Direct Laser Writing Research Articles

Femtosecond Laser Direct-writing Tilted Fiber Bragg Gratings in Multi-core Fiber

Femtosecond Laser Direct-writing Tilted Fiber Bragg Gratings in Multi-core Fiber

Ultracompact 3D Splitter for Single‐Core to Multi‐Core Optical Fiber Connections Fabricated Through Direct Laser Writing in Polymer (Laser Photonics Rev. 18(11)/2024)

Ultracompact 3D Splitter for Single‐Core to Multi‐Core Optical Fiber Connections Fabricated Through Direct Laser Writing in Polymer (Laser Photonics Rev. 18(11)/2024)

Ultra-high precision nano additive manufacturing of metal oxide semiconductors via multi-photon lithography

As a basic component of the versatile semiconductor devices, metal oxides play a critical role in modern electronic information industry. However, ultra-high precision nanopatterning of metal oxides often involves multi-step lithography and transfer process, which is time-consuming and costly. Here, we report a strategy, using metal-organic compounds as solid precursor photoresist for multi-photon lithography and post-sintering, to realize ultra-high precision additive manufacturing of metal oxides. As a result, we gain metal oxides including ZnO, CuO and ZrO2 with a critical dimension of 35 nm, which sets a benchmark for additive manufacturing of metal oxides. Besides, atomic doping can be easily accomplished by including the target element in precursor photoresist, and heterogeneous structures can also be created by multiple multi-photon lithography, allowing this strategy to accommodate the requirements of various semiconductor devices. For instance, we fabricate an ZnO photodetector by the proposed strategy.

3D Printing of Hierarchical Structures Made of Inorganic Silicon-Rich Glass Featuring Self-Forming Nanogratings.

Hierarchical structures are abundant in nature, such as in the superhydrophobic surfaces of lotus leaves and the structural coloration of butterfly wings. They consist of ordered features across multiple size scales, and their advantageous properties have attracted enormous interest in wide-ranging fields including energy storage, nanofluidics, and nanophotonics. Femtosecond lasers, which are capable of inducing various material modifications, have shown promise for manufacturing tailored hierarchical structures. However, existing methods, such as multiphoton lithography and three-dimensional (3D) printing using nanoparticle-filled inks, typically involve polymers and suffer from high process complexity. Here, we demonstrate the 3D printing of hierarchical structures in inorganic silicon-rich glass featuring self-forming nanogratings. This approach takes advantage of our finding that femtosecond laser pulses can induce simultaneous multiphoton cross-linking and self-formation of nanogratings in hydrogen silsesquioxane. The 3D printing process combines the 3D patterning capability of multiphoton lithography and the efficient generation of periodic structures by the self-formation of nanogratings. We 3D-printed micro-supercapacitors with large surface areas and a high areal capacitance of 1 mF/cm2 at an ultrahigh scan rate of 50 V/s, thereby demonstrating the utility of our 3D printing approach for device applications in emerging fields such as energy storage.

A route to an all direct laser written integrated FTS (SWIFTS) in the 3.39–4.1 μm range

This work aims to present the building blocks for an all direct laser written integrated spectrometer in the mid-infrared (3.39–4.1 μm range) based on the SWIFTS (Stationary Wave Integrated Fourier Transform Spectrometer) principle. In a SWIFTS-Gabor configuration, the light from the source interferes with itself in the middle of a channel waveguide, creating a stationary wave. This interferogram is then sampled through scattering centers placed on top of the waveguide that radiate the light they extract onto a detector placed directly on the sample. Finally, the spectrum of the source is retrieved through a Fourier transform. To implement a SWIFTS, two main photonic functions are required: the waveguide and the scattering centers. In this work, both functions have been created using Direct Laser Writing (DLW), a versatile technique, allowing to easily access 3D configurations and to reduce fabrication time. DLW focuses a femtosecond laser onto a sample so as to locally change the crystal lattice, resulting in its structural modification. The waveguides presented here are surface half-circular cladding structures made through type II modifications in the sample, and the scattering centers are surface damage tracks (also referred to as grooves). These surface tracks are creating dielectric discontinuities in the evanescent part of the stationary wave, resulting in the light being radiated outside the waveguide. All of these are made in a z-cut lithium niobate substrate for future implementation of the electro-optic effect. We demonstrate that we have functional waveguides in the mid-IR and that our grooves are extracting the stationary wave as expected, showing promising results for future implementation of a complete mid-IR SWIFTS using DLW.

