structures (LIPSS) formed on titanium-doped diamond-like nanocomposite (DLN) a-C:H:Si:O films during ablation processing with linearly-polarized beams of a visible femtosecond laser (wavelength 515 nm, pulse duration 320 fs, pulse repetition rates 100 kHz-2 MHz, scanning beam velocity 0.05-1 m/s). The studies are focused on (i) laser ablation characteristics of Ti-DLN films at different pulse frequencies and constant fluence close to the ablation threshold, (ii) effects of the polarization angle rotation on the properties of low spatial frequency LIPSS (LSFL), and (iii) nanofriction properties of the 'rotating' LIPSS using atomic force microscopy (AFM) in a lateral force mode. It is found that (i) all LSFL are oriented perpendicular to the beam polarization direction, so being rotated with the beam polarization, and (ii) LSFL periods are gradually changed from 360 ± 5 nm for ripples parallel to the beam scanning direction to 420 ± 10 nm for ripples formed perpendicular to the beam scanning. The obtained results are discussed in the frame of the surface plasmon polaritons model of the LIPSS formation. Also, the findings of the nanoscale friction behavior, dependent on the LIPSS orientation relative to the AFM tip scanning direction, are presented and discussed.

Fabricating Femtosecond Laser-Induced Periodic Surface Structures with Electrophysical Anisotropy on Amorphous Silicon.

One-dimensional periodic surface structures were formed by femtosecond laser irradiation of amorphous hydrogenated silicon (a-Si:H) films. The a-Si:H laser processing conditions influence on the periodic relief formation as well as correlation of irradiated surfaces structural properties with their electrophysical properties were investigated. The surface structures with the period of 0.88 and 1.12 μm were fabricated at the laser wavelength of 1.25 μm and laser pulse number of 30 and 750, respectively. The orientation of the surface structure is defined by the laser polarization and depends on the concentration of nonequilibrium carriers excited by the femtosecond laser pulses in the near-surface region of the film, which affects a mode of the excited surface electromagnetic wave which is responsible for the periodic relief formation. Femtosecond laser irradiation increases the a-Si:H films conductivity by 3 to 4 orders of magnitude, up to 1.2 × 10−5 S∙cm, due to formation of Si nanocrystalline phase with the volume fraction from 17 to 28%. Dark conductivity and photoconductivity anisotropy, observed in the irradiated a-Si:H films is explained by a depolarizing effect inside periodic microscale relief, nonuniform crystalline Si phase distribution, as well as different carrier mobility and lifetime in plane of the studied samples along and perpendicular to the laser-induced periodic surface structures orientation, that was confirmed by the measured photoconductivity and absorption coefficient spectra.

Formation of the Submicron Oxidative LIPSS on Thin Titanium Films During Nanosecond Laser Recording.

Laser-induced periodic surface structures (LIPSSs) spontaneously appearing on the laser-treated (melted or evaporated) surfaces of bulk solid materials seem to be a well-studied phenomenon. Peculiarities of oxidative mechanisms of LIPSS formation on thin films though are far less clear. In this work, the appearance of oxidative LIPSSs on thin titanium films was demonstrated under the action of commercially available nanosecond-pulsed Yb-fiber laser. The temperature and energy regimes favoring their formation were revealed, and their geometric characteristics were determined. The period of these LIPSSs was found to be about 0.7 λ, while the modulation depth varied between 70 and 110 nm, with high stability and reproducibility. It was shown that LIPSS orientation is rather easily manageable in the regimes of our interest, which could provide a way of controlling their properties.

Influence of Femtosecond Laser Surface Nanotexturing on the Friction Behavior of Silicon Sliding Against PTFE.

The aim of the present work was to investigate the influence of laser-induced periodic surface structures (LIPSS) produced by femtosecond laser on the friction behavior of silicon sliding on polytetrafluoroethylene (PTFE) in unlubricated conditions. Tribological tests were performed on polished and textured samples in air using a ball-on-flat nanotribometer, in order to evaluate the friction coefficient of polished and textured silicon samples, parallel and perpendicularly to the LIPSS orientation. In the polished specimens, the friction coefficient decreases with testing time at 5 mN, while it increases slightly at 25 mN. It also decreases with increasing applied load. For the textured specimens, the friction coefficient tends to decrease with testing time in both sliding directions studied. In the parallel sliding direction, the friction coefficient decreases with increasing load, attaining values similar to those measured for the polished specimen, while it is independent of the applied load in the perpendicular sliding direction, exhibiting values lower than in the two other cases. These results can be explained by variations in the main contributions to friction and in the wear mechanisms. The influence of the temperature increase at the interface and the consequent changes in the crystalline phases of PTFE are also considered.

