Langmuir Probe Method Research Articles

Mechanism of Improving Etching Selectivity for E-Beam Resist AR-N 7520 in the Formation of Photonic Silicon Structures

The selectivity of the reactive ion etching of silicon using a negative electron resist AR-N 7520 mask was investigated. The selectivity dependencies on the fraction of SF6 in the feeding gas and bias voltage were obtained. To understand the kinetics of passivation film formation and etching, the type and concentration of neutral particles were evaluated and identified using plasma optical emission spectroscopy. Electron temperature and electron density were measured by the Langmuir probe method to interpret the optical emission spectroscopy data. A high etching selectivity of 8.0 ± 1.8 was obtained for the etching process. The optimum electron beam exposure dose for defining the mask was 8200 pC/m at 30 keV.

Determination of the electron energy distribution function in weakly ionized plasma by means of a Langmuir probe and numerical methods

Numerical methods are used to determine the Electron Energy Distribution Function (EEDF) from I(V) probe characteristics, which are measured using a cylindrical Langmuir probe in the case of weakly ionized plasmas. This task becomes difficult when measurement is complicated by the presence of an external magnetic field or in high pressure plasma because of collision between electrons and heavy particles within the sheath formed around the probe tip. In this case, the electron current must be calculated using the Swift law instead of the Langmuir law. The numerical methods consist of determining the derivative functions of the I(V) probe characteristics in the case of a noisy signal and correcting the EEDF taking into account the electron diffusion coefficient within the sheath formed around the probe collector. Algorithms are given to detail the methods step by step, which can be used to write homemade codes. The methods are tested in the case of different plasma reactors described in the literature, such as microwave plasma and rf (radio-frequency) and dc (direct current) plasma reactors working at different pressures with or without magnetic field. The results show the effect of pressure or magnetic field on the I(V) probe characteristics because of the change in the electron diffusion coefficient.

Overview of TOMAS plasma diagnostics

This paper presents an overview of the TOMAS plasma diagnostics. The Langmuir probe method is employed to measure electron temperature, density and floating potential distributions.Two triple probes (horizontal and vertical distributions) and a single probe (horizontal distribution) are used. The measured plasma parameters by the triple and single probes are compared. The ion and neutral atom flux and energy distribution is respectively characterized with a Residual Field Energy Analyzer and a Time-of-Flight Neutral Particle Analyzer. To determine the elemental/charge content of the plasma, the passive method of time-resolved optical emission spectroscopy is used. The time dependence of the integral flow of plasma emission from the discharge is registered by a photodetector. Using a filter allows the photodetector to measure spectral line intensities. To record a wide variety of plasma events several video diagnostics are used. It includes slow video cameras and one high-speed camera in the visible range including Hα.

Subthreshold Laser Ablation Measurements by Langmuir Probe Method for ns Irradiation of HfO2 and ZrO2.

The unbiased Langmuir probe (LP) method was used to perform measurements on HfO2 and ZrO2 samples around the laser ablation threshold on a wide range of irradiation conditions. Important changes in the lifetime (from ms to μs) and the shape of the charge particle current were seen with the increase of the laser fluence. The ablation threshold was estimated by evaluating the overall average ablated charge as a function of the laser fluence. Above the ablation threshold, the generation of high kinetic species is seen, which can reach several keV. An important jump in ion acceleration potential is observed for values above 1 J/cm2, which coincides with the dominant presence of negative ions in the plasma. The evolution of several plasma parameters (ion density, expansion velocity, electron temperature, Debye length) was investigated and correlated with the fundamental ablation mechanism involved in various irradiation regimes. The LP data were correlated with COMSOL simulations on the maximum surface temperature reached during irradiation. Important correlations between the evaporation and melting processes and ablation threshold fluence and ion acceleration phenomena are also reported.

Effect of mixing CF4 with O2 on electron characteristics of capacitively coupled plasma

Effect of mixing CF4 with O2 on electron parameters in capacitively coupled RF plasma was studied. Adding CF4 gas to fixed O2 flow, electron energy probability functions were measured by a Langmuir probe method. As the CF4 gas was added, the decrease in the probability of low energy electrons was observed. The proportion of low energy electrons decreased gradually as the CF4 gas ratio increased, respectively. From electron energy probability functions, electron densities and electron temperatures were calculated. As the CF4 gas ratio increased, electron density decreased and electron temperature increased. Collision cross sections of low energy electrons can explain electron parameter behaviors. By the strong electron attachment of fluorine species which were generated from CF4, low energy electrons depleted by attachment, and the overall electron temperature increased. However, as the elastic collision cross section of CF4 is not different from that of O2, the heating mechanism and physics of high energy electrons did not change.

Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

A floating harmonic probe (FHP) is used to measure the electron energy and ion density in plasmas. It applies an AC voltage to an electrically floated probe and measures harmonic frequency components in the probe current which contains information about the parameters. In this study, we have quantitatively investigated the effects of stray impedances in an FHP measurement system on the calculated parameters. We also discuss the influence of the electron energy distribution function (EEDF) when it deviates from a Maxwellian shape on the FHP measurement. A new approach of multi-harmonic analysis of FHP data (MHA-FHP) is proposed to analyze the electron energy in plasmas with non-Maxwellian EEDFs. The MHA-FHP method has been compared with the conventional FHP and Langmuir probe methods through the measurement of low-temperature argon plasmas. Experimental results indicated that the MHA-FHP method can provide the shape of the EEDFs, effective electron temperature, and ion density.

Characteristics of plasma in a novel laser-assisted pulsed plasma thruster

A novel laser-assisted pulsed plasma thruster (LA-PPT) is proposed as an electric propulsion thruster, which separates laser ablation and electromagnetic acceleration. It aims for a higher specific impulse than that achieved with conventional LA-PPTs. Owing to the short-time discharge and the novel configuration, the physical mechanism of the discharge is unclear. Time and spatial-resolved optical emission spectroscopy was applied to investigate the variation in the plasma properties in the thruster discharge channel. The plasma species, electron temperature, and electron density were obtained and discussed. Our investigation revealed that there were H α , H β , H γ , H ε atoms, C I, C II, C III, C IV, Cl I, Cl II particles, and a small amount of CH, C3, C2, H2 neutral molecular groups in the plasma. The electron temperature of the discharge channel of the thruster was within 0.6–4.9 eV, and the electron density was within (1.1–3.0) 1018 cm−3, which shows that the optical emission spectroscopy method is to measure the electron excitation temperature and electron density in heavy particles. But the Langmuir probe method is to measure the temperature and density of free electrons. The use of laser instead of spark plug as the ignition mode significantly changed the plasma distribution in the discharge channel. Unlike the conventional PPT, which has high electron density near the thruster surface, LA-PPT showed relatively large electron density at the thruster outlet, which increased the thruster specific impulse. In addition, the change in the ignition mode enabled the electron density in the LA-PPT discharge channel to be higher than that in the conventional PPT. This proves that the ignition mode with laser replacing the spark plug effectively optimised the PPT performance.

A study on the influence of external magnetic field on Nitrogen RF discharge using Langmuir probe and OES methods

This paper reports the study of the effects of an externally applied magnetic field (0–300 G), in the mode transition as well as in the radial and axial variation of different plasma parameters such as electron density, temperature, etc, in nitrogen RF discharge with the help of an RF compensated Langmuir probe (LP). Also, Optical Emission Spectroscopy (OES) study is performed in order to have a good understanding of the properties of plasma at different magnetic fields. Data collected from LP shows all three mode transitions (E, H, and W mode) in presence of magnetic fields whereas for no magnetic field only two modes (E and H) are visible. The measured value of electron density by using LP is further verified and compared theoretically using particle and power balance equations. However, the overall density profile attains a higher value for no magnetic field. This rise in overall density at 0 G field is further explained in terms of EEPF plot and OES analysis. The EEPF plot reveals that the number of high energy electrons is reduced with the application of magnetic fields. Also from OES analysis, it is found that the molecular excitations in N2 second positive system [C 3Πu (ν′) → B 3Πg (ν′′)] are increased in the presence of magnetic fields whereas with no magnetic field the ionization peak of N2 first negative system and the molecular dissociation peak at 746.8 nm attains the largest value at a certain power. Plasma density values calculated with the OES method at the different magnetic fields and RF power show a similar trend with respect to the density values obtained from the LP method.

On the Dynamics of Transient Plasmas Generated by Nanosecond Laser Ablation of Several Metals.

The dynamics of transient plasma generated by UV ns-laser ablation of selected metals (Co, Cu, Ag, Bi) were investigated by the Langmuir Probe method in angle- and time-resolved modes. Multiple ionic and electronic structures were seen for all plasmas with some corresponding to anions or nanoparticle-dominated structures. The addition of an Ar atmosphere energetically confined the plasma and increased the charge density by several orders of magnitude. For pressure ranges exceeding 0.5 Pa fast ions were generated in the plasma as a result of Ar ionization and acceleration in the double layer defining the front of the plasma plume. Several correlations between the target nature plasma properties were attempted. The individual plasma structure expansion velocity increases with the melting point and decreases with the atomic mass while the corresponding charged particle densities decrease with the melting point, evidencing the relationship between the volatility of the sample and the overall abated mass.