Unlocking high photosensitivity direct laser writing and observing atomic clustering in glass

The direct laser writing (DLW) of photoluminescent metal clusters is inspiring intensive research in functional glasses. However, understanding the influence of the host structure on cluster formation and visualizing DLW-induced clusters at the atomic scale remains challenging. In this work, we develop a highly photosensitive fluorophosphate glass through fluorine incorporation. The addition of fluorine establishes a conducive environment for Ag+ ions before DLW and enhances the availability of reducing agents and diffusion pathways during DLW. These advantages facilitate the formation of Ag clusters under low-energy single-pulsed DLW. Increasing laser energy results in a combination of Ag clusters and glasses defect, forming a dot + ring photoluminescent pattern. Atom probe tomography (APT), a technique capable of mapping the elemental spatial distribution and identifying clustering, is employed to gain more information on laser-induced clusters. Comparison of APT results between samples without and with DLW reveals the formation of Ag clusters after laser writing. The design concept and characterization enrich the understanding of Ag cluster behavior in glasses. This knowledge opens the possibility of rational design of clusters confined in glasses and inspires their synthesis for various applications.

Introducing phosphoric acid to fluorinated polyimide towards high performance laser induced graphene electrodes for high energy micro-supercapacitors

Micro-supercapacitors (MSCs) have wide application prospects in microelectronic fields such as wearable electronics due to merits of stable performance, high safety and easy integration. However, the relatively low energy density of MSCs limits their practical application. In this context, phosphorus and fluorine co-doped laser-induced graphene (FP-LIG) microelectrodes were fabricated from fluorinated polyimide containing phosphoric acid by laser direct writing (LDW) method. The introduced phosphoric acid slows down the decomposition of –CF3 during the LDW process, resulting in much more ordered and stable pores; meanwhile, phosphorus entered the graphene lattice to replace some carbon atoms, forming a C3PO structure, which not only stabilizes the interface between the electrode and the electrolyte and therefore achieves an enlarged working potential of 1.4 V, but also increases the wettability of the electrode. Using FP-3-LIG microelectrodes and PVA/H2SO4 as the gel electrolyte, the assembled FP-3-MSC demonstrates significantly enhanced energy density, delivering an energy density of 10.40 μWh cm−2 (@0.09 mA cm−2), 2.7 times that of F-MSC and 346.7 times that of MSC. FP-3-MSC has excellent cyclic stability, displaying an areal capacitance retention rate of above 90 % after 10,000 long cycles. In addition, FP-3-MSC demonstrates excellent flexibility, indicating promising potential in the field of flexible wearable electronics.

Advantages of Direct Laser Writing for Enhancing the Resolution of Diffractive Optical Element Fabrication Processes

A technology for direct laser writing of code sequences on modulation disks has been developed and implemented, ensuring high accuracy and reliability in the process of forming structural elements. The main advantages of applying direct laser writing compared to contact lithography for forming submicron-sized elements have been demonstrated. The proposed technology is characterized by high resolution and flexibility in configuring the parameters of the optical recording system, making it suitable for a wide range of applications in micro-optics. Direct optical writing is presented as a promising approach for enhancing the resolution of optical systems used in recording submicron-sized diffractive optical elements, as this technology enables the creation of complex optical structures. Additionally, a detailed classification of current approaches for further increasing the resolution of the optical recording system was conducted, including the application of a saturated absorber layer on the photosensitive surface, the use of a laser beam with intensity modeled by a Bessel function, and the synthesis of photosensitive materials with optimized exposure characteristics, ensuring high efficiency and accuracy in the process of direct laser writing.

Laser Direct Writing of Setaria Virids-Inspired Hierarchical Surface with TiO2 Coating for Anti-Sticking of Soft Tissue.