Manipulation of LIPSS orientation on silicon surfaces using orthogonally polarized femtosecond laser double-pulse trains.

Laser-induced periodic surface structures (LIPSS) provide an easy and cost-effective means of fabricating gratings and have been widely studied in recent decades. To overcome the challenge of orientation controllability, we developed a feasible and efficient method for manipulating the orientation of LIPSS in real time. Specifically, we used orthogonally polarized and equal-energy femtosecond laser (50 fs, 800 nm) double-pulse trains with time delay about 1ps, total peak laser fluence about 1.0 J/cm2, laser repetition frequency at 100 Hz and scanning speed at 150 μm/s to manipulate the LIPSS orientation on silicon surfaces perpendicular to the scanning direction, regardless of the scanning paths. The underlying mechanism is attributed to the periodic energy deposition along the direction of surface plasmon polaritons (SPPs), which can be controlled oriented along the scanning direction in orthogonally polarized femtosecond laser double-pulse trains surface scan processing. An application of structural colors presents the functionality of our method.

Controlled growth of periodically aligned copper‐silicide nanocrystal arrays on silicon directed by laser-induced periodic surface structures (LIPSS)

In this paper we introduce a versatile tool for the controlled growth and alignment of copper-silicide nanocrystals. The method takes advantage of a unique self-organization phenomenon denoted as laser-induced periodic surface structures (LIPSS). Copper films (3±0.2nm) are sputter-deposited onto single crystal silicon (100) substrates with a thin oxide layer (4±0.2nm), and subsequently exposed to linearly polarized nanosecond laser pulses (τ≈6ns) at a central wavelength of 532nm. The irradiation triggers dewetting of the Cu film and simultaneous formation of periodic Cu nanowires (LIPSS), which partially penetrate the oxide layer to the Si substrate. These LIPSS act as nucleation centers for the growth of Cu-Si crystals during thermal processing at 500°C under forming gas 95/5 atmosphere. Exemplified by our model system Cu/SiO2/Si, LIPSS are demonstrated to facilitate the diffusion reaction between Cu and underlying Si. Moreover, adjustment of the laser polarization allows us to precisely control the nanocrystal alignment with respect to the LIPSS orientation. Potential applications and conceivable alternatives of this process are discussed.

Orientation of periodic grating structures controlled by double-pulse irradiation

The formation of laser-induced periodic surface structures (LIPSS) is demonstrated on a titanium surface irradiated by a double-pulse beam cross-polarized at time delays from Δτ = 0–1 ps. The first-pulse fluence F1 and the delayed pulse fluence F2 are kept below the formation threshold FTH = 65 mJ/cm2 of the periodic grating structure on Ti. We find that periodic grating structures with LIPSS orientation of 45° relative to both polarizations are produced at delay times of 0 and 120 fs. To control LIPSS orientation, a double-pulse beam with a time delay of 0 fs is demonstrated in which a beam composed of a first pulse maintaining constant fluence of F1 = 70 mJ/cm2 and a delayed pulse varying from F2 = 0–70 mJ/cm2. The LIPSS orientations are in a range of 0°–45° and decrease as the normalized fluence F2/F1 decreases. We find that the orientation of LIPSS produced by double-pulse irradiations is in relatively good agreement with the direction obtained by the vector sum of laser fields \(E_{1}^{4}\) and \(E_{2}^{4}\). This tendency suggests that a multi-photon process at the metal surface might characterize the LIPSS orientation.

