The L10-type FeNi intermetallic phase is an important rare-earth-free magnetic material. However, its fabrication remains challenging. In this paper, we propose a chemical-interaction-enhanced ordering mechanism in vapor deposition processes, which is supported by molecular dynamics deposition simulations. Additionally, we describe guidelines for the fabrication of further ordered intermetallic thin films. Thus, we present not only the fabrication of an L10-type FeNi intermetallic magnet but also guidelines for developing diverse structural and functional layer-ordered intermetallic materials.