In minimally invasive surgery, the tendency for human tissue to adhere to the electrosurgical scalpel can complicate procedures and elevate the risk of medical accidents. Consequently, the development of an electrosurgical scalpel with an anti-sticking coating is critically important. Drawing inspiration from nature, we identified that the leaves of Setaria Virids exhibit exceptional non-stick properties. Utilizing this natural surface texture as a model, we designed and fabricated a specialized anti-sticking surface for electrosurgical scalpels. Employing nanosecond laser direct writing ablation technology, we created a micro-nano textured surface on the high-frequency electrosurgical scalpel that mimics the structure found on Setaria Virids leaves. Subsequently, a TiO2 coating was deposited onto the ablated scalpel surface via magnetron sputtering, followed by plasma-induced hydrophobic modification and treatment with octadecyltrichlorosilane (OTS) to enhance the surface's affinity for silicone oil, thereby constructing a self-lubricating and anti-sticking surface. The spreading behavior of deionized water, absolute ethanol, and dimethyl silicone oil on this textured surface is investigated to confirm the effectiveness of the self-lubrication mechanism. Furthermore, the sticking force and quality are compared between the anti-sticking electrosurgical scalpel and a standard high-frequency electrosurgical scalpel to demonstrate the efficacy of the nanosecond laser-ablated micro-nano texture in preventing sticking. The findings indicate that the self-lubricating anti-sticking surface fabricated using this texture exhibits superior anti-sticking properties.

Direct Laser Writing of Micro-Nano Filters Based on Three-Photon Polymerization.

Direct laser writing (DLW) enables the manufacturing of functional quantum dot (QD)-polymer nanostructures with the special performance desired for technological applications. However, most papers fabricate the QD-polymer photoresist based on the principle of two-photon polymerization using laser wavelengths of 750-800 nm, which cannot effectively fabricate the near-infrared QD-polymer photoresist with absorption wavelengths above 800 nm due to linear absorption. Moreover, most papers report a relatively low doping concentration of QDs. To address these issues, this study introduces three-photon DLW technology using a near-infrared 1035 nm laser to effectively avoid the linear absorption of the near-infrared PbS/CdS QD-polymer photoresist. Three kinds of QD-polymer photoresists with concentrations up to 150 mg mL-1 are prepared through surface modification of QDs. We demonstrate that three-photon DLW is feasible to fabricate high-concentration QD-polymer photoresist to produce micro/nano high-performance QD-polymer filters of visible and near-infrared light absorption. This study provides materials and process guidance for the fabrication and application of visible and near-infrared optical filters through three-photon DLW processing of various kinds of functional nanoparticles-polymer photoresist.

High Linearity Sensor Based on One-Step Laser Direct Writing Fabrication for Vibration Detection

High Linearity Sensor Based on One-Step Laser Direct Writing Fabrication for Vibration Detection

Bio‐Inspired Hybrid Laser Direct Writing of Interfacial Adhesion for Universal Functional Coatings

AbstractEnhancing interfacial adhesion between functional coatings and target surfaces facilitates long‐term stable service by mitigating interferences of mechanical mismatches. Design of mechanical interlocks affords an effective strategy to strengthen the interfacial bonding with durability and compatibility, but the in‐depth investigations are still lacked. Herein, a gecko‐inspired hierarchical strategy realized by hybrid laser direct writing is proposed, which incorporates an armored frame scale for surface protection and a riveted anchor scale for interlocks. Such dual‐scale configurations endow the functional coatings with the stronger adhesion to the targets than the pristine and mono‐scale cases, resulting in 2 orders of magnitude enhancement resistant to tape peeling tests. Utilizing this scheme, a laser‐induced integrated deicing system is in situ manufactured on thermoplastics, primarily comprising superhydrophobic structures, carbon‐based sensors as well as adhesive copper (Cu) interconnects and heaters, where Cu‐based devices exhibit superior resistance to water impacts and stress fatigue. Interfacing with signal processing modules, such an all‐in‐one system demonstrates real‐time temperature monitoring and high efficiency in deicing (4.24 folds faster than the control group). The facile route for intensified adhesion holds promise in the interfaces within advanced equipment and under harsh scenarios.