Dynamics of the formation of laser-induced periodic surface structures (LIPSS) upon femtosecond two-color double-pulse irradiation of metals, semiconductors, and dielectrics

In order to address the dynamics and physical mechanisms of LIPSS formation for three different classes of materials (metals, semiconductors, and dielectrics), two-color double-fs-pulse experiments were performed on Titanium, Silicon and Fused Silica. For that purpose a Mach–Zehnder interferometer generated polarization controlled (parallel or cross-polarized) double-pulse sequences at 400nm and 800nm wavelength, with inter-pulse delays up to a few picoseconds. Multiple of these two-color double-pulse sequences were collinearly focused by a spherical mirror to the sample surfaces. The fluence of each individual pulse (400nm and 800nm) was always kept below its respective ablation threshold and only the joint action of both pulses lead to the formation of LIPSS. Their resulting characteristics (periods, areas) were analyzed by scanning electron microscopy. The periods along with the LIPSS orientation allow a clear identification of the pulse which dominates the energy coupling to the material. For strong absorbing materials (Silicon, Titanium), a wavelength-dependent plasmonic mechanism can explain the delay-dependence of the LIPSS. In contrast, for dielectrics (Fused Silica) the first pulse always dominates the energy deposition and LIPSS orientation, supporting a non-plasmonic formation scenario. For all materials, these two-color experiments confirm the importance of the ultrafast energy deposition stage for LIPSS formation.

Femtosecond laser-induced periodic surface structure on fused silica surface

Single and 10-pulse laser-induced surface damage behaviors of fused silica were investigated using a linearly polarized 40-fs Ti: sapphire laser system operating at a central wavelength of 800nm. After the sample was subjected to single-shot laser irradiation, it displayed a typically damaged crater, and two types of laser-induced periodic surface structures (LIPSS) on the surface of the damage crater were found under 10-pulse laser irradiation. By increasing the laser fluence, the LIPSS orientation rotated by 90°, and the period changed from 300nm to 700nm. Under near-threshold laser irradiation, an intermittent LIPSS, whose orientation was perpendicular to the laser beam polarization direction and average spatial period was around 300nm, was found on the damaged area. Another type of LIPSS, which was parallel to the laser beam polarization and had a period of approximately 700nm, was continuously formed at the bottom of the ablation crater when the laser fluence exceeded the damage threshold of material. A model based on the theory of interference between the incident laser and the surface scattered wave was adopted to explain the formation mechanism of the LIPSS.

Polarization dependent formation of femtosecond laser-induced periodic surface structures near stepped features

Laser-induced periodic surface structures (LIPSS) are formed near 110 nm-tall Au microstructured edges on Si substrates after single-pulse femtosecond irradiation with a 150 fs pulse centered near a 780 nm wavelength. We investigate the contributions of Fresnel diffraction from step-edges and surface plasmon polariton (SPP) excitation to LIPSS formation on Au and Si surfaces. For certain laser polarization vector orientations, LIPSS formation is dominated by SPP excitation; however, when SPP excitation is minimized, Fresnel diffraction dominates. The LIPSS orientation and period distributions are shown to depend on which mechanism is activated. These results support previous observations of the laser polarization vector influencing LIPSS formation on bulk surfaces.

Laser-induced periodic surface structures formed on the sidewalls of microholes trepanned by a femtosecond laser

Laser-induced periodic surface structures (LIPSSs) were observed on the sidewalls of 300-μm-diameter holes trepanned on cemented tungsten carbide using femtosecond laser pulses at a wavelength of 800 nm. For a circularly polarized beam, LIPSSs were formed at a period of 300 nm and oriented perpendicularly to the plane of incidence on the sidewalls. For a linearly polarized beam, LIPSS formation was dependent on the relative angle α between the polarization direction and the plane of incidence. For relative angles α from 0° to 70° and from 110° to 180°, LIPSS spacing was 300 nm. However, there were two types of LIPSSs coexisting from 70° to 110°. One had a spacing of 120 nm and the other had a spacing that varied from 500 to 760 nm. It was found that the orientation angle of LIPSSs measured between the LIPSS orientation and the plane of incidence had a nonlinear dependence on α. To understand this dependence, a model was proposed in which LIPSSs are assumed to align perpendicularly to the direction of the absorbed electric field lying in the tangent plane of the sidewall of a drilled hole. The calculated results from this model showed good agreement with the experimental results.