The Plasma Parameters of Penning Discharge with Negatively Biased Metal Hydride Cathode at Longitudinal Emission of H– Ions

The enhancement of negative ion production in a volume Penning based source could be performed by the application of metal hydride cathode. Hydrogen isotopes are stored there in a chemically bound atomic state and desorbed from the metal hydride under the discharge current impact. Highly vibrationally / rotationally excited molecules H2* are formed by recombination of H-atoms at the metallic surface, which then can be easily converted to H– by dissociative electron attachment without the pre-excitation of a H2 molecule in plasma. Changing the discharge properties opens the way of source design simplification by negative ions extraction along the external magnetic field in comparison with traditional volume sources, where the extraction is performed perpendicular to magnetic field. The separation of negative ions from the extracted in longitudinal direction flux of charged particles was performed by an electromagnetic filter basing on numerical calculations of particles trajectories. The dependence of electron temperature and plasma density on the bias potential is carried out by Langmuir probe method. The measurement of electron energy was performed by an electrostatic energy analyzer. It was shown that the yield of H– ions depends on the electrical bias on the metal hydride cathode with strong dependences on the plasma electrons temperature. The estimation of the bias potential versus Te was performed under the assumption of electron Boltzmann distribution near the cathode. The presence of additional groups of electrons with higher energies distorts the behavior of H– current, but generally the experimental results are in good agreement with estimation based on the physics behind the Boltzmann distribution. The optimum for the effective extraction of H– ions was revealed, when the metal hydride cathode had been electrically biased at -20V and higher, and plasma density reaches the maximum value to 2×109 cm-3.

Thermalized collisional pre-sheath detected in dense plasma with coherent and incoherent Thomson scattering

In the direct vicinity of plasma-facing surfaces, the incident plasma particles interact with surface-recombined neutrals. Remarkably high near-surface plasma pressure losses were observed in the high-flux linear plasma generator Magnum-PSI. Combining the incoherent and coherent Thomson scattering diagnostics, we directly measured particle, momentum and energy fluxes down to 3 mm from the plasma target surface. At the surface, the particle and total heat flux were also measured, using respectively an in-target Langmuir probe and thermographic methods. The near-surface momentum and energy losses scale with density, and amount to at least 50% and 20%, respectively, at n e = 8 × 1020 m−3. These losses are attributed to the efficient exchange of charge, momentum and energy between incident plasma and surface-recombined neutrals. In low-temperature plasmas with sufficient density, incident particles go through several cycles of interaction and surface deposition before leaving the plasma, thereby providing an effective alternative dissipation channel to the incident plasma. Parallel plasma parameter profiles exhibit a transition with increasing plasma density. In low-density conditions, the plasma temperature is constant and near-surface ion acceleration is observed, attributed to the ambipolar electric field. Conversely, deceleration and plasma cooling are observed in dense conditions. These results are explained by the combined effect of ion–neutral friction and electron–ion thermal equilibration in the so-called thermalized collisional pre-sheath. The energy available for ambipolar acceleration is thus reduced, as well as the upstream flow velocity. In the ITER divertor, enhanced near-surface p–n interaction is expected as well, given the overlap in plasma conditions. Including these effects in finite-element scrape-off layer models requires a near-surface resolution smaller than the neutral mean free path. This amounts to 1 mm in Magnum-PSI, and possibly an order of magnitude smaller in ITER.

Langmuir Probe Technique for Plasma Characterization during Pulsed Laser Deposition Process

The history of pulsed laser deposition (PLD) and transient plasmas generated by laser ablation is intertwined with the development of various techniques for its fundamental understanding. Some diagnostic tools have been developed to better suit the rapid transient nature of the plasma (space and time dependence of all parameters, fast decay and complex chemistry inside the plasma), whereas others have been adapted from basic plasma physics studies. Langmuir probe method has been used as a real-time in situ diagnostic tool for laser ablation and later for PLD. It remains a useful tool for the PLD community arsenal, which can easily be adapted to the development of new lasers and ablation regimes and new deposition configuration, being one of the most versatile techniques for plasma diagnostics. It is the cornerstone on which charge particles are analyzed and has led to several important discoveries, such as multiple peak distribution, selective acceleration during expansion, plume splitting, plasma turbulences and fluctuations. However, because the Langmuir probe theory adaptation from classical plasma physics is not straightforward, it might lead to misinterpretation and often incorrect analysis of data. This review analyzes the limits and understanding of the technique as a foundation for attaining its full potential, which can impact the way PLD is used. This is especially useful for the pressing need of real-time, in-situ diagnostics and feedback loops for systematic semi-industrial implementation of the PLD technique.