Eight-wavelength-switchable single-frequency fiber laser with scattering-enhanced fiber-based wavelength self-adaptive linewidth compression

We demonstrate an eight-wavelength-switchable single-frequency (SF) ultra-narrow linewidth erbium-doped fiber laser (EDFL). A switchable polarization-dependent eight-channel filter (S-PDECF), fabricated using femtosecond laser direct-writing technology, determines the eight wavelengths of the laser output, with four channels concentrated near 1530 nm and the other four near 1550 nm. A dual-coupler ring-based compound-cavity filter is utilized to achieve single-longitudinal-mode selection for the EDFL. The introduction of a femtosecond laser direct-written scattering-enhanced fiber (SEF) effectively narrows the laser linewidth, enabling ultra-narrow linewidth outputs lasing at all eight wavelengths, and the wavelength self-adaptive linewidth compression of the SEF is verified for the first time. Furthermore, the incorporation of SEF significantly enhances the overall performance of the EDFL. The eight switchable single-wavelength laser outputs all exhibit exceptional characteristics, including spectral wavelength fluctuations of ≤0.011 nm, spectral peak power fluctuations of ≤0.54 dB, optical signal-to-noise ratios of ≥71 dB, linewidths of ≤248 Hz, output power fluctuations of ≤0.252 dB over a 10-min measurement period, and relative intensity noise of ≤−150.17 dB/Hz @≥ 3 MHz.

Multiphoton Lithography of Interpenetrating Polymer Networks for Tailored Microstructure Thermal and Micromechanical Properties.

Multiphoton lithography (MPL), an emerging truly 3D microfabrication technique, exhibits substantial potential in biomedical applications, including drug delivery and tissue engineering. Fabricated micro-objects are often expected to undergo shape morphing or bending of the entire structure or its parts. Furthermore, ensuring precise property tuning is detrimental to the realization of the functionality of MPL microstructures. Herein, novel MPL materials based on interpenetrating polymer networks (IPNs) are presented that effectively combine the advantages of acrylate and epoxy systems. IPNs with varying component ratios are investigated for their microfabrication performance and structural integrity with respect to thermal and micromechanical properties. A variety of high-resolution techniques is applied to comprehensively evaluate IPN properties at the bulk, micron, and segmental levels. This study shows that the MPL laser scanning velocity and power, photoinitiator content, and multi-step exposure can be used to tune the morphology and properties of the IPN. As a result, a library of 3D MPL IPN microstructures with high 3D structural stability and tailored thermal and micromechanical properties is achieved. New IPN microstructures with Young's moduli of 3-4MPa demonstrate high-to-fully elastic responses to deformations, making them promising for applications in morphable microsystems, soft micro-robotics, and cell engineering.

Silica‐Rich Sol‐Gel Ink for Two‐Photon Direct Laser Writing of Microscale Structures and Optical Elements

AbstractInnovative materials enable two‐photon polymerization for precise additive fabrication of intricate optical components. Existing polymeric inks suffer from poor optical performance due to their high organic content. Silica‐rich sol‐gel ink (75 wt%, under ambient conditions) is presented for high‐precision three‐dimensional (3D) printing of microscale structures and optical devices. A photoinitiator with high‐efficiency nonlinear absorption is introduced to initiate two‐photon polymerization. Utilizing a commercial direct laser writing system, 3D‐printing is demonstrated including the optimization of printing parameters and ink characterization. The optical performance of the printed microscale elements using the new sol‐gel ink surpasses commercially available polymeric inks on key metrics: Printed elements exhibit extremely low surface roughness, 3nm; visible and near‐IR light transmission is greater than 90%; Printed elements present enhanced mechanical and chemical resistance to common organic solvents; Structures exhibit low isotropic shrinkage, <10%; Elements withstand continuous‐wave laser intensities exceeding 7 × 105 W cm−2. Direct writing onto an optical fiber tip with no need for surface functionalization is presented, with the demonstration of a tall waveguide taper (≈1:5 aspect ratio) with low losses and modal crosstalk, and a freestanding photonic lantern mode multiplexer. The new ink can be utilized in a variety of applications and across many materials, requiring compact, durable, and complex optical elements.

Flexible Composites Based on Thermoplastic Elastomers for Laser Direct Writing: Porous Structures

Flexible Composites Based on Thermoplastic Elastomers for Laser Direct Writing: Porous Structures

Thin Film of Poly-peri-naphthalene (PPN) Fabricated by Direct Laser Writing and Its Use for Humidity Sensing.

Inspired by the versatility of the direct laser writing carbonization (DLWc) technique as well as the metal-ion-assisted coordination polymer of 3,4,9,10-perylene tetracarboxylic dianhydride (PTCDA), in the present study, we present a DLWc-enabled approach for cost-effectively fabricating a poly-peri-naphthalene (PPN) thin film with the advantages of patternability, environmental benignity, and scalability. Optical and scanning electron microscopy, as well as ultraviolet-visible-near-infrared, Fourier transform infrared, Raman, and X-ray photoelectron spectroscopies, were performed to confirm that the spray-coated thin film of the Mg-PTCDA coordination polymer can be in situ converted into a PPN thin film upon CO2 laser irradiation. The effects of the laser power and Mg2+ concentration on the structure and electrical properties of the laser-processed PPN thin films were investigated. Lastly, we demonstrated that the laser-processed PPN thin films can be used for humidity sensing with characteristics of a rapid response time and excellent hysteresis. It is expected that this new method for fabricating PPN thin films will lead to a wide range of applications of PPN in the fields of sensing, electronics, and energy storage.

A highly responsive and sensitive flexible strain sensor with conductive cross-linked network by laser direct writing

As a critical component of wearable electronic devices, flexible strain sensors have made significant contributions in the fields of smart healthcare, motion monitoring and communication, garnering escalating research interests. However, the pursuit of ideal materials synergizing high sensitivity with facile and cost-effective manufacturing methodologies remains a persistent challenge, significantly hindering the full realization of the potential of flexible strain sensors. Herein, an innovative hybrid conductive network architecture constituted by multi-walled carbon nanotubes and laser-induced graphene (MWCNTs/LIG) has been explored via a facile, cost-effective, controllable, and environmentally friendly laser direct writing (LDW) technique. Subsequently, the resultant MWCNTs/LIG composite with a cross-linked microstructure has been harnessed for the fabrication of a high-performance strain sensor. Notably, the proposed sensor exhibits remarkable sensitivity with a gauge factor (GF) reaching 192, rapid response and recovery times of 27/20 ms, and favorable durability exceeding 2300 cycles. Furthermore, the developed sensor demonstrates the capability to accurately capture full-range motions in real-time, as well as the ability to transmit information as a portable communication device. This promising discovery offers a new insight for the flourishing development of high-performance flexible strain sensors in the realm of wearable sensing.

Study on the Thermal Radiation Characteristics of Tungsten Surface Grating Structures Prepared by Femtosecond Laser Direct Writing

Study on the Thermal Radiation Characteristics of Tungsten Surface Grating Structures Prepared by Femtosecond Laser Direct Writing

Design and fabrication of a Fresnel zone plate with an enhanced depth of focus

A Fresnel zone plate (EFZP) with an extended depth of focus can maintain focused monochromatic light at different distances compared to a general Fresnel zone plate (FZP). The focal distances are determined by dividing the zone plate into multiple areas based on the desired order. The EFZP has potential applications in various research fields such as microscopy, direct laser lithography, and optical coherence tomography. However, manufacturing an EFZP is challenging due to the high precision requirements and difficulties associated with the calculation and simulation processes. In this research, a complete process is presented to design, simulate, and fabricate an EFZP using a Fourier optics design, simulations, and a direct laser lithographic machine. The resulting EFZP has an increased depth of focus of about nine times compared to a general Fresnel zone plate with similar parameters, while maintaining the focal spot diameter. The performance of this EFZP is evaluated through optical verification and mathematical simulation methods.