Application of the triple Langmuir probe to study local plasma parameters in the radiofrequency discharge that is placed in an additional applied magnetostatic field

This paper considers the application of the triple Langmuir probe method to investigate the local plasma parameters of the radio frequency (RF) discharge that is placed in the applied magnetostatic field. The main criteria applicability for such a method for experimental diagnostics of RF plasma parameters is presented. As an example, this paper presents experimental results that were obtained using the proposed method on local plasma parameters in one of the cross sections of the discharge chamber of the RF ion source with an applied magnetostatic field. The influence of the magnetostatic field on the radial distributions of charged particle density and electron temperature is shown.

High-spatial-resolution image reconstruction-based method for measuring electron temperature and density of the very near field of an applied-field magnetoplasmadynamic thruster

A method based on image reconstruction is proposed for measuring the electron temperature () and density () distribution of the axisymmetric low-temperature argon plasma plume of applied-field magnetoplasmadynamic thrusters (AF-MPDTs). The method uses a complementary metal–oxide–semiconductor camera with narrowband filters of 460 and 500 nm to obtain the raw projection images in specific wavelength ranges. An image reconstruction method is developed to construct relative emission intensity profiles. The electron temperature distribution can be obtained by combining the relative emission intensity ratio of two profiles with a simple argon kinetic model. The electron density distribution can be calculated by constructing a function of relative emission intensity containing and . To verify the feasibility of this method, we diagnosed a very near field plume of a 15 kW AF-MPDT and obtained the distribution of parameters with a spatial resolution of 0.23 mm. The results show that the maximum and are located on the centerline near the exit plane of the thruster and decrease with both radial and axial distances. The second peak appears in the radial direction of both the and distributions, while their zones do not overlap. A comparative analysis of measurement results obtained by this method and the Langmuir probe method is performed to prove its accuracy. Moreover, this measurement method has the advantages of high spatial resolution and the ability to diagnose high-density and magnetized plasma. This method can be also applied to other optically thin axisymmetric low-temperature argon plasmas.

Plasma parameters in very high frequency helium and argon plasmas at atmospheric pressure

A simple procedure has been proposed to estimate atmospheric-pressure (AP) plasma parameters based on the electric field simulation of a very-high-frequency plasma system including the impedance matching unit. The capacitively coupled plasma is generated between metal electrodes with a narrow gap, where the standard Langmuir probe method cannot be applied. The amplitudes of current density (J0) and voltage (V0) between the electrodes are determined by the three-dimensional computer simulation of the system in the impedance matched state using two experimental parameters (i.e., the separations between two parallel-plate capacitors) in the matching unit. Approximate analytical solutions relating the central electron density (n0) and the sheath thickness to J0 and V0 are derived based on a simplified inhomogeneous plasma model with collisional sheaths. The average electron temperature Te is estimated using a power balance relation between the total powers absorbed and lost in the ionizing plasma. The results on power dependences of n0 and Te show reasonable agreement with the predictions by the particle and power balance relations. In the case of AP plasma of Ar or He mixed with impurity or process gas molecules, it is impossible to determine Te. However, n0 can be obtained and the collisional energy loss per electron–ion pair creation (ɛc) can be estimated, which brings certain information on the change of plasma chemistry. Since the proposed procedure is simple and non-intrusive, it might become a useful tool for discussing AP plasma properties in process developments.

Generation and Diagnostics of Pulse Plasma Flows

Pulsed plasma accelerators are widely used for the production of high-temperature pulsed plasma flows for fundamental and practical applications. The basic parameters of pulsed plasma accelerators are the characteristics of the external electric and magnetic circuits, as well as the structural and energy properties of the plasma flow. This work aims to characterize an IPU-30 pulsed plasma accelerator. The triple Langmuir probe method, calorimetric plasma energy density measurements, Rogowski coil, and high-speed visible imaging with a Phantom VEO710S fast camera are used to diagnose the pulsed plasma obtained in the IPU-30. The local plasma parameters such as electron temperature and density, the energy density of the pulsed plasma flow, pulsed plasma current, and also discharge current are experimentally obtained at different discharge voltages and air pressure in the chamber. The typical waveforms of the triple probe and Rogowski coil are presented in the form of oscillograms. The images of plasma formation in the discharge gap are obtained and the velocity of a pulsed plasma flow is measured.

Charged Particle Oscillations in Transient Plasmas Generated by Nanosecond Laser Ablation on Mg Target

The dynamics of a transient plasma generated by laser ablation on a Mg target was investigated by means of the Langmuir probe method and fractal analysis. The empirical data showcased the presence of an oscillatory behavior at short expansion times (<1 μs) characterized by two oscillation frequencies and a classical behavior for longer evolution times. Space- and time-resolved analysis was implemented in order to determine main plasma parameters like the electron temperature, plasma potential, or charged particle density. In the motion fractal paradigm, a theoretical model was built for the description of laser-produced plasma dynamics expressed through fractal-type equations. The calibration of such dynamics was performed through a fractal-type tunneling effect for physical systems with spontaneous symmetry breaking. This allows both the self-structuring of laser-produced plasma in two structures based on its separation on different oscillation modes and the determination of some characteristics involved in the self-structuring process. The mutual conditionings between the two structures are given as joint invariant functions on the action of two isomorph groups of SL(2R) type through the Stoler-type transformation, explicitly given through amplitude self-modulation.

Complementary Characterization of Laser-Induced Plasmas by Optical Emission Spectroscopy and Triple Langmuir Probe

In this article, we study the temporal evolution of the electron density and temperature of carbon laser-produced plasmas (LPP) using a combination of optical emission spectroscopy (OES) and the triple Langmuir probe (TLP) method. OES has been widely used to characterize LPPs but it is limited to distances relatively close to the target. On the other hand, the main advantage of TLP over the single-probe method is that it allows to obtain simultaneous measurements of electron temperature ( $T_{e}$ ) and density ( $N_{e}$ ), without any voltage sweeping. In this article, we compare both techniques; measurements by OES were performed at distances from the target 5 cm. The plasma was generated by focusing nanosecond laser pulses onto a high purity graphite target placed inside a vacuum chamber. Our results show that the values of $T_{e}$ measured using both techniques predict decreasing exponential behavior. $N_{e}$ determined by the spectral line Stark broadening in OES ( 5 cm). This difference in the electron density can be explained by radiative recombination and the presence of different kinds of plasma species detected by the TLP technique. The results show that both methods are complementary and their combination can be used to characterize LPP in a wide range of distances and timescales.

Physical and mechanical properties of surface modified poly ethylene terephthalate films through low pressure plasma and ultra-violet light

The present work focussed on the effect of UV light radiation and Direct current glow Discharge Plasma (DC) on Polyethylene Terephthalate (PET) surface for food packaging applications. The PET was treated by three different plasma such as air, argon, and oxygen with a treatment time of 5–25 min and pressure kept as 3 Pa. The PET film was exposed by UV radiation using the wavelength between 200–400 nm UV light Lamp with a treatment time of 5–25 min. And also we measured the electron temperature (Te) and electron density (Ne) of the three different plasmas by Single Langmuir probe method. The surface properties of UV light radiated and plasma treated PET films were characterized by static contact angle, x-ray diffraction, Optical analysis (UV–vis), ATR-FTIR, Structural analysis (AFM)) and the results were compared. We observed that the bulk properties of the treated materials remained unchanged. This was confirmed by x-ray diffraction results. The new polar functional groups were also detected on the treated films by FTIR spectrum analysis. The surface roughness was calculated from AFM analysis for both untreated and treated PET films. The oxygen plasma treated sample showed higher roughness, which indicated that a large amount of oxygen containing polar groups appeared on the surface of the PET film. The obtained results reveal that the plasma treated PET films were more effective than the Ultra-violet (UV) light radiated film.

Room temperature photoluminescence in plasma treated rutile TiO2 (110) single crystals

Defects play a key role in tailoring the functional properties of metal oxides for next generation technologies. A comprehensive understanding and control of defects is therefore of vital importance in order to determine defect engineering strategies in materials and to allow for their technological realization. In this article, we report room temperature photoluminescence from plasma treated rutile TiO2 (110) single crystals. The effect of capacitively coupled radio frequency plasma etching on the luminescence properties of TiO2 (110) single crystals is discussed in detail. The plasma treatment modifies the surface of TiO2 (110) single crystals and introduces oxygen vacancies in the near surface region. The discharge parameters such as treatment time and pressure are correlated with the luminescence properties of treated TiO2 (110) single crystals. The Langmuir probe method is employed to determine the plasma electron density ‘ne‘, ion density ‘ni‘, electron temperature ‘Te’ and electron energy probability function (EEPF) of the plasma used to etch the TiO2 single crystals. Photoluminescence (PL) spectra reveal blue and green-light emission with an intensity dependent on the plasma treatment process. We hope that inducing defects through plasma treatment will be extended to other metal oxides surfaces, which may find utility in various applications.